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- W2051215175 abstract "193 nm lithography is expected today to be an emerging solution for the development and the production of future integrated circuits based on sub 150 nm design rules. However the characterization and the evaluation of these tools require a lot of effort due to the 193 nm resist behavior during SEM observations. This paper presents the process flow chart to allow the evaluation of a ASM-L 5500/900 193 nm scanner by electrical measurement and the stack used for this study. After the validation of this flow chart, this work gives an overview of the ASM-L 5500/900 performances." @default.
- W2051215175 created "2016-06-24" @default.
- W2051215175 creator A5001540420 @default.
- W2051215175 creator A5002676044 @default.
- W2051215175 creator A5003247262 @default.
- W2051215175 creator A5010475220 @default.
- W2051215175 creator A5011477829 @default.
- W2051215175 creator A5017788193 @default.
- W2051215175 creator A5020015215 @default.
- W2051215175 creator A5028290491 @default.
- W2051215175 creator A5051742527 @default.
- W2051215175 creator A5052066768 @default.
- W2051215175 creator A5059262133 @default.
- W2051215175 creator A5073427918 @default.
- W2051215175 creator A5081353247 @default.
- W2051215175 date "2000-06-02" @default.
- W2051215175 modified "2023-10-01" @default.
- W2051215175 title "<title>193-nm scanner characterization by SEM and electrical CD measurements</title>" @default.
- W2051215175 doi "https://doi.org/10.1117/12.386499" @default.
- W2051215175 hasPublicationYear "2000" @default.
- W2051215175 type Work @default.
- W2051215175 sameAs 2051215175 @default.
- W2051215175 citedByCount "0" @default.
- W2051215175 crossrefType "proceedings-article" @default.
- W2051215175 hasAuthorship W2051215175A5001540420 @default.
- W2051215175 hasAuthorship W2051215175A5002676044 @default.
- W2051215175 hasAuthorship W2051215175A5003247262 @default.
- W2051215175 hasAuthorship W2051215175A5010475220 @default.
- W2051215175 hasAuthorship W2051215175A5011477829 @default.
- W2051215175 hasAuthorship W2051215175A5017788193 @default.
- W2051215175 hasAuthorship W2051215175A5020015215 @default.
- W2051215175 hasAuthorship W2051215175A5028290491 @default.
- W2051215175 hasAuthorship W2051215175A5051742527 @default.
- W2051215175 hasAuthorship W2051215175A5052066768 @default.
- W2051215175 hasAuthorship W2051215175A5059262133 @default.
- W2051215175 hasAuthorship W2051215175A5073427918 @default.
- W2051215175 hasAuthorship W2051215175A5081353247 @default.
- W2051215175 hasConcept C105795698 @default.
- W2051215175 hasConcept C111919701 @default.
- W2051215175 hasConcept C127413603 @default.
- W2051215175 hasConcept C154945302 @default.
- W2051215175 hasConcept C171250308 @default.
- W2051215175 hasConcept C190812933 @default.
- W2051215175 hasConcept C192562407 @default.
- W2051215175 hasConcept C199360897 @default.
- W2051215175 hasConcept C199639397 @default.
- W2051215175 hasConcept C204223013 @default.
- W2051215175 hasConcept C2779227376 @default.
- W2051215175 hasConcept C2779751349 @default.
- W2051215175 hasConcept C2780841128 @default.
- W2051215175 hasConcept C2984431290 @default.
- W2051215175 hasConcept C33923547 @default.
- W2051215175 hasConcept C41008148 @default.
- W2051215175 hasConcept C49040817 @default.
- W2051215175 hasConcept C53524968 @default.
- W2051215175 hasConcept C9395851 @default.
- W2051215175 hasConcept C98045186 @default.
- W2051215175 hasConceptScore W2051215175C105795698 @default.
- W2051215175 hasConceptScore W2051215175C111919701 @default.
- W2051215175 hasConceptScore W2051215175C127413603 @default.
- W2051215175 hasConceptScore W2051215175C154945302 @default.
- W2051215175 hasConceptScore W2051215175C171250308 @default.
- W2051215175 hasConceptScore W2051215175C190812933 @default.
- W2051215175 hasConceptScore W2051215175C192562407 @default.
- W2051215175 hasConceptScore W2051215175C199360897 @default.
- W2051215175 hasConceptScore W2051215175C199639397 @default.
- W2051215175 hasConceptScore W2051215175C204223013 @default.
- W2051215175 hasConceptScore W2051215175C2779227376 @default.
- W2051215175 hasConceptScore W2051215175C2779751349 @default.
- W2051215175 hasConceptScore W2051215175C2780841128 @default.
- W2051215175 hasConceptScore W2051215175C2984431290 @default.
- W2051215175 hasConceptScore W2051215175C33923547 @default.
- W2051215175 hasConceptScore W2051215175C41008148 @default.
- W2051215175 hasConceptScore W2051215175C49040817 @default.
- W2051215175 hasConceptScore W2051215175C53524968 @default.
- W2051215175 hasConceptScore W2051215175C9395851 @default.
- W2051215175 hasConceptScore W2051215175C98045186 @default.
- W2051215175 hasLocation W20512151751 @default.
- W2051215175 hasOpenAccess W2051215175 @default.
- W2051215175 hasPrimaryLocation W20512151751 @default.
- W2051215175 hasRelatedWork W2005109211 @default.
- W2051215175 hasRelatedWork W2019215562 @default.
- W2051215175 hasRelatedWork W2033005009 @default.
- W2051215175 hasRelatedWork W2043778799 @default.
- W2051215175 hasRelatedWork W2044223130 @default.
- W2051215175 hasRelatedWork W2051215175 @default.
- W2051215175 hasRelatedWork W2056310104 @default.
- W2051215175 hasRelatedWork W2059125648 @default.
- W2051215175 hasRelatedWork W3013964603 @default.
- W2051215175 hasRelatedWork W4367603235 @default.
- W2051215175 isParatext "false" @default.
- W2051215175 isRetracted "false" @default.
- W2051215175 magId "2051215175" @default.
- W2051215175 workType "article" @default.