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- W2051288770 abstract "Mask cost is a key challenge for the semiconductor industry and a major issue is the write times of e-beam pattern generators. DUV pattern generators can provide high throughput, but there is a cost and time involved in qualifying these tools for IC production. To minimize this time and cost, the masks from the DUV tool should have pattern fidelity similar to that of e-beam tools. This can be done with corner enhancements on an imaging DUV mask writer. Here, we describe such a corner enhancement scheme and present results for the 65-nm-node requirements. We demonstrate how the corner radius can be tuned in a range of radii with a negligible effect on the process latitude." @default.
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- W2051288770 date "2003-08-26" @default.
- W2051288770 modified "2023-09-23" @default.
- W2051288770 title "Transparent corner enhancement scheme for a DUV pattern generator" @default.
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- W2051288770 doi "https://doi.org/10.1117/12.504276" @default.
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