Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051238720> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2051238720 endingPage "1290" @default.
- W2051238720 startingPage "1283" @default.
- W2051238720 abstract "We present a comprehensive approach of designing on-chip inductors using a CMOS-compatible technology on a porous silicon substrate. On-chip inductors realized on standard CMOS technology on bulk silicon suffer from mediocre Q-factor values partly because of the loss created by the Si substrate at higher frequencies, in addition to the metal losses. We examine the alternative of using porous Si as a thick layer isolating the Si substrate from the metallization in an otherwise standard CMOS technology. We present theoretical designs produced with full-wave Method-of-Moments simulations, verified by measurements in standard 0.18 μm CMOS technology using Al metallization. When porous Si is introduced in that technology, the same inductor metallization produced Q-factor enhancements of the order of 50%, compared to the same inductor on bulk crystalline silicon. We also produce optimized single-ended inductor designs using Cu on porous Si, in a 0.13 μm-compatible CMOS technology. The resulting Q-factors are enhanced by a factor of 2 and reach values of 30 or more in the 2–3 GHz frequency range. Even higher quality factors can be obtained in this technology when differential designs are used." @default.
- W2051238720 created "2016-06-24" @default.
- W2051238720 creator A5007722886 @default.
- W2051238720 creator A5063179512 @default.
- W2051238720 date "2006-07-01" @default.
- W2051238720 modified "2023-10-17" @default.
- W2051238720 title "Design and simulation of integrated inductors on porous silicon in CMOS-compatible processes" @default.
- W2051238720 cites W1984060711 @default.
- W2051238720 cites W2013643275 @default.
- W2051238720 cites W2021824507 @default.
- W2051238720 cites W2056693201 @default.
- W2051238720 cites W2088493666 @default.
- W2051238720 cites W2102096768 @default.
- W2051238720 cites W2128128047 @default.
- W2051238720 cites W2128594095 @default.
- W2051238720 cites W2167004581 @default.
- W2051238720 cites W2567225061 @default.
- W2051238720 cites W3217269181 @default.
- W2051238720 doi "https://doi.org/10.1016/j.sse.2006.05.021" @default.
- W2051238720 hasPublicationYear "2006" @default.
- W2051238720 type Work @default.
- W2051238720 sameAs 2051238720 @default.
- W2051238720 citedByCount "17" @default.
- W2051238720 countsByYear W20512387202012 @default.
- W2051238720 countsByYear W20512387202013 @default.
- W2051238720 countsByYear W20512387202014 @default.
- W2051238720 countsByYear W20512387202017 @default.
- W2051238720 crossrefType "journal-article" @default.
- W2051238720 hasAuthorship W2051238720A5007722886 @default.
- W2051238720 hasAuthorship W2051238720A5063179512 @default.
- W2051238720 hasConcept C119599485 @default.
- W2051238720 hasConcept C127413603 @default.
- W2051238720 hasConcept C144534570 @default.
- W2051238720 hasConcept C159985019 @default.
- W2051238720 hasConcept C165801399 @default.
- W2051238720 hasConcept C192562407 @default.
- W2051238720 hasConcept C24326235 @default.
- W2051238720 hasConcept C2776685891 @default.
- W2051238720 hasConcept C41008148 @default.
- W2051238720 hasConcept C46362747 @default.
- W2051238720 hasConcept C49040817 @default.
- W2051238720 hasConcept C544956773 @default.
- W2051238720 hasConcept C6648577 @default.
- W2051238720 hasConceptScore W2051238720C119599485 @default.
- W2051238720 hasConceptScore W2051238720C127413603 @default.
- W2051238720 hasConceptScore W2051238720C144534570 @default.
- W2051238720 hasConceptScore W2051238720C159985019 @default.
- W2051238720 hasConceptScore W2051238720C165801399 @default.
- W2051238720 hasConceptScore W2051238720C192562407 @default.
- W2051238720 hasConceptScore W2051238720C24326235 @default.
- W2051238720 hasConceptScore W2051238720C2776685891 @default.
- W2051238720 hasConceptScore W2051238720C41008148 @default.
- W2051238720 hasConceptScore W2051238720C46362747 @default.
- W2051238720 hasConceptScore W2051238720C49040817 @default.
- W2051238720 hasConceptScore W2051238720C544956773 @default.
- W2051238720 hasConceptScore W2051238720C6648577 @default.
- W2051238720 hasIssue "7-8" @default.
- W2051238720 hasLocation W20512387201 @default.
- W2051238720 hasOpenAccess W2051238720 @default.
- W2051238720 hasPrimaryLocation W20512387201 @default.
- W2051238720 hasRelatedWork W1476329806 @default.
- W2051238720 hasRelatedWork W2027630214 @default.
- W2051238720 hasRelatedWork W2080420513 @default.
- W2051238720 hasRelatedWork W2085027645 @default.
- W2051238720 hasRelatedWork W2165645320 @default.
- W2051238720 hasRelatedWork W2168711049 @default.
- W2051238720 hasRelatedWork W2229772108 @default.
- W2051238720 hasRelatedWork W2359795290 @default.
- W2051238720 hasRelatedWork W2393554192 @default.
- W2051238720 hasRelatedWork W3014521742 @default.
- W2051238720 hasVolume "50" @default.
- W2051238720 isParatext "false" @default.
- W2051238720 isRetracted "false" @default.
- W2051238720 magId "2051238720" @default.
- W2051238720 workType "article" @default.