FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051273509> ?p ?o ?g. }

• W2051273509 endingPage "209" @default.
• W2051273509 startingPage "204" @default.
• W2051273509 abstract "A selective epitaxial fabrication method to form piezoresistors on the sidewalls of microfabricated cantilevers for in-plane force sensing applications and their preliminary characterisation results is reported. The piezoresistors were made of a doped silicon epitaxial layer using a selective deposition technique by tailoring the process conditions. Silicon oxide was used as a mask, dichlorosilane (DCS) was used as a source gas in a reduced pressure environment and HCl was used to improve selectivity. The authors found that the deposition rates were dependent on the trench widths. The authors further characterised the current–voltage behaviour, noise and sensitivity of these epitaxial sidewall piezoresistors. A typical cantilever had resistance of 0.6 kΩ, 1/f coefficient, α=8, sensitivity of 1100 V/N (880 V/m) and resolution of 9.5 nN integrated over the band 10 Hz–10 kHz. Its sensitivity and resolution are comparable to single-crystal ion implanted piezoresistors and better than most polysilicon or diffused piezoresistors." @default.
• W2051273509 created "2016-06-24" @default.
• W2051273509 creator A5049682250 @default.
• W2051273509 creator A5052283727 @default.
• W2051273509 creator A5076291515 @default.
• W2051273509 date "2009-12-01" @default.
• W2051273509 modified "2023-09-26" @default.
• W2051273509 title "Sidewall epitaxial piezoresistor process and characterisation for in-plane force sensing applications" @default.
• W2051273509 cites W1965692061 @default.
• W2051273509 cites W1996664147 @default.
• W2051273509 cites W2002609766 @default.
• W2051273509 cites W2003721809 @default.
• W2051273509 cites W2034967323 @default.
• W2051273509 cites W2041065845 @default.
• W2051273509 cites W2050105096 @default.
• W2051273509 cites W2054044536 @default.
• W2051273509 cites W2061821008 @default.
• W2051273509 cites W2064284973 @default.
• W2051273509 cites W2086175318 @default.
• W2051273509 cites W2090888886 @default.
• W2051273509 cites W2097235765 @default.
• W2051273509 cites W2112156930 @default.
• W2051273509 cites W2112874751 @default.
• W2051273509 cites W2120255193 @default.
• W2051273509 cites W2124642594 @default.
• W2051273509 cites W2130223942 @default.
• W2051273509 cites W2135005325 @default.
• W2051273509 cites W2152675795 @default.
• W2051273509 cites W2154352415 @default.
• W2051273509 cites W2165926350 @default.
• W2051273509 cites W2171450230 @default.
• W2051273509 cites W4247728697 @default.
• W2051273509 doi "https://doi.org/10.1049/mnl.2009.0075" @default.
• W2051273509 hasPublicationYear "2009" @default.
• W2051273509 type Work @default.
• W2051273509 sameAs 2051273509 @default.
• W2051273509 citedByCount "1" @default.
• W2051273509 countsByYear W20512735092014 @default.
• W2051273509 crossrefType "journal-article" @default.
• W2051273509 hasAuthorship W2051273509A5049682250 @default.
• W2051273509 hasAuthorship W2051273509A5052283727 @default.
• W2051273509 hasAuthorship W2051273509A5076291515 @default.
• W2051273509 hasConcept C110738630 @default.
• W2051273509 hasConcept C111368507 @default.
• W2051273509 hasConcept C127313418 @default.
• W2051273509 hasConcept C127413603 @default.
• W2051273509 hasConcept C136525101 @default.
• W2051273509 hasConcept C141354745 @default.
• W2051273509 hasConcept C142724271 @default.
• W2051273509 hasConcept C159985019 @default.
• W2051273509 hasConcept C171250308 @default.
• W2051273509 hasConcept C192562407 @default.
• W2051273509 hasConcept C204787440 @default.
• W2051273509 hasConcept C21200559 @default.
• W2051273509 hasConcept C24326235 @default.
• W2051273509 hasConcept C2777289219 @default.
• W2051273509 hasConcept C2779227376 @default.
• W2051273509 hasConcept C2779523567 @default.
• W2051273509 hasConcept C49040817 @default.
• W2051273509 hasConcept C544956773 @default.
• W2051273509 hasConcept C71924100 @default.
• W2051273509 hasConceptScore W2051273509C110738630 @default.
• W2051273509 hasConceptScore W2051273509C111368507 @default.
• W2051273509 hasConceptScore W2051273509C127313418 @default.
• W2051273509 hasConceptScore W2051273509C127413603 @default.
• W2051273509 hasConceptScore W2051273509C136525101 @default.
• W2051273509 hasConceptScore W2051273509C141354745 @default.
• W2051273509 hasConceptScore W2051273509C142724271 @default.
• W2051273509 hasConceptScore W2051273509C159985019 @default.
• W2051273509 hasConceptScore W2051273509C171250308 @default.
• W2051273509 hasConceptScore W2051273509C192562407 @default.
• W2051273509 hasConceptScore W2051273509C204787440 @default.
• W2051273509 hasConceptScore W2051273509C21200559 @default.
• W2051273509 hasConceptScore W2051273509C24326235 @default.
• W2051273509 hasConceptScore W2051273509C2777289219 @default.
• W2051273509 hasConceptScore W2051273509C2779227376 @default.
• W2051273509 hasConceptScore W2051273509C2779523567 @default.
• W2051273509 hasConceptScore W2051273509C49040817 @default.
• W2051273509 hasConceptScore W2051273509C544956773 @default.
• W2051273509 hasConceptScore W2051273509C71924100 @default.
• W2051273509 hasIssue "4" @default.
• W2051273509 hasLocation W20512735091 @default.
• W2051273509 hasOpenAccess W2051273509 @default.
• W2051273509 hasPrimaryLocation W20512735091 @default.
• W2051273509 hasRelatedWork W1970711428 @default.
• W2051273509 hasRelatedWork W1982635368 @default.
• W2051273509 hasRelatedWork W1982864195 @default.
• W2051273509 hasRelatedWork W2020503418 @default.
• W2051273509 hasRelatedWork W2021491209 @default.
• W2051273509 hasRelatedWork W2040063094 @default.
• W2051273509 hasRelatedWork W2055754760 @default.
• W2051273509 hasRelatedWork W2059986347 @default.
• W2051273509 hasRelatedWork W2079270301 @default.
• W2051273509 hasRelatedWork W2951422007 @default.
• W2051273509 hasVolume "4" @default.
• W2051273509 isParatext "false" @default.
• W2051273509 isRetracted "false" @default.
• W2051273509 magId "2051273509" @default.

• next