Matches in SemOpenAlex for { <https://semopenalex.org/work/W2051956403> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2051956403 endingPage "2653" @default.
- W2051956403 startingPage "2653" @default.
- W2051956403 abstract "Some types of spin on glass (SOG) are radiationchemically sensitive and act as negative-tone resist for electron beam (EB) exposure. Using direct EB writing, 0.2 µm line and space (L/S) patterns are obtained with a 400 µC/cm 2 EB dose at an acceleration voltage of 30 keV. Although this material has high-resolution capability, the sensitivity is too low for practical resist applications. In order to improve sensitivity, an acid catalyzed system is introduced. 0.3 µm L/S patterns are delineated with an EB exposure dose of 0.7 µC/cm 2 using a SOG-based chemically amplified material. This radiationchemically sensitive characteristic of SOG can be applied to a bi-layer resist system." @default.
- W2051956403 created "2016-06-24" @default.
- W2051956403 creator A5012874068 @default.
- W2051956403 creator A5039097610 @default.
- W2051956403 creator A5051034795 @default.
- W2051956403 creator A5079794782 @default.
- W2051956403 date "1990-11-01" @default.
- W2051956403 modified "2023-10-18" @default.
- W2051956403 title "Novel Process for Direct Delineation of Spin on Glass (SOG)" @default.
- W2051956403 cites W1980097527 @default.
- W2051956403 cites W2089746739 @default.
- W2051956403 cites W2172253633 @default.
- W2051956403 cites W2503564816 @default.
- W2051956403 doi "https://doi.org/10.1143/jjap.29.2653" @default.
- W2051956403 hasPublicationYear "1990" @default.
- W2051956403 type Work @default.
- W2051956403 sameAs 2051956403 @default.
- W2051956403 citedByCount "11" @default.
- W2051956403 crossrefType "journal-article" @default.
- W2051956403 hasAuthorship W2051956403A5012874068 @default.
- W2051956403 hasAuthorship W2051956403A5039097610 @default.
- W2051956403 hasAuthorship W2051956403A5051034795 @default.
- W2051956403 hasAuthorship W2051956403A5079794782 @default.
- W2051956403 hasConcept C113196181 @default.
- W2051956403 hasConcept C121332964 @default.
- W2051956403 hasConcept C122802935 @default.
- W2051956403 hasConcept C127413603 @default.
- W2051956403 hasConcept C138268822 @default.
- W2051956403 hasConcept C147120987 @default.
- W2051956403 hasConcept C150775274 @default.
- W2051956403 hasConcept C154945302 @default.
- W2051956403 hasConcept C171250308 @default.
- W2051956403 hasConcept C185592680 @default.
- W2051956403 hasConcept C192562407 @default.
- W2051956403 hasConcept C21200559 @default.
- W2051956403 hasConcept C24326235 @default.
- W2051956403 hasConcept C26873012 @default.
- W2051956403 hasConcept C2779227376 @default.
- W2051956403 hasConcept C41008148 @default.
- W2051956403 hasConcept C43617362 @default.
- W2051956403 hasConcept C49040817 @default.
- W2051956403 hasConcept C53524968 @default.
- W2051956403 hasConcept C62520636 @default.
- W2051956403 hasConcept C95312477 @default.
- W2051956403 hasConceptScore W2051956403C113196181 @default.
- W2051956403 hasConceptScore W2051956403C121332964 @default.
- W2051956403 hasConceptScore W2051956403C122802935 @default.
- W2051956403 hasConceptScore W2051956403C127413603 @default.
- W2051956403 hasConceptScore W2051956403C138268822 @default.
- W2051956403 hasConceptScore W2051956403C147120987 @default.
- W2051956403 hasConceptScore W2051956403C150775274 @default.
- W2051956403 hasConceptScore W2051956403C154945302 @default.
- W2051956403 hasConceptScore W2051956403C171250308 @default.
- W2051956403 hasConceptScore W2051956403C185592680 @default.
- W2051956403 hasConceptScore W2051956403C192562407 @default.
- W2051956403 hasConceptScore W2051956403C21200559 @default.
- W2051956403 hasConceptScore W2051956403C24326235 @default.
- W2051956403 hasConceptScore W2051956403C26873012 @default.
- W2051956403 hasConceptScore W2051956403C2779227376 @default.
- W2051956403 hasConceptScore W2051956403C41008148 @default.
- W2051956403 hasConceptScore W2051956403C43617362 @default.
- W2051956403 hasConceptScore W2051956403C49040817 @default.
- W2051956403 hasConceptScore W2051956403C53524968 @default.
- W2051956403 hasConceptScore W2051956403C62520636 @default.
- W2051956403 hasConceptScore W2051956403C95312477 @default.
- W2051956403 hasIssue "11R" @default.
- W2051956403 hasLocation W20519564031 @default.
- W2051956403 hasOpenAccess W2051956403 @default.
- W2051956403 hasPrimaryLocation W20519564031 @default.
- W2051956403 hasRelatedWork W1991911058 @default.
- W2051956403 hasRelatedWork W1992029396 @default.
- W2051956403 hasRelatedWork W2006262037 @default.
- W2051956403 hasRelatedWork W2022584471 @default.
- W2051956403 hasRelatedWork W2050602250 @default.
- W2051956403 hasRelatedWork W2061186729 @default.
- W2051956403 hasRelatedWork W2070480731 @default.
- W2051956403 hasRelatedWork W2139871202 @default.
- W2051956403 hasRelatedWork W2363150811 @default.
- W2051956403 hasRelatedWork W2557653631 @default.
- W2051956403 hasVolume "29" @default.
- W2051956403 isParatext "false" @default.
- W2051956403 isRetracted "false" @default.
- W2051956403 magId "2051956403" @default.
- W2051956403 workType "article" @default.