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• W2051544154 endingPage "5539" @default.
• W2051544154 startingPage "5532" @default.
• W2051544154 abstract "Radio frequency glow discharges in SiH4(50%)/H2 at 13.56 MHz and 100 kHz have been investigated by using time- and space-resolved optical emission spectroscopy. The relative net-excitation rate is obtained by deconvolving the spatiotemporal emission profile considering the influence of the radiative lifetime. From the results, we infer the behavior of electrons with energy greater than the threshold energy for the dissociative excitation and we discuss the discharge structure. Lines of SiI(4s 11P0→3p 21D), SiH(A2Δ;v′=0→X2Π;v″=0), Hα, and H2(d 3Πu→a 3Σ+g) are selected for observation. It is concluded that there exists a considerable population of negative ions compared with positive ions, which has not been previously proposed in high-frequency discharges in SiH4 because of the small degree of electron attachment. At 13.56 MHz, the optical emission oscillates at 2ω in the bulk plasma region, in addition to the emissions at the plasma-sheath boundaries. It implies that the field in the bulk is strengthened by the external sinusoidal field to make up for the loss of electrons by electron attachment. The bulk field is estimated at 69 sin(ωt) V cm−1 from V-I characteristics. The existence of a double layer by the modulation of electrons is strongly suggested even in a high frequency at 13.56 MHz. At low frequency (100 kHz), a double layer is observed, which is formed by the large modulation of negative and positive ions. Consequently, excitation by electrons accelerated in the field at the double layer is observed in addition to excitation by secondary electrons from ion bombardment. Consideration of the role of negative ions in high-frequency SiH4 discharges at 13.56 MHz is necessary to understand the discharge structure of the silane plasma and the deposition of the hydrogenated amorphous silicon." @default.
• W2051544154 created "2016-06-24" @default.
• W2051544154 creator A5039724071 @default.
• W2051544154 creator A5040472914 @default.
• W2051544154 creator A5051187319 @default.
• W2051544154 creator A5071111375 @default.
• W2051544154 creator A5073054327 @default.
• W2051544154 date "1990-12-01" @default.
• W2051544154 modified "2023-10-16" @default.
• W2051544154 title "Study of the structure in rf glow discharges in SiH₄/H₂by spatiotemporal optical emission spectroscopy: Influence of negative ions" @default.
• W2051544154 cites W136533630 @default.
• W2051544154 cites W1982789958 @default.
• W2051544154 cites W1987394999 @default.
• W2051544154 cites W1995116358 @default.
• W2051544154 cites W1995856997 @default.
• W2051544154 cites W2001126917 @default.
• W2051544154 cites W2002276807 @default.
• W2051544154 cites W2004918691 @default.
• W2051544154 cites W2010033379 @default.
• W2051544154 cites W2012747312 @default.
• W2051544154 cites W2012894662 @default.
• W2051544154 cites W2013685594 @default.
• W2051544154 cites W2021103293 @default.
• W2051544154 cites W2025389098 @default.
• W2051544154 cites W2025634528 @default.
• W2051544154 cites W2028636997 @default.
• W2051544154 cites W2029246527 @default.
• W2051544154 cites W2032477939 @default.
• W2051544154 cites W2037216258 @default.
• W2051544154 cites W2041005661 @default.
• W2051544154 cites W2047548944 @default.
• W2051544154 cites W2047875844 @default.
• W2051544154 cites W2048430275 @default.
• W2051544154 cites W2053957422 @default.
• W2051544154 cites W2054881253 @default.
• W2051544154 cites W2063952684 @default.
• W2051544154 cites W2067665802 @default.
• W2051544154 cites W2067913055 @default.
• W2051544154 cites W2073965363 @default.
• W2051544154 cites W2075221860 @default.
• W2051544154 cites W2081357577 @default.
• W2051544154 cites W2082497137 @default.
• W2051544154 cites W2087808639 @default.
• W2051544154 cites W2152673172 @default.
• W2051544154 cites W4236476477 @default.
• W2051544154 doi "https://doi.org/10.1063/1.347013" @default.
• W2051544154 hasPublicationYear "1990" @default.
• W2051544154 type Work @default.
• W2051544154 sameAs 2051544154 @default.
• W2051544154 citedByCount "70" @default.
• W2051544154 countsByYear W20515441542013 @default.
• W2051544154 countsByYear W20515441542014 @default.
• W2051544154 countsByYear W20515441542015 @default.
• W2051544154 countsByYear W20515441542016 @default.
• W2051544154 countsByYear W20515441542017 @default.
• W2051544154 countsByYear W20515441542018 @default.
• W2051544154 countsByYear W20515441542019 @default.
• W2051544154 countsByYear W20515441542022 @default.
• W2051544154 countsByYear W20515441542023 @default.
• W2051544154 crossrefType "journal-article" @default.
• W2051544154 hasAuthorship W2051544154A5039724071 @default.
• W2051544154 hasAuthorship W2051544154A5040472914 @default.
• W2051544154 hasAuthorship W2051544154A5051187319 @default.
• W2051544154 hasAuthorship W2051544154A5071111375 @default.
• W2051544154 hasAuthorship W2051544154A5073054327 @default.
• W2051544154 hasConcept C121332964 @default.
• W2051544154 hasConcept C1276947 @default.
• W2051544154 hasConcept C144024400 @default.
• W2051544154 hasConcept C145148216 @default.
• W2051544154 hasConcept C147120987 @default.
• W2051544154 hasConcept C149923435 @default.
• W2051544154 hasConcept C178790620 @default.
• W2051544154 hasConcept C184779094 @default.
• W2051544154 hasConcept C185592680 @default.
• W2051544154 hasConcept C22175881 @default.
• W2051544154 hasConcept C2908647359 @default.
• W2051544154 hasConcept C32891209 @default.
• W2051544154 hasConcept C4839761 @default.
• W2051544154 hasConcept C62520636 @default.
• W2051544154 hasConcept C82706917 @default.
• W2051544154 hasConcept C83581075 @default.
• W2051544154 hasConcept C96141758 @default.
• W2051544154 hasConceptScore W2051544154C121332964 @default.
• W2051544154 hasConceptScore W2051544154C1276947 @default.
• W2051544154 hasConceptScore W2051544154C144024400 @default.
• W2051544154 hasConceptScore W2051544154C145148216 @default.
• W2051544154 hasConceptScore W2051544154C147120987 @default.
• W2051544154 hasConceptScore W2051544154C149923435 @default.
• W2051544154 hasConceptScore W2051544154C178790620 @default.
• W2051544154 hasConceptScore W2051544154C184779094 @default.
• W2051544154 hasConceptScore W2051544154C185592680 @default.
• W2051544154 hasConceptScore W2051544154C22175881 @default.
• W2051544154 hasConceptScore W2051544154C2908647359 @default.
• W2051544154 hasConceptScore W2051544154C32891209 @default.
• W2051544154 hasConceptScore W2051544154C4839761 @default.
• W2051544154 hasConceptScore W2051544154C62520636 @default.
• W2051544154 hasConceptScore W2051544154C82706917 @default.
• W2051544154 hasConceptScore W2051544154C83581075 @default.

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