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• W2051617462 endingPage "6153" @default.
• W2051617462 startingPage "6145" @default.
• W2051617462 abstract "The Rutherford backscattering technique has been used to determine range parameters of Au and Bi ions implanted into AZ1350 photoresist films at energies from 20 to 300 keV. The experimental results are 20 to 25% higher than the theoretical predictions by Ziegler, Biersack, and Littmark. Good agreement is achieved only when inelastic effects are included in the nuclear stopping-power regime. In addition, we find that shallow implantation of Bi ions increases the temperature at which the photoresist starts to decompose. This feature is not observed when Au is implanted under the same conditions. Finally, we have studied the thermal behavior of implanted Bi and Au ions. While Bi diffuses regularly, Au does not follow an Arrhenius kind of behavior. In addition, it is shown that the implantation process modifies, via the nonannealed damage, the characteristics of the Bi diffusion behavior." @default.
• W2051617462 created "2016-06-24" @default.
• W2051617462 creator A5000572273 @default.
• W2051617462 creator A5002839857 @default.
• W2051617462 creator A5029371820 @default.
• W2051617462 creator A5033633338 @default.
• W2051617462 creator A5036698634 @default.
• W2051617462 creator A5082444746 @default.
• W2051617462 creator A5083823166 @default.
• W2051617462 creator A5088896243 @default.
• W2051617462 date "1990-04-01" @default.
• W2051617462 modified "2023-10-03" @default.
• W2051617462 title "Range and thermal-behavior studies of Au and Bi implanted into photoresist films" @default.
• W2051617462 cites W1978240718 @default.
• W2051617462 cites W1999600357 @default.
• W2051617462 cites W2023348561 @default.
• W2051617462 cites W2024172140 @default.
• W2051617462 cites W2043980854 @default.
• W2051617462 cites W2048339533 @default.
• W2051617462 cites W2062250938 @default.
• W2051617462 cites W2063169213 @default.
• W2051617462 cites W2070024425 @default.
• W2051617462 cites W2087812007 @default.
• W2051617462 cites W2094183548 @default.
• W2051617462 cites W2103262282 @default.
• W2051617462 cites W4241818378 @default.
• W2051617462 doi "https://doi.org/10.1103/physrevb.41.6145" @default.
• W2051617462 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/9992857" @default.
• W2051617462 hasPublicationYear "1990" @default.
• W2051617462 type Work @default.
• W2051617462 sameAs 2051617462 @default.
• W2051617462 citedByCount "28" @default.
• W2051617462 countsByYear W20516174622012 @default.
• W2051617462 crossrefType "journal-article" @default.
• W2051617462 hasAuthorship W2051617462A5000572273 @default.
• W2051617462 hasAuthorship W2051617462A5002839857 @default.
• W2051617462 hasAuthorship W2051617462A5029371820 @default.
• W2051617462 hasAuthorship W2051617462A5033633338 @default.
• W2051617462 hasAuthorship W2051617462A5036698634 @default.
• W2051617462 hasAuthorship W2051617462A5082444746 @default.
• W2051617462 hasAuthorship W2051617462A5083823166 @default.
• W2051617462 hasAuthorship W2051617462A5088896243 @default.
• W2051617462 hasBestOaLocation W20516174622 @default.
• W2051617462 hasConcept C113196181 @default.
• W2051617462 hasConcept C121332964 @default.
• W2051617462 hasConcept C134406635 @default.
• W2051617462 hasConcept C145148216 @default.
• W2051617462 hasConcept C146904657 @default.
• W2051617462 hasConcept C147789679 @default.
• W2051617462 hasConcept C159985019 @default.
• W2051617462 hasConcept C171250308 @default.
• W2051617462 hasConcept C178790620 @default.
• W2051617462 hasConcept C184779094 @default.
• W2051617462 hasConcept C185592680 @default.
• W2051617462 hasConcept C192562407 @default.
• W2051617462 hasConcept C204323151 @default.
• W2051617462 hasConcept C204530211 @default.
• W2051617462 hasConcept C2779227376 @default.
• W2051617462 hasConcept C37668627 @default.
• W2051617462 hasConcept C39353612 @default.
• W2051617462 hasConcept C41823505 @default.
• W2051617462 hasConcept C43617362 @default.
• W2051617462 hasConcept C69357855 @default.
• W2051617462 hasConcept C86183883 @default.
• W2051617462 hasConcept C95121573 @default.
• W2051617462 hasConcept C97355855 @default.
• W2051617462 hasConceptScore W2051617462C113196181 @default.
• W2051617462 hasConceptScore W2051617462C121332964 @default.
• W2051617462 hasConceptScore W2051617462C134406635 @default.
• W2051617462 hasConceptScore W2051617462C145148216 @default.
• W2051617462 hasConceptScore W2051617462C146904657 @default.
• W2051617462 hasConceptScore W2051617462C147789679 @default.
• W2051617462 hasConceptScore W2051617462C159985019 @default.
• W2051617462 hasConceptScore W2051617462C171250308 @default.
• W2051617462 hasConceptScore W2051617462C178790620 @default.
• W2051617462 hasConceptScore W2051617462C184779094 @default.
• W2051617462 hasConceptScore W2051617462C185592680 @default.
• W2051617462 hasConceptScore W2051617462C192562407 @default.
• W2051617462 hasConceptScore W2051617462C204323151 @default.
• W2051617462 hasConceptScore W2051617462C204530211 @default.
• W2051617462 hasConceptScore W2051617462C2779227376 @default.
• W2051617462 hasConceptScore W2051617462C37668627 @default.
• W2051617462 hasConceptScore W2051617462C39353612 @default.
• W2051617462 hasConceptScore W2051617462C41823505 @default.
• W2051617462 hasConceptScore W2051617462C43617362 @default.
• W2051617462 hasConceptScore W2051617462C69357855 @default.
• W2051617462 hasConceptScore W2051617462C86183883 @default.
• W2051617462 hasConceptScore W2051617462C95121573 @default.
• W2051617462 hasConceptScore W2051617462C97355855 @default.
• W2051617462 hasIssue "10" @default.
• W2051617462 hasLocation W20516174621 @default.
• W2051617462 hasLocation W20516174622 @default.
• W2051617462 hasLocation W20516174623 @default.
• W2051617462 hasOpenAccess W2051617462 @default.
• W2051617462 hasPrimaryLocation W20516174621 @default.
• W2051617462 hasRelatedWork W1642599441 @default.
• W2051617462 hasRelatedWork W1877593681 @default.
• W2051617462 hasRelatedWork W1978964314 @default.

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