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- W2051204282 abstract "This paper treats a for the semiconductor industry somewhat different application: The first-ever manufacture of Diffractive Optical Elements (DOE’s) as directly written multilevel diffractive micro-reliefs using the DUV SLM-based Sigma7300 Mask. The reliefs were manufactured in the DUV Chemically Amplified Resist (CAR) FEP-171. This particular application is of direct interest since DOE’s are already incorporated in the Sigma7300 system. The design and manufacture are demonstrated with (1.) A Fan-out element and (2.) A logotype generator. The first attempts, reported here, resulted in a Fan-out element with diffraction efficiency of 64% compared to the theoretical design of 88%." @default.
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- W2051204282 date "2004-05-28" @default.
- W2051204282 modified "2023-09-25" @default.
- W2051204282 title "DOE manufacture with the DUV SLM-based Sigma7300 laser pattern generator" @default.
- W2051204282 doi "https://doi.org/10.1117/12.535767" @default.
- W2051204282 hasPublicationYear "2004" @default.
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