Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051703896> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2051703896 abstract "According to the International Technology Roadmap for Semiconductors (ITRS), memory half pitch (hp) will reach 32 and 20 nm by 2012 and 2017, respectively. However, it is difficult to fabricate a sub-40 nm node using single-exposure technology with the currently available 1.35-numerical-aperture (NA) ArF immersion lithography. Although it is expected that either double patterning technology or extreme ultraviolet lithography will enable the realization of 32 nm hp, there are still many problems that need to be solved regarding cost reduction. Thus, the study of high-index fluid immersion technology should be pursued simultaneously. ArF water immersion systems with 1.35 NA have already been introduced for 40-nm-hp production. ArF immersion lithography using high-index materials is currently being studied for next-generation lithography. Currently, many studies are being undertaken in order to increase NA for a high-index fluid and a lens in immersion technology. The combination of LuAG (n = 2.14) and a third-generation fluid could be used to realize 1.55 NA. This combination of 0.25k1 and 32 nm hp can be obtained using single-exposure technology. In order to determine the feasibility of this process and possible process hurdles for this high-NA single-exposure technology, 32 nm hp with a 1:1 line and space pattern is tested. Various illumination conditions are tested to realize 1:1 32 nm hp, and the exposure and development conditions are varied to determine whether this single exposure can provide a processible window. As a result, 32 nm hp could be obtained by single-exposure technology with 1.55 NA." @default.
- W2051703896 created "2016-06-24" @default.
- W2051703896 creator A5017635218 @default.
- W2051703896 creator A5041572321 @default.
- W2051703896 creator A5077623978 @default.
- W2051703896 date "2009-10-20" @default.
- W2051703896 modified "2023-09-24" @default.
- W2051703896 title "32 nm Half Pitch Formation with High-Numerical-Aperture Single Exposure" @default.
- W2051703896 cites W1986193720 @default.
- W2051703896 cites W2041600236 @default.
- W2051703896 cites W2056534057 @default.
- W2051703896 cites W2094860458 @default.
- W2051703896 cites W2098330390 @default.
- W2051703896 cites W2165086676 @default.
- W2051703896 doi "https://doi.org/10.1143/jjap.48.106501" @default.
- W2051703896 hasPublicationYear "2009" @default.
- W2051703896 type Work @default.
- W2051703896 sameAs 2051703896 @default.
- W2051703896 citedByCount "2" @default.
- W2051703896 crossrefType "journal-article" @default.
- W2051703896 hasAuthorship W2051703896A5017635218 @default.
- W2051703896 hasAuthorship W2051703896A5041572321 @default.
- W2051703896 hasAuthorship W2051703896A5077623978 @default.
- W2051703896 hasConcept C105487726 @default.
- W2051703896 hasConcept C120665830 @default.
- W2051703896 hasConcept C121332964 @default.
- W2051703896 hasConcept C159108749 @default.
- W2051703896 hasConcept C162996421 @default.
- W2051703896 hasConcept C171250308 @default.
- W2051703896 hasConcept C177409738 @default.
- W2051703896 hasConcept C192562407 @default.
- W2051703896 hasConcept C199068039 @default.
- W2051703896 hasConcept C202444582 @default.
- W2051703896 hasConcept C204223013 @default.
- W2051703896 hasConcept C2777441419 @default.
- W2051703896 hasConcept C2779227376 @default.
- W2051703896 hasConcept C33923547 @default.
- W2051703896 hasConcept C49040817 @default.
- W2051703896 hasConcept C53524968 @default.
- W2051703896 hasConcept C6260449 @default.
- W2051703896 hasConcept C94263209 @default.
- W2051703896 hasConceptScore W2051703896C105487726 @default.
- W2051703896 hasConceptScore W2051703896C120665830 @default.
- W2051703896 hasConceptScore W2051703896C121332964 @default.
- W2051703896 hasConceptScore W2051703896C159108749 @default.
- W2051703896 hasConceptScore W2051703896C162996421 @default.
- W2051703896 hasConceptScore W2051703896C171250308 @default.
- W2051703896 hasConceptScore W2051703896C177409738 @default.
- W2051703896 hasConceptScore W2051703896C192562407 @default.
- W2051703896 hasConceptScore W2051703896C199068039 @default.
- W2051703896 hasConceptScore W2051703896C202444582 @default.
- W2051703896 hasConceptScore W2051703896C204223013 @default.
- W2051703896 hasConceptScore W2051703896C2777441419 @default.
- W2051703896 hasConceptScore W2051703896C2779227376 @default.
- W2051703896 hasConceptScore W2051703896C33923547 @default.
- W2051703896 hasConceptScore W2051703896C49040817 @default.
- W2051703896 hasConceptScore W2051703896C53524968 @default.
- W2051703896 hasConceptScore W2051703896C6260449 @default.
- W2051703896 hasConceptScore W2051703896C94263209 @default.
- W2051703896 hasLocation W20517038961 @default.
- W2051703896 hasOpenAccess W2051703896 @default.
- W2051703896 hasPrimaryLocation W20517038961 @default.
- W2051703896 hasRelatedWork W1979790175 @default.
- W2051703896 hasRelatedWork W1985779859 @default.
- W2051703896 hasRelatedWork W1992929399 @default.
- W2051703896 hasRelatedWork W1998590549 @default.
- W2051703896 hasRelatedWork W2019215562 @default.
- W2051703896 hasRelatedWork W2032413298 @default.
- W2051703896 hasRelatedWork W2038847188 @default.
- W2051703896 hasRelatedWork W2044223130 @default.
- W2051703896 hasRelatedWork W2054704405 @default.
- W2051703896 hasRelatedWork W2058599275 @default.
- W2051703896 hasRelatedWork W2062836254 @default.
- W2051703896 hasRelatedWork W2073592792 @default.
- W2051703896 hasRelatedWork W2073859589 @default.
- W2051703896 hasRelatedWork W2092513985 @default.
- W2051703896 hasRelatedWork W2094860458 @default.
- W2051703896 hasRelatedWork W2097490125 @default.
- W2051703896 hasRelatedWork W2124919317 @default.
- W2051703896 hasRelatedWork W2393446398 @default.
- W2051703896 hasRelatedWork W2014412209 @default.
- W2051703896 hasRelatedWork W2091782806 @default.
- W2051703896 isParatext "false" @default.
- W2051703896 isRetracted "false" @default.
- W2051703896 magId "2051703896" @default.
- W2051703896 workType "article" @default.