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• W2051228674 abstract "TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings." @default.
• W2051228674 created "2016-06-24" @default.
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• W2051228674 date "2006-12-01" @default.
• W2051228674 modified "2023-09-30" @default.
• W2051228674 title "TiSiN nanocomposite coatings by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)" @default.
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• W2051228674 doi "https://doi.org/10.1016/j.surfcoat.2006.03.029" @default.
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