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- W2051275962 abstract "The preceding paper in these proceedings provided a detailed discussion of colloidal and crystalline-phase chlorine-doped carbon nitride (CNx:Cl) films synthesized by electron cyclotron resonance (ECR) chemical vapor deposition (CVD). This paper focuses on diamond-like carbon (DLC) and hydrogenated carbon-nitride (CNx:H) films deposited by ECR-CVD in either a nitrogen- or an argon-high-density plasma using one of the following hydrocarbon precursors; trichloroethylene, tetrachloroethylene, neopentane or ethylene. For clarity, results and discussions for the CNx:Cl deposits are presented again. Electron spectroscopy for chemical analysis (ESCA) and Fourier transform infrared (FTIR) spectroscopy show that the ECR-CVD experiments so far have resulted in four distinctly different chemical compositions; CNx:Cl, CNx:H, hydrogenated amorphous carbon (a-C:H) and chlorine-doped amorphous carbon (a-C:Cl). The a-C:H films deposited from neopentane and nitrogen have the lowest refractive index and the highest bandgap. The a-C:Cl films exhibit a strong infrared peak at about 1560 cm-1 indicating that they may contain a large amount of microcrystalline graphite.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2051275962 date "1997-06-27" @default.
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- W2051275962 title "<title>Diamondlike carbon films synthesized by electron cyclotron resonance chemical vapor deposition</title>" @default.
- W2051275962 doi "https://doi.org/10.1117/12.277064" @default.
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