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• W2051847229 abstract "As optical lithography is extended to the 130 nm generation and beyond, demanding requirements are placed on mask pattern generators to produce quartz substrate masks. This paper reports on the lithography and critical dimension (CD) performance of the MEBES 5500 mask pattern generator. Compared to previous MEBES tools, this system employs a new high-dose electron gun and column design. We summarize experiments relating lithographic quality to increased dose and the effects of spot size on lithography. Methods to reduce beam-induced pattern placement errors are reviewed. A new graybeam writing strategy, Multipass Gray-II, is described in detail. This strategy creates eight dosed gray levels and provides increased writing throughput (up to 8X compared to single-pass printing) without loss of lithographic quality. These experiments are performed with ZEP 7000 resist and dry etch process; improvements in CD control have been achieved by optimizing the process. A consequence of the improvement in CD control and throughput is improved productivity in generating 180 nm devices." @default.
• W2051847229 created "2016-06-24" @default.
• W2051847229 creator A5005077423 @default.
• W2051847229 creator A5023036873 @default.
• W2051847229 creator A5034389858 @default.
• W2051847229 creator A5057502156 @default.
• W2051847229 creator A5063007622 @default.
• W2051847229 creator A5071063183 @default.
• W2051847229 creator A5072884575 @default.
• W2051847229 creator A5078524348 @default.
• W2051847229 creator A5081288176 @default.
• W2051847229 creator A5088745518 @default.
• W2051847229 date "2000-02-03" @default.
• W2051847229 modified "2023-09-26" @default.
• W2051847229 title "<title>Lithography and CD performance of advanced MEBES mask pattern generators</title>" @default.
• W2051847229 cites W1968817737 @default.
• W2051847229 cites W1970312791 @default.
• W2051847229 cites W1987164384 @default.
• W2051847229 cites W1998390018 @default.
• W2051847229 cites W2004188318 @default.
• W2051847229 cites W2007457289 @default.
• W2051847229 cites W2013774722 @default.
• W2051847229 cites W2032376236 @default.
• W2051847229 cites W2039713285 @default.
• W2051847229 cites W2054501581 @default.
• W2051847229 cites W2078410093 @default.
• W2051847229 cites W2085482151 @default.
• W2051847229 cites W2136378632 @default.
• W2051847229 cites W2147189601 @default.
• W2051847229 cites W2165079503 @default.
• W2051847229 cites W2574666563 @default.
• W2051847229 cites W2067600119 @default.
• W2051847229 doi "https://doi.org/10.1117/12.377110" @default.
• W2051847229 hasPublicationYear "2000" @default.
• W2051847229 type Work @default.
• W2051847229 sameAs 2051847229 @default.
• W2051847229 citedByCount "1" @default.
• W2051847229 crossrefType "proceedings-article" @default.
• W2051847229 hasAuthorship W2051847229A5005077423 @default.
• W2051847229 hasAuthorship W2051847229A5023036873 @default.
• W2051847229 hasAuthorship W2051847229A5034389858 @default.
• W2051847229 hasAuthorship W2051847229A5057502156 @default.
• W2051847229 hasAuthorship W2051847229A5063007622 @default.
• W2051847229 hasAuthorship W2051847229A5071063183 @default.
• W2051847229 hasAuthorship W2051847229A5072884575 @default.
• W2051847229 hasAuthorship W2051847229A5078524348 @default.
• W2051847229 hasAuthorship W2051847229A5081288176 @default.
• W2051847229 hasAuthorship W2051847229A5088745518 @default.
• W2051847229 hasConcept C105487726 @default.
• W2051847229 hasConcept C120665830 @default.
• W2051847229 hasConcept C121332964 @default.
• W2051847229 hasConcept C151346624 @default.
• W2051847229 hasConcept C157764524 @default.
• W2051847229 hasConcept C163258240 @default.
• W2051847229 hasConcept C163581340 @default.
• W2051847229 hasConcept C165005293 @default.
• W2051847229 hasConcept C171250308 @default.
• W2051847229 hasConcept C192562407 @default.
• W2051847229 hasConcept C200274948 @default.
• W2051847229 hasConcept C204223013 @default.
• W2051847229 hasConcept C207789793 @default.
• W2051847229 hasConcept C2779227376 @default.
• W2051847229 hasConcept C2780992000 @default.
• W2051847229 hasConcept C41008148 @default.
• W2051847229 hasConcept C41794268 @default.
• W2051847229 hasConcept C49040817 @default.
• W2051847229 hasConcept C53524968 @default.
• W2051847229 hasConcept C555944384 @default.
• W2051847229 hasConcept C62520636 @default.
• W2051847229 hasConcept C76155785 @default.
• W2051847229 hasConcept C78371743 @default.
• W2051847229 hasConcept C94263209 @default.
• W2051847229 hasConceptScore W2051847229C105487726 @default.
• W2051847229 hasConceptScore W2051847229C120665830 @default.
• W2051847229 hasConceptScore W2051847229C121332964 @default.
• W2051847229 hasConceptScore W2051847229C151346624 @default.
• W2051847229 hasConceptScore W2051847229C157764524 @default.
• W2051847229 hasConceptScore W2051847229C163258240 @default.
• W2051847229 hasConceptScore W2051847229C163581340 @default.
• W2051847229 hasConceptScore W2051847229C165005293 @default.
• W2051847229 hasConceptScore W2051847229C171250308 @default.
• W2051847229 hasConceptScore W2051847229C192562407 @default.
• W2051847229 hasConceptScore W2051847229C200274948 @default.
• W2051847229 hasConceptScore W2051847229C204223013 @default.
• W2051847229 hasConceptScore W2051847229C207789793 @default.
• W2051847229 hasConceptScore W2051847229C2779227376 @default.
• W2051847229 hasConceptScore W2051847229C2780992000 @default.
• W2051847229 hasConceptScore W2051847229C41008148 @default.
• W2051847229 hasConceptScore W2051847229C41794268 @default.
• W2051847229 hasConceptScore W2051847229C49040817 @default.
• W2051847229 hasConceptScore W2051847229C53524968 @default.
• W2051847229 hasConceptScore W2051847229C555944384 @default.
• W2051847229 hasConceptScore W2051847229C62520636 @default.
• W2051847229 hasConceptScore W2051847229C76155785 @default.
• W2051847229 hasConceptScore W2051847229C78371743 @default.
• W2051847229 hasConceptScore W2051847229C94263209 @default.
• W2051847229 hasLocation W20518472291 @default.
• W2051847229 hasOpenAccess W2051847229 @default.
• W2051847229 hasPrimaryLocation W20518472291 @default.
• W2051847229 hasRelatedWork W1451772226 @default.

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