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- W2052108667 endingPage "882" @default.
- W2052108667 startingPage "879" @default.
- W2052108667 abstract "An experimental study of the deposition via plasma-enhanced CVD of high quality N-rich films of a-SixNyHz has been undertaken. The effects of varying the substrate temperature Ts and the plasma power density W/A on the properties of the films have been investigated. From determinations of the concentrations of Si-Si bonds and of NH2 units in the films as well as of the slope Eo of the exponential absorption edge it has been shown that high quality N-rich films can be deposited at Ts ≥ 400°C, with R = NH3/SiH4 ≥ 40, and W/A > 0.4 W/cm2. These films have y/x ∼ 1.9 and z/x ∼ 1.8, and thus are close in composition to silicon diimide, Si(NH)2." @default.
- W2052108667 created "2016-06-24" @default.
- W2052108667 creator A5025062608 @default.
- W2052108667 creator A5048227336 @default.
- W2052108667 date "1991-01-01" @default.
- W2052108667 modified "2023-09-26" @default.
- W2052108667 title "Studies of the deposition of high quality N-rich amorphous silicon nitride films" @default.
- W2052108667 cites W186917812 @default.
- W2052108667 cites W1968998146 @default.
- W2052108667 cites W1969464536 @default.
- W2052108667 cites W1976158397 @default.
- W2052108667 cites W2027631221 @default.
- W2052108667 cites W2069152404 @default.
- W2052108667 cites W2080207215 @default.
- W2052108667 cites W2090608090 @default.
- W2052108667 cites W2111397230 @default.
- W2052108667 doi "https://doi.org/10.1016/s0022-3093(05)80260-1" @default.
- W2052108667 hasPublicationYear "1991" @default.
- W2052108667 type Work @default.
- W2052108667 sameAs 2052108667 @default.
- W2052108667 citedByCount "11" @default.
- W2052108667 countsByYear W20521086672016 @default.
- W2052108667 crossrefType "journal-article" @default.
- W2052108667 hasAuthorship W2052108667A5025062608 @default.
- W2052108667 hasAuthorship W2052108667A5048227336 @default.
- W2052108667 hasConcept C111368507 @default.
- W2052108667 hasConcept C113196181 @default.
- W2052108667 hasConcept C127313418 @default.
- W2052108667 hasConcept C151730666 @default.
- W2052108667 hasConcept C171250308 @default.
- W2052108667 hasConcept C178790620 @default.
- W2052108667 hasConcept C185592680 @default.
- W2052108667 hasConcept C19067145 @default.
- W2052108667 hasConcept C192562407 @default.
- W2052108667 hasConcept C194760766 @default.
- W2052108667 hasConcept C2777289219 @default.
- W2052108667 hasConcept C2777431650 @default.
- W2052108667 hasConcept C2779189646 @default.
- W2052108667 hasConcept C2779227376 @default.
- W2052108667 hasConcept C2781379571 @default.
- W2052108667 hasConcept C2816523 @default.
- W2052108667 hasConcept C32909587 @default.
- W2052108667 hasConcept C49040817 @default.
- W2052108667 hasConcept C544956773 @default.
- W2052108667 hasConcept C56052488 @default.
- W2052108667 hasConcept C64297162 @default.
- W2052108667 hasConcept C8010536 @default.
- W2052108667 hasConcept C86803240 @default.
- W2052108667 hasConceptScore W2052108667C111368507 @default.
- W2052108667 hasConceptScore W2052108667C113196181 @default.
- W2052108667 hasConceptScore W2052108667C127313418 @default.
- W2052108667 hasConceptScore W2052108667C151730666 @default.
- W2052108667 hasConceptScore W2052108667C171250308 @default.
- W2052108667 hasConceptScore W2052108667C178790620 @default.
- W2052108667 hasConceptScore W2052108667C185592680 @default.
- W2052108667 hasConceptScore W2052108667C19067145 @default.
- W2052108667 hasConceptScore W2052108667C192562407 @default.
- W2052108667 hasConceptScore W2052108667C194760766 @default.
- W2052108667 hasConceptScore W2052108667C2777289219 @default.
- W2052108667 hasConceptScore W2052108667C2777431650 @default.
- W2052108667 hasConceptScore W2052108667C2779189646 @default.
- W2052108667 hasConceptScore W2052108667C2779227376 @default.
- W2052108667 hasConceptScore W2052108667C2781379571 @default.
- W2052108667 hasConceptScore W2052108667C2816523 @default.
- W2052108667 hasConceptScore W2052108667C32909587 @default.
- W2052108667 hasConceptScore W2052108667C49040817 @default.
- W2052108667 hasConceptScore W2052108667C544956773 @default.
- W2052108667 hasConceptScore W2052108667C56052488 @default.
- W2052108667 hasConceptScore W2052108667C64297162 @default.
- W2052108667 hasConceptScore W2052108667C8010536 @default.
- W2052108667 hasConceptScore W2052108667C86803240 @default.
- W2052108667 hasLocation W20521086671 @default.
- W2052108667 hasOpenAccess W2052108667 @default.
- W2052108667 hasPrimaryLocation W20521086671 @default.
- W2052108667 hasRelatedWork W194636971 @default.
- W2052108667 hasRelatedWork W1967331118 @default.
- W2052108667 hasRelatedWork W1982526145 @default.
- W2052108667 hasRelatedWork W1994952126 @default.
- W2052108667 hasRelatedWork W2030242332 @default.
- W2052108667 hasRelatedWork W2361439082 @default.
- W2052108667 hasRelatedWork W2364045966 @default.
- W2052108667 hasRelatedWork W2386027266 @default.
- W2052108667 hasRelatedWork W4206854469 @default.
- W2052108667 hasRelatedWork W4225347794 @default.
- W2052108667 hasVolume "137-138" @default.
- W2052108667 isParatext "false" @default.
- W2052108667 isRetracted "false" @default.
- W2052108667 magId "2052108667" @default.
- W2052108667 workType "article" @default.