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• W2051629644 abstract "We aim to develop a MEMS mirror fabricated by micro-fabrication technology to realize a phase-shift device, which is a key component of a two-dimensional Fourier spectrometer. This MEMS mirror is capable of high-precision movement in the vertical direction parallel to the reference plane. In this study, a vertical electrostatic comb-drive actuator and capacitance sensor were fabricated monolithically on a single chip, and then four of them were mounted around the movable mirror. We fabricated a MEMS mirror that was able to move in the vertical direction while sensing the tilting angle. As a result, it would be feasible to use this vertical comb-drive MEMS mirror with a sensing function for a phase-shift device that was able to control the vertical displacement and the tilting angle of a movable mirror." @default.
• W2051629644 created "2016-06-24" @default.
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• W2051629644 date "2012-07-01" @default.
• W2051629644 modified "2023-10-02" @default.
• W2051629644 title "Vertical comb-drive MEMS mirror with sensing function for phase-shift device" @default.
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• W2051629644 doi "https://doi.org/10.1016/j.sna.2012.04.007" @default.
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