Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051249115> ?p ?o ?g. }
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- W2051249115 endingPage "205" @default.
- W2051249115 startingPage "199" @default.
- W2051249115 abstract "In this paper, we demonstrate the etching of chromium (Cr) film on quartz through a surface reaction induced by an electron beam and enhanced with XeF2 gas. We have studied the influences of the electron beam energy, the gas flow rate and the specimen composition on the etch rate. The electron beam energy has significant influence on the etch rate. The etch rate made by an electron beam of 20 keV is five times higher compared to that made by a beam of 10 keV. The XeF2 gas flow rate shows little effect on the etch rate when the gas pressure is higher than 2 × 10−6 Torr. The structure and grain size of the Cr film did not show any apparent change under exposure to XeF2 or when irradiated by an electron beam, while the composition of Cr has a significant effect on the etch process. The material removal of Cr induced by an electron beam means that it can be applied to the direct fabrication of microstructures on Cr films and that it solves the contamination problem in Cr mask repair." @default.
- W2051249115 created "2016-06-24" @default.
- W2051249115 creator A5013747506 @default.
- W2051249115 creator A5022786337 @default.
- W2051249115 creator A5025877750 @default.
- W2051249115 creator A5064317688 @default.
- W2051249115 date "2003-02-10" @default.
- W2051249115 modified "2023-09-26" @default.
- W2051249115 title "Etching characteristics of chromium thin films by an electron beam induced surface reaction" @default.
- W2051249115 cites W1509012690 @default.
- W2051249115 cites W1966080316 @default.
- W2051249115 cites W1980915909 @default.
- W2051249115 cites W1990104594 @default.
- W2051249115 cites W1997407647 @default.
- W2051249115 cites W2004776840 @default.
- W2051249115 cites W2005562024 @default.
- W2051249115 cites W2030014577 @default.
- W2051249115 cites W2031514230 @default.
- W2051249115 cites W2043194889 @default.
- W2051249115 cites W2046015144 @default.
- W2051249115 cites W2055434286 @default.
- W2051249115 cites W2060020723 @default.
- W2051249115 cites W2060759199 @default.
- W2051249115 cites W2062419712 @default.
- W2051249115 cites W2078603183 @default.
- W2051249115 cites W2091184393 @default.
- W2051249115 cites W2110260551 @default.
- W2051249115 cites W2143816355 @default.
- W2051249115 doi "https://doi.org/10.1088/0268-1242/18/4/302" @default.
- W2051249115 hasPublicationYear "2003" @default.
- W2051249115 type Work @default.
- W2051249115 sameAs 2051249115 @default.
- W2051249115 citedByCount "13" @default.
- W2051249115 countsByYear W20512491152013 @default.
- W2051249115 countsByYear W20512491152014 @default.
- W2051249115 countsByYear W20512491152015 @default.
- W2051249115 countsByYear W20512491152022 @default.
- W2051249115 crossrefType "journal-article" @default.
- W2051249115 hasAuthorship W2051249115A5013747506 @default.
- W2051249115 hasAuthorship W2051249115A5022786337 @default.
- W2051249115 hasAuthorship W2051249115A5025877750 @default.
- W2051249115 hasAuthorship W2051249115A5064317688 @default.
- W2051249115 hasConcept C100460472 @default.
- W2051249115 hasConcept C121332964 @default.
- W2051249115 hasConcept C127413603 @default.
- W2051249115 hasConcept C147120987 @default.
- W2051249115 hasConcept C171250308 @default.
- W2051249115 hasConcept C185544564 @default.
- W2051249115 hasConcept C185592680 @default.
- W2051249115 hasConcept C19067145 @default.
- W2051249115 hasConcept C191897082 @default.
- W2051249115 hasConcept C192562407 @default.
- W2051249115 hasConcept C2779227376 @default.
- W2051249115 hasConcept C42360764 @default.
- W2051249115 hasConcept C49040817 @default.
- W2051249115 hasConcept C511782168 @default.
- W2051249115 hasConcept C95312477 @default.
- W2051249115 hasConceptScore W2051249115C100460472 @default.
- W2051249115 hasConceptScore W2051249115C121332964 @default.
- W2051249115 hasConceptScore W2051249115C127413603 @default.
- W2051249115 hasConceptScore W2051249115C147120987 @default.
- W2051249115 hasConceptScore W2051249115C171250308 @default.
- W2051249115 hasConceptScore W2051249115C185544564 @default.
- W2051249115 hasConceptScore W2051249115C185592680 @default.
- W2051249115 hasConceptScore W2051249115C19067145 @default.
- W2051249115 hasConceptScore W2051249115C191897082 @default.
- W2051249115 hasConceptScore W2051249115C192562407 @default.
- W2051249115 hasConceptScore W2051249115C2779227376 @default.
- W2051249115 hasConceptScore W2051249115C42360764 @default.
- W2051249115 hasConceptScore W2051249115C49040817 @default.
- W2051249115 hasConceptScore W2051249115C511782168 @default.
- W2051249115 hasConceptScore W2051249115C95312477 @default.
- W2051249115 hasIssue "4" @default.
- W2051249115 hasLocation W20512491151 @default.
- W2051249115 hasOpenAccess W2051249115 @default.
- W2051249115 hasPrimaryLocation W20512491151 @default.
- W2051249115 hasRelatedWork W1976828317 @default.
- W2051249115 hasRelatedWork W2052278200 @default.
- W2051249115 hasRelatedWork W2085214564 @default.
- W2051249115 hasRelatedWork W2328433609 @default.
- W2051249115 hasRelatedWork W2330677466 @default.
- W2051249115 hasRelatedWork W2395687693 @default.
- W2051249115 hasRelatedWork W2403608485 @default.
- W2051249115 hasRelatedWork W2748952813 @default.
- W2051249115 hasRelatedWork W2899084033 @default.
- W2051249115 hasRelatedWork W2950981419 @default.
- W2051249115 hasVolume "18" @default.
- W2051249115 isParatext "false" @default.
- W2051249115 isRetracted "false" @default.
- W2051249115 magId "2051249115" @default.
- W2051249115 workType "article" @default.