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- W2051990789 abstract "In this study, a comprehensive transport model is developed for Halide Chemical Vapor Deposition (HCVD) system which includes gas dynamics, heat and mass transfer, gas-phase and surface chemistry, and radio-frequency induction heating. This model addresses transport of multiple chemical species in high temperature environment with large temperature difference and complex chemical reactions in gas-phase and on the deposition surface. Numerical modeling of the deposition process in a horizontal hot-wall reactor using SiCl4/C3H8/H2 as precursors has been performed over a wide range of operational parameters to quantify the effects of processing parameters on the film growth. The simulations of the deposition process provide detailed information on the gas-phase composition as well as the distributions of gas velocity and temperature in the reactor. The deposition rate on the substrate surface is also predicted. The results illustrate that deposition temperature and the flow rate of carrier gas play an important role in determining the processing conditions and deposition rate. A high concentration of HCl exists in the growth chamber and the etching of the SiC films by HCl has significant effect on the deposition rate. The modeling approach can be further used to improve reactor design and optimization of processing conditions." @default.
- W2051990789 created "2016-06-24" @default.
- W2051990789 creator A5036431282 @default.
- W2051990789 creator A5055384539 @default.
- W2051990789 date "2008-01-01" @default.
- W2051990789 modified "2023-10-16" @default.
- W2051990789 title "Computational Study of Reactive Flow in Halide Chemical Vapor Deposition of Silicon Carbide Epitaxial Film" @default.
- W2051990789 doi "https://doi.org/10.1115/ht2008-56313" @default.
- W2051990789 hasPublicationYear "2008" @default.
- W2051990789 type Work @default.
- W2051990789 sameAs 2051990789 @default.
- W2051990789 citedByCount "0" @default.
- W2051990789 crossrefType "proceedings-article" @default.
- W2051990789 hasAuthorship W2051990789A5036431282 @default.
- W2051990789 hasAuthorship W2051990789A5055384539 @default.
- W2051990789 hasConcept C100460472 @default.
- W2051990789 hasConcept C107872376 @default.
- W2051990789 hasConcept C111368507 @default.
- W2051990789 hasConcept C111548154 @default.
- W2051990789 hasConcept C113196181 @default.
- W2051990789 hasConcept C118442862 @default.
- W2051990789 hasConcept C121332964 @default.
- W2051990789 hasConcept C127313418 @default.
- W2051990789 hasConcept C127413603 @default.
- W2051990789 hasConcept C151730666 @default.
- W2051990789 hasConcept C171250308 @default.
- W2051990789 hasConcept C172120300 @default.
- W2051990789 hasConcept C178790620 @default.
- W2051990789 hasConcept C183866003 @default.
- W2051990789 hasConcept C185592680 @default.
- W2051990789 hasConcept C19067145 @default.
- W2051990789 hasConcept C192562407 @default.
- W2051990789 hasConcept C2777289219 @default.
- W2051990789 hasConcept C2779227376 @default.
- W2051990789 hasConcept C2780722187 @default.
- W2051990789 hasConcept C2816523 @default.
- W2051990789 hasConcept C42360764 @default.
- W2051990789 hasConcept C57410435 @default.
- W2051990789 hasConcept C64297162 @default.
- W2051990789 hasConcept C75937256 @default.
- W2051990789 hasConcept C86803240 @default.
- W2051990789 hasConcept C97355855 @default.
- W2051990789 hasConceptScore W2051990789C100460472 @default.
- W2051990789 hasConceptScore W2051990789C107872376 @default.
- W2051990789 hasConceptScore W2051990789C111368507 @default.
- W2051990789 hasConceptScore W2051990789C111548154 @default.
- W2051990789 hasConceptScore W2051990789C113196181 @default.
- W2051990789 hasConceptScore W2051990789C118442862 @default.
- W2051990789 hasConceptScore W2051990789C121332964 @default.
- W2051990789 hasConceptScore W2051990789C127313418 @default.
- W2051990789 hasConceptScore W2051990789C127413603 @default.
- W2051990789 hasConceptScore W2051990789C151730666 @default.
- W2051990789 hasConceptScore W2051990789C171250308 @default.
- W2051990789 hasConceptScore W2051990789C172120300 @default.
- W2051990789 hasConceptScore W2051990789C178790620 @default.
- W2051990789 hasConceptScore W2051990789C183866003 @default.
- W2051990789 hasConceptScore W2051990789C185592680 @default.
- W2051990789 hasConceptScore W2051990789C19067145 @default.
- W2051990789 hasConceptScore W2051990789C192562407 @default.
- W2051990789 hasConceptScore W2051990789C2777289219 @default.
- W2051990789 hasConceptScore W2051990789C2779227376 @default.
- W2051990789 hasConceptScore W2051990789C2780722187 @default.
- W2051990789 hasConceptScore W2051990789C2816523 @default.
- W2051990789 hasConceptScore W2051990789C42360764 @default.
- W2051990789 hasConceptScore W2051990789C57410435 @default.
- W2051990789 hasConceptScore W2051990789C64297162 @default.
- W2051990789 hasConceptScore W2051990789C75937256 @default.
- W2051990789 hasConceptScore W2051990789C86803240 @default.
- W2051990789 hasConceptScore W2051990789C97355855 @default.
- W2051990789 hasLocation W20519907891 @default.
- W2051990789 hasOpenAccess W2051990789 @default.
- W2051990789 hasPrimaryLocation W20519907891 @default.
- W2051990789 hasRelatedWork W1991170372 @default.
- W2051990789 hasRelatedWork W2059294249 @default.
- W2051990789 hasRelatedWork W2073683633 @default.
- W2051990789 hasRelatedWork W2316536896 @default.
- W2051990789 hasRelatedWork W2380305424 @default.
- W2051990789 hasRelatedWork W2884154225 @default.
- W2051990789 hasRelatedWork W3150710940 @default.
- W2051990789 hasRelatedWork W3181054684 @default.
- W2051990789 hasRelatedWork W330653193 @default.
- W2051990789 hasRelatedWork W1485099225 @default.
- W2051990789 isParatext "false" @default.
- W2051990789 isRetracted "false" @default.
- W2051990789 magId "2051990789" @default.
- W2051990789 workType "article" @default.