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- W2051750802 abstract "The state of the art of the problem for the laser- interferometer transducer resolution increase is discussed. It is noted that the element basis of transducer electronic systems, allows achievement of resolution approximately (lambda) /1024 (or 0.6nm). The problems of accuracy providing the interferometric displacement transformation are analyzed by the example of the control system creation for the precision air bearing table of the laser pattern generator with submicron resolution. The peculiarities of this task solution caused the presence of inner heat and turbulence sources are considered. Examples of the known technical methods for solution of this problem are shown." @default.
- W2051750802 created "2016-06-24" @default.
- W2051750802 creator A5082482075 @default.
- W2051750802 date "1999-02-25" @default.
- W2051750802 modified "2023-09-23" @default.
- W2051750802 title "<title>Laser nanointerferometry of displacement: methods and means of measurement accuracy improvements</title>" @default.
- W2051750802 doi "https://doi.org/10.1117/12.340147" @default.
- W2051750802 hasPublicationYear "1999" @default.
- W2051750802 type Work @default.
- W2051750802 sameAs 2051750802 @default.
- W2051750802 citedByCount "2" @default.
- W2051750802 countsByYear W20517508022012 @default.
- W2051750802 countsByYear W20517508022016 @default.
- W2051750802 crossrefType "proceedings-article" @default.
- W2051750802 hasAuthorship W2051750802A5082482075 @default.
- W2051750802 hasConcept C107551265 @default.
- W2051750802 hasConcept C120665830 @default.
- W2051750802 hasConcept C121332964 @default.
- W2051750802 hasConcept C138268822 @default.
- W2051750802 hasConcept C154945302 @default.
- W2051750802 hasConcept C15744967 @default.
- W2051750802 hasConcept C163258240 @default.
- W2051750802 hasConcept C166689943 @default.
- W2051750802 hasConcept C24890656 @default.
- W2051750802 hasConcept C2780992000 @default.
- W2051750802 hasConcept C41008148 @default.
- W2051750802 hasConcept C520434653 @default.
- W2051750802 hasConcept C542102704 @default.
- W2051750802 hasConcept C56318395 @default.
- W2051750802 hasConcept C62520636 @default.
- W2051750802 hasConceptScore W2051750802C107551265 @default.
- W2051750802 hasConceptScore W2051750802C120665830 @default.
- W2051750802 hasConceptScore W2051750802C121332964 @default.
- W2051750802 hasConceptScore W2051750802C138268822 @default.
- W2051750802 hasConceptScore W2051750802C154945302 @default.
- W2051750802 hasConceptScore W2051750802C15744967 @default.
- W2051750802 hasConceptScore W2051750802C163258240 @default.
- W2051750802 hasConceptScore W2051750802C166689943 @default.
- W2051750802 hasConceptScore W2051750802C24890656 @default.
- W2051750802 hasConceptScore W2051750802C2780992000 @default.
- W2051750802 hasConceptScore W2051750802C41008148 @default.
- W2051750802 hasConceptScore W2051750802C520434653 @default.
- W2051750802 hasConceptScore W2051750802C542102704 @default.
- W2051750802 hasConceptScore W2051750802C56318395 @default.
- W2051750802 hasConceptScore W2051750802C62520636 @default.
- W2051750802 hasLocation W20517508021 @default.
- W2051750802 hasOpenAccess W2051750802 @default.
- W2051750802 hasPrimaryLocation W20517508021 @default.
- W2051750802 hasRelatedWork W1833571962 @default.
- W2051750802 hasRelatedWork W1956975848 @default.
- W2051750802 hasRelatedWork W1997912556 @default.
- W2051750802 hasRelatedWork W2009756911 @default.
- W2051750802 hasRelatedWork W2013536020 @default.
- W2051750802 hasRelatedWork W2051133509 @default.
- W2051750802 hasRelatedWork W2071370835 @default.
- W2051750802 hasRelatedWork W2357353905 @default.
- W2051750802 hasRelatedWork W292711273 @default.
- W2051750802 hasRelatedWork W2945496829 @default.
- W2051750802 isParatext "false" @default.
- W2051750802 isRetracted "false" @default.
- W2051750802 magId "2051750802" @default.
- W2051750802 workType "article" @default.