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• W2051566239 abstract "A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact, stiction, and pull-off from the substrate. The model accounts for geometric, electrostatic, adhesive, and contact nonlinearities. The model is validated by comparison to experimental data and other analytical model predictions. We find that microcantilever electrostatic microelectromechanical (MEMS) actuators can exhibit bistable and tristable equilibrium configurations. We also find that the transients subsequent to pull-in play an important role in determining whether or not stiction will occur." @default.
• W2051566239 created "2016-06-24" @default.
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• W2051566239 date "2012-02-01" @default.
• W2051566239 modified "2023-10-14" @default.
• W2051566239 title "Modeling of Contact and Stiction in Electrostatic Microcantilever Actuators" @default.
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• W2051566239 doi "https://doi.org/10.1115/1.4006618" @default.
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