Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051377237> ?p ?o ?g. }
- W2051377237 endingPage "671" @default.
- W2051377237 startingPage "661" @default.
- W2051377237 abstract "A MEMS actuator for micrometric displacements in the out-of-plane direction is proposed in this paper. The device is based on a compliant micromechanism composed of a thick layer of nickel and two thin layers of silicon nitride ensuring displacements in the out-of-plane direction. Its actuation is thermo-electrically performed, the polysilicon resistor encapsulated between the two thin silicon nitride layers is heated by Joule effect; the obtained thermo-mechanical deformation is therefore converted into an out of plane displacement thanks to the compliant mechanism realized in the device structure. The behavior of the device has been analytically modeled through the pseudo-rigid body model methodology and simulated with finite elements models in order to study and optimize its performance. The results coming from the presented models and the device operation have been experimentally validated by characterizing a prototype of this device micro-fabricated in the MetalMUMPs process from MEMSCAP. The maximum displacement of the device is ~16 μm with a maximum actuation voltage of 90 V and the maximum exerted force is ~17 mN." @default.
- W2051377237 created "2016-06-24" @default.
- W2051377237 creator A5018584908 @default.
- W2051377237 creator A5019664293 @default.
- W2051377237 creator A5028359022 @default.
- W2051377237 creator A5056670756 @default.
- W2051377237 creator A5064946251 @default.
- W2051377237 date "2014-06-01" @default.
- W2051377237 modified "2023-10-14" @default.
- W2051377237 title "A Compliant MEMS Device for Out-of-Plane Displacements With Thermo-Electric Actuation" @default.
- W2051377237 cites W1504573265 @default.
- W2051377237 cites W1598338247 @default.
- W2051377237 cites W1963689385 @default.
- W2051377237 cites W1968417696 @default.
- W2051377237 cites W1976705459 @default.
- W2051377237 cites W1978648449 @default.
- W2051377237 cites W1979440749 @default.
- W2051377237 cites W1981463095 @default.
- W2051377237 cites W1983597211 @default.
- W2051377237 cites W1990219185 @default.
- W2051377237 cites W2014516823 @default.
- W2051377237 cites W2016475729 @default.
- W2051377237 cites W2018146508 @default.
- W2051377237 cites W2029778549 @default.
- W2051377237 cites W2033519776 @default.
- W2051377237 cites W2041018497 @default.
- W2051377237 cites W2047088409 @default.
- W2051377237 cites W2047706052 @default.
- W2051377237 cites W2050629454 @default.
- W2051377237 cites W2064081815 @default.
- W2051377237 cites W2066082423 @default.
- W2051377237 cites W2066652629 @default.
- W2051377237 cites W2085033009 @default.
- W2051377237 cites W2086620292 @default.
- W2051377237 cites W2090094968 @default.
- W2051377237 cites W2091131481 @default.
- W2051377237 cites W2094685419 @default.
- W2051377237 cites W2094958234 @default.
- W2051377237 cites W2097837889 @default.
- W2051377237 cites W2098859405 @default.
- W2051377237 cites W2101864732 @default.
- W2051377237 cites W2105101786 @default.
- W2051377237 cites W2121157409 @default.
- W2051377237 cites W2125087997 @default.
- W2051377237 cites W2126265146 @default.
- W2051377237 cites W2129047937 @default.
- W2051377237 cites W2144925909 @default.
- W2051377237 cites W2148869063 @default.
- W2051377237 cites W2153162881 @default.
- W2051377237 cites W2161378754 @default.
- W2051377237 cites W2164788389 @default.
- W2051377237 cites W2167684128 @default.
- W2051377237 cites W2169350264 @default.
- W2051377237 cites W2188321834 @default.
- W2051377237 cites W4210556961 @default.
- W2051377237 cites W4235666583 @default.
- W2051377237 doi "https://doi.org/10.1109/jmems.2013.2283520" @default.
- W2051377237 hasPublicationYear "2014" @default.
- W2051377237 type Work @default.
- W2051377237 sameAs 2051377237 @default.
- W2051377237 citedByCount "9" @default.
- W2051377237 countsByYear W20513772372014 @default.
- W2051377237 countsByYear W20513772372015 @default.
- W2051377237 countsByYear W20513772372016 @default.
- W2051377237 countsByYear W20513772372017 @default.
- W2051377237 countsByYear W20513772372020 @default.
- W2051377237 countsByYear W20513772372021 @default.
- W2051377237 crossrefType "journal-article" @default.
- W2051377237 hasAuthorship W2051377237A5018584908 @default.
- W2051377237 hasAuthorship W2051377237A5019664293 @default.
- W2051377237 hasAuthorship W2051377237A5028359022 @default.
- W2051377237 hasAuthorship W2051377237A5056670756 @default.
- W2051377237 hasAuthorship W2051377237A5064946251 @default.
- W2051377237 hasConcept C107551265 @default.
- W2051377237 hasConcept C117926987 @default.
- W2051377237 hasConcept C119599485 @default.
- W2051377237 hasConcept C127413603 @default.
- W2051377237 hasConcept C135628077 @default.
- W2051377237 hasConcept C137488568 @default.
- W2051377237 hasConcept C15744967 @default.
- W2051377237 hasConcept C159985019 @default.
- W2051377237 hasConcept C165801399 @default.
- W2051377237 hasConcept C172707124 @default.
- W2051377237 hasConcept C17825722 @default.
- W2051377237 hasConcept C192562407 @default.
- W2051377237 hasConcept C204366326 @default.
- W2051377237 hasConcept C2524010 @default.
- W2051377237 hasConcept C2777431650 @default.
- W2051377237 hasConcept C33923547 @default.
- W2051377237 hasConcept C37977207 @default.
- W2051377237 hasConcept C49040817 @default.
- W2051377237 hasConcept C542102704 @default.
- W2051377237 hasConcept C544956773 @default.
- W2051377237 hasConcept C66938386 @default.
- W2051377237 hasConcept C79772673 @default.
- W2051377237 hasConceptScore W2051377237C107551265 @default.
- W2051377237 hasConceptScore W2051377237C117926987 @default.
- W2051377237 hasConceptScore W2051377237C119599485 @default.