Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052076531> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2052076531 endingPage "1504" @default.
- W2052076531 startingPage "1498" @default.
- W2052076531 abstract "The variation of the electrical properties with depth in the film has been measured for two sputtered tantalum films using anodization by stages in a citric-acid electrolyte as a method of sectioning the films. Changes in the temperature dependence of the resistivity, between ∼20 and 300°K, and in the room-temperature Hall coefficients with film thickness were measured. A dual conduction model for sputtered tantalum films has been used to assist in analyzing the measurements. The resistivities of the tantalum layers have been calculated from simple parallel-resistor theory, and the functional forms of the ρ-vs-T curves of these layers were closely predicted by this model. The trends of these curves with film depth were accounted for by simply changing the relative ``weighting'' of the model's two conduction mechanisms." @default.
- W2052076531 created "2016-06-24" @default.
- W2052076531 creator A5013026904 @default.
- W2052076531 date "1972-04-01" @default.
- W2052076531 modified "2023-09-23" @default.
- W2052076531 title "Variation with Depth of the Electrical Properties of Sputtered Tantalum Films" @default.
- W2052076531 cites W1973668576 @default.
- W2052076531 cites W1981490635 @default.
- W2052076531 cites W2018172296 @default.
- W2052076531 cites W2057939236 @default.
- W2052076531 cites W2081799032 @default.
- W2052076531 cites W2085683142 @default.
- W2052076531 cites W2140899601 @default.
- W2052076531 cites W4240956540 @default.
- W2052076531 doi "https://doi.org/10.1063/1.1661349" @default.
- W2052076531 hasPublicationYear "1972" @default.
- W2052076531 type Work @default.
- W2052076531 sameAs 2052076531 @default.
- W2052076531 citedByCount "2" @default.
- W2052076531 crossrefType "journal-article" @default.
- W2052076531 hasAuthorship W2052076531A5013026904 @default.
- W2052076531 hasConcept C113196181 @default.
- W2052076531 hasConcept C119599485 @default.
- W2052076531 hasConcept C121332964 @default.
- W2052076531 hasConcept C127413603 @default.
- W2052076531 hasConcept C137488568 @default.
- W2052076531 hasConcept C159985019 @default.
- W2052076531 hasConcept C165801399 @default.
- W2052076531 hasConcept C171250308 @default.
- W2052076531 hasConcept C172100665 @default.
- W2052076531 hasConcept C185592680 @default.
- W2052076531 hasConcept C19067145 @default.
- W2052076531 hasConcept C191897082 @default.
- W2052076531 hasConcept C192562407 @default.
- W2052076531 hasConcept C202374169 @default.
- W2052076531 hasConcept C22016385 @default.
- W2052076531 hasConcept C22423302 @default.
- W2052076531 hasConcept C26873012 @default.
- W2052076531 hasConcept C2780033417 @default.
- W2052076531 hasConcept C43617362 @default.
- W2052076531 hasConcept C513153333 @default.
- W2052076531 hasConcept C514619126 @default.
- W2052076531 hasConcept C544778455 @default.
- W2052076531 hasConcept C69990965 @default.
- W2052076531 hasConceptScore W2052076531C113196181 @default.
- W2052076531 hasConceptScore W2052076531C119599485 @default.
- W2052076531 hasConceptScore W2052076531C121332964 @default.
- W2052076531 hasConceptScore W2052076531C127413603 @default.
- W2052076531 hasConceptScore W2052076531C137488568 @default.
- W2052076531 hasConceptScore W2052076531C159985019 @default.
- W2052076531 hasConceptScore W2052076531C165801399 @default.
- W2052076531 hasConceptScore W2052076531C171250308 @default.
- W2052076531 hasConceptScore W2052076531C172100665 @default.
- W2052076531 hasConceptScore W2052076531C185592680 @default.
- W2052076531 hasConceptScore W2052076531C19067145 @default.
- W2052076531 hasConceptScore W2052076531C191897082 @default.
- W2052076531 hasConceptScore W2052076531C192562407 @default.
- W2052076531 hasConceptScore W2052076531C202374169 @default.
- W2052076531 hasConceptScore W2052076531C22016385 @default.
- W2052076531 hasConceptScore W2052076531C22423302 @default.
- W2052076531 hasConceptScore W2052076531C26873012 @default.
- W2052076531 hasConceptScore W2052076531C2780033417 @default.
- W2052076531 hasConceptScore W2052076531C43617362 @default.
- W2052076531 hasConceptScore W2052076531C513153333 @default.
- W2052076531 hasConceptScore W2052076531C514619126 @default.
- W2052076531 hasConceptScore W2052076531C544778455 @default.
- W2052076531 hasConceptScore W2052076531C69990965 @default.
- W2052076531 hasIssue "4" @default.
- W2052076531 hasLocation W20520765311 @default.
- W2052076531 hasOpenAccess W2052076531 @default.
- W2052076531 hasPrimaryLocation W20520765311 @default.
- W2052076531 hasRelatedWork W1978172672 @default.
- W2052076531 hasRelatedWork W2000616555 @default.
- W2052076531 hasRelatedWork W2004468477 @default.
- W2052076531 hasRelatedWork W2087999094 @default.
- W2052076531 hasRelatedWork W2144165878 @default.
- W2052076531 hasRelatedWork W2145378928 @default.
- W2052076531 hasRelatedWork W2155077244 @default.
- W2052076531 hasRelatedWork W2425873374 @default.
- W2052076531 hasRelatedWork W2511021840 @default.
- W2052076531 hasRelatedWork W2954843042 @default.
- W2052076531 hasVolume "43" @default.
- W2052076531 isParatext "false" @default.
- W2052076531 isRetracted "false" @default.
- W2052076531 magId "2052076531" @default.
- W2052076531 workType "article" @default.