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- W2051833861 abstract "Abstract A cantilever actuator of piezoelectric thin films was fabricated on Si wafer for micro-electro-mechanical-system (MEMS) devices such as micro mirror array and accelerometer. The piezoelectric thin films, La doped lead zirconate titanate. (PLZT) were prepared on Pt/Ti/SiO2/Si-wafer by the sol-gel technique. Geometrically flat cantilevers were obtained using a stress balance layer. Electrical properties, dielectric constants and breakdown fields, of PLZT thin film were studied. The piezoelectric cantilever tip displacement, 6μm, was directly measured by laser interferometer on a 90 μm long cantilever at 10V." @default.
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- W2051833861 date "1999-06-01" @default.
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- W2051833861 title "Piezoelectric properties of micro-machined cantilever PLZT thin films" @default.
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- W2051833861 doi "https://doi.org/10.1080/00150199908015787" @default.
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