Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051240927> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2051240927 endingPage "707" @default.
- W2051240927 startingPage "704" @default.
- W2051240927 abstract "Infrared Fourier transform phase-modulated ellipsometry (FTPME) has been used as an in situ probe to study the structural and vibrational properties of thin films. To illustrate the performance of this technique, in situ (Ψ, Δ) measurements have been obtained during the growth of different types of hydrogenated amorphous carbon (a-C:H) films deposited from plasmas onto crystalline silicon (c-Si). The refractive index and thickness of the films have been determined through (Ψ, Δ) analysis over the CHn stretching region. Within this vibrational range, the chemical nature of the bonds formed during the growth can be identified. The role of ion bombardment and interlayer formation, which are both of crucial importance in a-C:H film properties, have been studied under soft plasma conditions. Through studies of the C–H vibrational intensity, a microstructure model can be given for a-C:H deposited at low ion bombardment." @default.
- W2051240927 created "2016-06-24" @default.
- W2051240927 creator A5067440332 @default.
- W2051240927 creator A5028068894 @default.
- W2051240927 date "1998-02-01" @default.
- W2051240927 modified "2023-10-18" @default.
- W2051240927 title "In situ infrared ellipsometry study of the growth of hydrogenated amorphous carbon thin films" @default.
- W2051240927 cites W1963728900 @default.
- W2051240927 cites W1974405759 @default.
- W2051240927 cites W1982488675 @default.
- W2051240927 cites W1997337564 @default.
- W2051240927 cites W2053888493 @default.
- W2051240927 cites W2068884369 @default.
- W2051240927 cites W2162123284 @default.
- W2051240927 cites W2164588182 @default.
- W2051240927 doi "https://doi.org/10.1016/s0040-6090(97)00981-4" @default.
- W2051240927 hasPublicationYear "1998" @default.
- W2051240927 type Work @default.
- W2051240927 sameAs 2051240927 @default.
- W2051240927 citedByCount "10" @default.
- W2051240927 countsByYear W20512409272021 @default.
- W2051240927 crossrefType "journal-article" @default.
- W2051240927 hasAuthorship W2051240927A5028068894 @default.
- W2051240927 hasAuthorship W2051240927A5067440332 @default.
- W2051240927 hasConcept C104779481 @default.
- W2051240927 hasConcept C113196181 @default.
- W2051240927 hasConcept C120665830 @default.
- W2051240927 hasConcept C121332964 @default.
- W2051240927 hasConcept C140205800 @default.
- W2051240927 hasConcept C145148216 @default.
- W2051240927 hasConcept C153642686 @default.
- W2051240927 hasConcept C158355884 @default.
- W2051240927 hasConcept C159985019 @default.
- W2051240927 hasConcept C160892712 @default.
- W2051240927 hasConcept C171250308 @default.
- W2051240927 hasConcept C178790620 @default.
- W2051240927 hasConcept C18293161 @default.
- W2051240927 hasConcept C185592680 @default.
- W2051240927 hasConcept C19067145 @default.
- W2051240927 hasConcept C192562407 @default.
- W2051240927 hasConcept C201931942 @default.
- W2051240927 hasConcept C2776390347 @default.
- W2051240927 hasConcept C2777822432 @default.
- W2051240927 hasConcept C2779667780 @default.
- W2051240927 hasConcept C42067758 @default.
- W2051240927 hasConcept C49040817 @default.
- W2051240927 hasConcept C544956773 @default.
- W2051240927 hasConcept C56052488 @default.
- W2051240927 hasConcept C75937256 @default.
- W2051240927 hasConcept C8010536 @default.
- W2051240927 hasConcept C87976508 @default.
- W2051240927 hasConceptScore W2051240927C104779481 @default.
- W2051240927 hasConceptScore W2051240927C113196181 @default.
- W2051240927 hasConceptScore W2051240927C120665830 @default.
- W2051240927 hasConceptScore W2051240927C121332964 @default.
- W2051240927 hasConceptScore W2051240927C140205800 @default.
- W2051240927 hasConceptScore W2051240927C145148216 @default.
- W2051240927 hasConceptScore W2051240927C153642686 @default.
- W2051240927 hasConceptScore W2051240927C158355884 @default.
- W2051240927 hasConceptScore W2051240927C159985019 @default.
- W2051240927 hasConceptScore W2051240927C160892712 @default.
- W2051240927 hasConceptScore W2051240927C171250308 @default.
- W2051240927 hasConceptScore W2051240927C178790620 @default.
- W2051240927 hasConceptScore W2051240927C18293161 @default.
- W2051240927 hasConceptScore W2051240927C185592680 @default.
- W2051240927 hasConceptScore W2051240927C19067145 @default.
- W2051240927 hasConceptScore W2051240927C192562407 @default.
- W2051240927 hasConceptScore W2051240927C201931942 @default.
- W2051240927 hasConceptScore W2051240927C2776390347 @default.
- W2051240927 hasConceptScore W2051240927C2777822432 @default.
- W2051240927 hasConceptScore W2051240927C2779667780 @default.
- W2051240927 hasConceptScore W2051240927C42067758 @default.
- W2051240927 hasConceptScore W2051240927C49040817 @default.
- W2051240927 hasConceptScore W2051240927C544956773 @default.
- W2051240927 hasConceptScore W2051240927C56052488 @default.
- W2051240927 hasConceptScore W2051240927C75937256 @default.
- W2051240927 hasConceptScore W2051240927C8010536 @default.
- W2051240927 hasConceptScore W2051240927C87976508 @default.
- W2051240927 hasLocation W20512409271 @default.
- W2051240927 hasOpenAccess W2051240927 @default.
- W2051240927 hasPrimaryLocation W20512409271 @default.
- W2051240927 hasRelatedWork W1902713796 @default.
- W2051240927 hasRelatedWork W1967693546 @default.
- W2051240927 hasRelatedWork W1973655923 @default.
- W2051240927 hasRelatedWork W2005902411 @default.
- W2051240927 hasRelatedWork W2012684436 @default.
- W2051240927 hasRelatedWork W2012760547 @default.
- W2051240927 hasRelatedWork W2046126859 @default.
- W2051240927 hasRelatedWork W2073428798 @default.
- W2051240927 hasRelatedWork W2995404748 @default.
- W2051240927 hasRelatedWork W4225474373 @default.
- W2051240927 hasVolume "313-314" @default.
- W2051240927 isParatext "false" @default.
- W2051240927 isRetracted "false" @default.
- W2051240927 magId "2051240927" @default.
- W2051240927 workType "article" @default.