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- W2051552008 abstract "The semiconductor industry has successfully undergone two major transitions in the 70's and in the 80's, that have been followed by long periods of sustained growth. A third transition is approaching in the second half of this decade that promises to fuel the growth of the semiconductor industry well into the second decade of this century, if well executed. Many new materials and a renewed MOS structure will be necessary to revitalize the basic device capabilities. Lithography technology is a key enabler of the semiconductor industry. After a decade of discussions and heated debates, the lithography roadmap has been finally internationally accepted and the wavelengths of choice identified and agreed upon: 193nm, 157nm, and 13.5nm. Execution is now the name of the game. As the level of investments required for the development and deployment of the overall lithography infrastructure continues to escalate with time and as execution on a tight time table is a must, it is necessary to resort to any available cooperation among consortia, supplier companies and IC companies to maintain the semiconductor industry on the historical 25-30 percent cost reduction per function per year that has been, and still remains, at the center of its success." @default.
- W2051552008 created "2016-06-24" @default.
- W2051552008 creator A5060113794 @default.
- W2051552008 date "2002-07-05" @default.
- W2051552008 modified "2023-09-23" @default.
- W2051552008 title "Worldwide technologies and the ITRS in the current economic climate" @default.
- W2051552008 doi "https://doi.org/10.1117/12.472265" @default.
- W2051552008 hasPublicationYear "2002" @default.
- W2051552008 type Work @default.
- W2051552008 sameAs 2051552008 @default.
- W2051552008 citedByCount "6" @default.
- W2051552008 crossrefType "proceedings-article" @default.
- W2051552008 hasAuthorship W2051552008A5060113794 @default.
- W2051552008 hasConcept C105339364 @default.
- W2051552008 hasConcept C111919701 @default.
- W2051552008 hasConcept C117671659 @default.
- W2051552008 hasConcept C119599485 @default.
- W2051552008 hasConcept C127413603 @default.
- W2051552008 hasConcept C14036430 @default.
- W2051552008 hasConcept C144133560 @default.
- W2051552008 hasConcept C15744967 @default.
- W2051552008 hasConcept C160671074 @default.
- W2051552008 hasConcept C192562407 @default.
- W2051552008 hasConcept C204223013 @default.
- W2051552008 hasConcept C22607594 @default.
- W2051552008 hasConcept C26517878 @default.
- W2051552008 hasConcept C2987888538 @default.
- W2051552008 hasConcept C38652104 @default.
- W2051552008 hasConcept C40700 @default.
- W2051552008 hasConcept C41008148 @default.
- W2051552008 hasConcept C49040817 @default.
- W2051552008 hasConcept C542102704 @default.
- W2051552008 hasConcept C61696701 @default.
- W2051552008 hasConcept C66018809 @default.
- W2051552008 hasConcept C78458016 @default.
- W2051552008 hasConcept C86803240 @default.
- W2051552008 hasConceptScore W2051552008C105339364 @default.
- W2051552008 hasConceptScore W2051552008C111919701 @default.
- W2051552008 hasConceptScore W2051552008C117671659 @default.
- W2051552008 hasConceptScore W2051552008C119599485 @default.
- W2051552008 hasConceptScore W2051552008C127413603 @default.
- W2051552008 hasConceptScore W2051552008C14036430 @default.
- W2051552008 hasConceptScore W2051552008C144133560 @default.
- W2051552008 hasConceptScore W2051552008C15744967 @default.
- W2051552008 hasConceptScore W2051552008C160671074 @default.
- W2051552008 hasConceptScore W2051552008C192562407 @default.
- W2051552008 hasConceptScore W2051552008C204223013 @default.
- W2051552008 hasConceptScore W2051552008C22607594 @default.
- W2051552008 hasConceptScore W2051552008C26517878 @default.
- W2051552008 hasConceptScore W2051552008C2987888538 @default.
- W2051552008 hasConceptScore W2051552008C38652104 @default.
- W2051552008 hasConceptScore W2051552008C40700 @default.
- W2051552008 hasConceptScore W2051552008C41008148 @default.
- W2051552008 hasConceptScore W2051552008C49040817 @default.
- W2051552008 hasConceptScore W2051552008C542102704 @default.
- W2051552008 hasConceptScore W2051552008C61696701 @default.
- W2051552008 hasConceptScore W2051552008C66018809 @default.
- W2051552008 hasConceptScore W2051552008C78458016 @default.
- W2051552008 hasConceptScore W2051552008C86803240 @default.
- W2051552008 hasLocation W20515520081 @default.
- W2051552008 hasOpenAccess W2051552008 @default.
- W2051552008 hasPrimaryLocation W20515520081 @default.
- W2051552008 hasRelatedWork W1641453707 @default.
- W2051552008 hasRelatedWork W1662683761 @default.
- W2051552008 hasRelatedWork W2051254741 @default.
- W2051552008 hasRelatedWork W2090679052 @default.
- W2051552008 hasRelatedWork W2110327166 @default.
- W2051552008 hasRelatedWork W2361830001 @default.
- W2051552008 hasRelatedWork W2399146309 @default.
- W2051552008 hasRelatedWork W2917828100 @default.
- W2051552008 hasRelatedWork W2969485937 @default.
- W2051552008 hasRelatedWork W3134501116 @default.
- W2051552008 isParatext "false" @default.
- W2051552008 isRetracted "false" @default.
- W2051552008 magId "2051552008" @default.
- W2051552008 workType "article" @default.