Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051265972> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2051265972 endingPage "848" @default.
- W2051265972 startingPage "846" @default.
- W2051265972 abstract "Since extrinsic stacking faults can form during postimplantation annealing of Si, understanding their properties is important for reliable control of semiconductor manufacturing processes. We demonstrate how grazing incidence x-ray scattering methods can be used as a nondestructive means for detecting extrinsic stacking faults in Si. Atomistic analysis of diffuse intensity streaks is used to determine the size of the faults, the minimum size at which the streak pattern in the scattering will be visible, and the magnitude of atomic displacements in the center of the stacking fault." @default.
- W2051265972 created "2016-06-24" @default.
- W2051265972 creator A5004837908 @default.
- W2051265972 creator A5007566635 @default.
- W2051265972 creator A5036594492 @default.
- W2051265972 creator A5086369898 @default.
- W2051265972 date "2000-02-14" @default.
- W2051265972 modified "2023-09-26" @default.
- W2051265972 title "Diffuse x-ray streaks from stacking faults in Si analyzed by atomistic simulations" @default.
- W2051265972 cites W1973310127 @default.
- W2051265972 cites W1994642072 @default.
- W2051265972 cites W2022692931 @default.
- W2051265972 cites W2033187512 @default.
- W2051265972 cites W2037782625 @default.
- W2051265972 cites W2041893509 @default.
- W2051265972 cites W2043712657 @default.
- W2051265972 cites W2051625860 @default.
- W2051265972 cites W2060009072 @default.
- W2051265972 cites W2063894713 @default.
- W2051265972 cites W2065418880 @default.
- W2051265972 cites W2631520758 @default.
- W2051265972 doi "https://doi.org/10.1063/1.125604" @default.
- W2051265972 hasPublicationYear "2000" @default.
- W2051265972 type Work @default.
- W2051265972 sameAs 2051265972 @default.
- W2051265972 citedByCount "19" @default.
- W2051265972 countsByYear W20512659722012 @default.
- W2051265972 countsByYear W20512659722014 @default.
- W2051265972 countsByYear W20512659722015 @default.
- W2051265972 countsByYear W20512659722017 @default.
- W2051265972 countsByYear W20512659722019 @default.
- W2051265972 crossrefType "journal-article" @default.
- W2051265972 hasAuthorship W2051265972A5004837908 @default.
- W2051265972 hasAuthorship W2051265972A5007566635 @default.
- W2051265972 hasAuthorship W2051265972A5036594492 @default.
- W2051265972 hasAuthorship W2051265972A5086369898 @default.
- W2051265972 hasConcept C108225325 @default.
- W2051265972 hasConcept C120665830 @default.
- W2051265972 hasConcept C121332964 @default.
- W2051265972 hasConcept C159985019 @default.
- W2051265972 hasConcept C185592680 @default.
- W2051265972 hasConcept C191486275 @default.
- W2051265972 hasConcept C192562407 @default.
- W2051265972 hasConcept C26873012 @default.
- W2051265972 hasConcept C2777855556 @default.
- W2051265972 hasConcept C2778536302 @default.
- W2051265972 hasConcept C33347731 @default.
- W2051265972 hasConcept C41999313 @default.
- W2051265972 hasConcept C46141821 @default.
- W2051265972 hasConcept C49040817 @default.
- W2051265972 hasConcept C65185188 @default.
- W2051265972 hasConcept C8010536 @default.
- W2051265972 hasConceptScore W2051265972C108225325 @default.
- W2051265972 hasConceptScore W2051265972C120665830 @default.
- W2051265972 hasConceptScore W2051265972C121332964 @default.
- W2051265972 hasConceptScore W2051265972C159985019 @default.
- W2051265972 hasConceptScore W2051265972C185592680 @default.
- W2051265972 hasConceptScore W2051265972C191486275 @default.
- W2051265972 hasConceptScore W2051265972C192562407 @default.
- W2051265972 hasConceptScore W2051265972C26873012 @default.
- W2051265972 hasConceptScore W2051265972C2777855556 @default.
- W2051265972 hasConceptScore W2051265972C2778536302 @default.
- W2051265972 hasConceptScore W2051265972C33347731 @default.
- W2051265972 hasConceptScore W2051265972C41999313 @default.
- W2051265972 hasConceptScore W2051265972C46141821 @default.
- W2051265972 hasConceptScore W2051265972C49040817 @default.
- W2051265972 hasConceptScore W2051265972C65185188 @default.
- W2051265972 hasConceptScore W2051265972C8010536 @default.
- W2051265972 hasIssue "7" @default.
- W2051265972 hasLocation W20512659721 @default.
- W2051265972 hasOpenAccess W2051265972 @default.
- W2051265972 hasPrimaryLocation W20512659721 @default.
- W2051265972 hasRelatedWork W1971878186 @default.
- W2051265972 hasRelatedWork W1986568349 @default.
- W2051265972 hasRelatedWork W2016214719 @default.
- W2051265972 hasRelatedWork W2050569025 @default.
- W2051265972 hasRelatedWork W2052977781 @default.
- W2051265972 hasRelatedWork W2142964916 @default.
- W2051265972 hasRelatedWork W2388737115 @default.
- W2051265972 hasRelatedWork W2410906978 @default.
- W2051265972 hasRelatedWork W2613411130 @default.
- W2051265972 hasRelatedWork W2802385833 @default.
- W2051265972 hasVolume "76" @default.
- W2051265972 isParatext "false" @default.
- W2051265972 isRetracted "false" @default.
- W2051265972 magId "2051265972" @default.
- W2051265972 workType "article" @default.