Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052085442> ?p ?o ?g. }
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- W2052085442 endingPage "5312" @default.
- W2052085442 startingPage "5304" @default.
- W2052085442 abstract "A thin silicon dioxide (SiO2) film was nitrided with nitrogen plasma generated through a surface-wave plasma (SWP) or inductively coupled plasma (ICP) source. The plasma and nitridation characteristics were compared in both plasma sources. We found that large amounts of nitrogen atomic ions (N+) and neutral radicals (N•) were included in the SWP; however, the dominant species were nitrogen molecular ions (N2+) in the ICP. Nitrogen areal density in the nitrided SiO2 film is correlated with ion dose in the SWP, which suggests that the main reactants are ions. Also, there exists a large nitrogen loss in the ICP, but a small loss in the SWP. To understand these differences, we performed molecular dynamics (MD) simulations based on a semi-empirical molecular orbital (MO) method. We investigated reactions by irradiating N+ or N2+ to a SiO2 molecule, thermal stability of the reaction products, and reactions between the reaction products and N•. Consequently, we found that the reaction products are stable for N+, but are unstable for N2+, which is consistent qualitatively with experimental results. Finally, we conclude that stable reaction products are formed by N+ and N• irradiation, and that the SWP source that we employed is the appropriate plasma source for generating these species efficiently." @default.
- W2052085442 created "2016-06-24" @default.
- W2052085442 creator A5000381741 @default.
- W2052085442 creator A5017700477 @default.
- W2052085442 creator A5045284255 @default.
- W2052085442 creator A5074156398 @default.
- W2052085442 date "2007-08-06" @default.
- W2052085442 modified "2023-10-14" @default.
- W2052085442 title "Mechanism of Plasma Nitridation of Silicon Dioxide Employing Surface-Wave and Inductively Coupled Plasma Sources" @default.
- W2052085442 cites W1964720226 @default.
- W2052085442 cites W1973449797 @default.
- W2052085442 cites W1983736877 @default.
- W2052085442 cites W1983948854 @default.
- W2052085442 cites W1984221556 @default.
- W2052085442 cites W1999672471 @default.
- W2052085442 cites W2003431668 @default.
- W2052085442 cites W2016884151 @default.
- W2052085442 cites W2032611071 @default.
- W2052085442 cites W2034628046 @default.
- W2052085442 cites W2041548068 @default.
- W2052085442 cites W2043627066 @default.
- W2052085442 cites W2069422190 @default.
- W2052085442 cites W2070048733 @default.
- W2052085442 cites W2084859217 @default.
- W2052085442 cites W2087207073 @default.
- W2052085442 cites W2091021919 @default.
- W2052085442 cites W2103282727 @default.
- W2052085442 cites W2152444648 @default.
- W2052085442 cites W2171235008 @default.
- W2052085442 cites W2951231216 @default.
- W2052085442 doi "https://doi.org/10.1143/jjap.46.5304" @default.
- W2052085442 hasPublicationYear "2007" @default.
- W2052085442 type Work @default.
- W2052085442 sameAs 2052085442 @default.
- W2052085442 citedByCount "2" @default.
- W2052085442 countsByYear W20520854422021 @default.
- W2052085442 countsByYear W20520854422023 @default.
- W2052085442 crossrefType "journal-article" @default.
- W2052085442 hasAuthorship W2052085442A5000381741 @default.
- W2052085442 hasAuthorship W2052085442A5017700477 @default.
- W2052085442 hasAuthorship W2052085442A5045284255 @default.
- W2052085442 hasAuthorship W2052085442A5074156398 @default.
- W2052085442 hasConcept C121332964 @default.
- W2052085442 hasConcept C185592680 @default.
- W2052085442 hasConcept C191897082 @default.
- W2052085442 hasConcept C192562407 @default.
- W2052085442 hasConcept C196009443 @default.
- W2052085442 hasConcept C2779089622 @default.
- W2052085442 hasConcept C49040817 @default.
- W2052085442 hasConcept C544956773 @default.
- W2052085442 hasConcept C62520636 @default.
- W2052085442 hasConcept C82706917 @default.
- W2052085442 hasConcept C95974651 @default.
- W2052085442 hasConceptScore W2052085442C121332964 @default.
- W2052085442 hasConceptScore W2052085442C185592680 @default.
- W2052085442 hasConceptScore W2052085442C191897082 @default.
- W2052085442 hasConceptScore W2052085442C192562407 @default.
- W2052085442 hasConceptScore W2052085442C196009443 @default.
- W2052085442 hasConceptScore W2052085442C2779089622 @default.
- W2052085442 hasConceptScore W2052085442C49040817 @default.
- W2052085442 hasConceptScore W2052085442C544956773 @default.
- W2052085442 hasConceptScore W2052085442C62520636 @default.
- W2052085442 hasConceptScore W2052085442C82706917 @default.
- W2052085442 hasConceptScore W2052085442C95974651 @default.
- W2052085442 hasIssue "8A" @default.
- W2052085442 hasLocation W20520854421 @default.
- W2052085442 hasOpenAccess W2052085442 @default.
- W2052085442 hasPrimaryLocation W20520854421 @default.
- W2052085442 hasRelatedWork W1982120222 @default.
- W2052085442 hasRelatedWork W1998010466 @default.
- W2052085442 hasRelatedWork W1999066460 @default.
- W2052085442 hasRelatedWork W2058253193 @default.
- W2052085442 hasRelatedWork W2061371550 @default.
- W2052085442 hasRelatedWork W2329854535 @default.
- W2052085442 hasRelatedWork W2332497334 @default.
- W2052085442 hasRelatedWork W4313365404 @default.
- W2052085442 hasRelatedWork W4366114032 @default.
- W2052085442 hasRelatedWork W2526203215 @default.
- W2052085442 hasVolume "46" @default.
- W2052085442 isParatext "false" @default.
- W2052085442 isRetracted "false" @default.
- W2052085442 magId "2052085442" @default.
- W2052085442 workType "article" @default.