FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051541907> ?p ?o ?g. }

• W2051541907 endingPage "3963" @default.
• W2051541907 startingPage "3963" @default.
• W2051541907 abstract "The effects of RF bias potential on the synthesis of aluminium nitride (AlN) film on a glass substrate using the hollow cathode discharge (HCD) ion plating technique, and on some properties of the film were investigated. The deposits were characterized by X-ray diffraction and scanning electron microscopy. The AlN films prepared with application of RF bias potential were superior in flatness to those prepared without applying of RF bias potential, but excess RF bias voltage to the substrate caused the film to come off not just from the substrate, but also with peeling of the glass substrate surface. The Vickers microhardness of film consisting of AlN single phase was estimated to be about 2300 kg/mm 2 . The film density was increased by applying RF bias voltage, its value being close to the theoretical value." @default.
• W2051541907 created "2016-06-24" @default.
• W2051541907 creator A5007036251 @default.
• W2051541907 creator A5057296251 @default.
• W2051541907 creator A5061583675 @default.
• W2051541907 date "1992-12-01" @default.
• W2051541907 modified "2023-10-07" @default.
• W2051541907 title "Effect of RF Bias on Low-Temperature Synthesis of Aluminium Nitride Film by Hollow Cathode Discharge-Type Ion Plating" @default.
• W2051541907 cites W1973864255 @default.
• W2051541907 cites W1974857600 @default.
• W2051541907 cites W1983221148 @default.
• W2051541907 cites W1992623932 @default.
• W2051541907 cites W2005682482 @default.
• W2051541907 cites W2056704675 @default.
• W2051541907 cites W2081488001 @default.
• W2051541907 cites W2082793572 @default.
• W2051541907 cites W2091125609 @default.
• W2051541907 cites W2095370726 @default.
• W2051541907 cites W2180898129 @default.
• W2051541907 cites W2322439530 @default.
• W2051541907 cites W2328701907 @default.
• W2051541907 cites W4244438716 @default.
• W2051541907 cites W4254463354 @default.
• W2051541907 doi "https://doi.org/10.1143/jjap.31.3963" @default.
• W2051541907 hasPublicationYear "1992" @default.
• W2051541907 type Work @default.
• W2051541907 sameAs 2051541907 @default.
• W2051541907 citedByCount "1" @default.
• W2051541907 crossrefType "journal-article" @default.
• W2051541907 hasAuthorship W2051541907A5007036251 @default.
• W2051541907 hasAuthorship W2051541907A5057296251 @default.
• W2051541907 hasAuthorship W2051541907A5061583675 @default.
• W2051541907 hasConcept C111368507 @default.
• W2051541907 hasConcept C113196181 @default.
• W2051541907 hasConcept C118442862 @default.
• W2051541907 hasConcept C119599485 @default.
• W2051541907 hasConcept C120665830 @default.
• W2051541907 hasConcept C121332964 @default.
• W2051541907 hasConcept C127313418 @default.
• W2051541907 hasConcept C127413603 @default.
• W2051541907 hasConcept C147789679 @default.
• W2051541907 hasConcept C159985019 @default.
• W2051541907 hasConcept C165801399 @default.
• W2051541907 hasConcept C171250308 @default.
• W2051541907 hasConcept C185592680 @default.
• W2051541907 hasConcept C19067145 @default.
• W2051541907 hasConcept C192562407 @default.
• W2051541907 hasConcept C194760766 @default.
• W2051541907 hasConcept C20254490 @default.
• W2051541907 hasConcept C207114421 @default.
• W2051541907 hasConcept C26405456 @default.
• W2051541907 hasConcept C26771246 @default.
• W2051541907 hasConcept C2777289219 @default.
• W2051541907 hasConcept C2778530986 @default.
• W2051541907 hasConcept C2779227376 @default.
• W2051541907 hasConcept C2780162792 @default.
• W2051541907 hasConcept C2780243435 @default.
• W2051541907 hasConcept C43617362 @default.
• W2051541907 hasConcept C49040817 @default.
• W2051541907 hasConcept C49110097 @default.
• W2051541907 hasConcept C513153333 @default.
• W2051541907 hasConcept C62520636 @default.
• W2051541907 hasConceptScore W2051541907C111368507 @default.
• W2051541907 hasConceptScore W2051541907C113196181 @default.
• W2051541907 hasConceptScore W2051541907C118442862 @default.
• W2051541907 hasConceptScore W2051541907C119599485 @default.
• W2051541907 hasConceptScore W2051541907C120665830 @default.
• W2051541907 hasConceptScore W2051541907C121332964 @default.
• W2051541907 hasConceptScore W2051541907C127313418 @default.
• W2051541907 hasConceptScore W2051541907C127413603 @default.
• W2051541907 hasConceptScore W2051541907C147789679 @default.
• W2051541907 hasConceptScore W2051541907C159985019 @default.
• W2051541907 hasConceptScore W2051541907C165801399 @default.
• W2051541907 hasConceptScore W2051541907C171250308 @default.
• W2051541907 hasConceptScore W2051541907C185592680 @default.
• W2051541907 hasConceptScore W2051541907C19067145 @default.
• W2051541907 hasConceptScore W2051541907C192562407 @default.
• W2051541907 hasConceptScore W2051541907C194760766 @default.
• W2051541907 hasConceptScore W2051541907C20254490 @default.
• W2051541907 hasConceptScore W2051541907C207114421 @default.
• W2051541907 hasConceptScore W2051541907C26405456 @default.
• W2051541907 hasConceptScore W2051541907C26771246 @default.
• W2051541907 hasConceptScore W2051541907C2777289219 @default.
• W2051541907 hasConceptScore W2051541907C2778530986 @default.
• W2051541907 hasConceptScore W2051541907C2779227376 @default.
• W2051541907 hasConceptScore W2051541907C2780162792 @default.
• W2051541907 hasConceptScore W2051541907C2780243435 @default.
• W2051541907 hasConceptScore W2051541907C43617362 @default.
• W2051541907 hasConceptScore W2051541907C49040817 @default.
• W2051541907 hasConceptScore W2051541907C49110097 @default.
• W2051541907 hasConceptScore W2051541907C513153333 @default.
• W2051541907 hasConceptScore W2051541907C62520636 @default.
• W2051541907 hasIssue "12R" @default.
• W2051541907 hasLocation W20515419071 @default.
• W2051541907 hasOpenAccess W2051541907 @default.
• W2051541907 hasPrimaryLocation W20515419071 @default.
• W2051541907 hasRelatedWork W2003275872 @default.
• W2051541907 hasRelatedWork W2051541907 @default.

• next