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• W2052116847 abstract "We use a global (volume averaged) model to study the presence of negative ions and metastable species in low-pressure high-density oxygen discharges. We find the negative oxygen ion O- to be the dominant negative ion in the discharge, the density of the negative ion O2- to be small and the density of the negative ion O-3 to be negligible in the pressure range of interest, 1-100?mTorr. Dissociative attachment of the oxygen molecule in the ground-state O2(3?g-) and the metastable oxygen molecule O2(a1?g) are the dominating channels for the creation of the negative oxygen ion O-. At low pressure (<5?mTorr) recombination involving O- and O+ ions is the main loss channel for O- ions. At higher pressure, the detachment on O(3P) becomes the main loss channel for the O- ion. The creation of O-2 is mainly through dissociative attachment of ozone O3. Ozone is almost entirely created through detachment by the collision of O- with the metastable oxygen molecule O2(a1?g). The creation of O-2 is thus greatly influenced by this detachment process and neglecting the detachment has a significant influence on the density of O-2 ions. At low pressure (<10?mTorr) the O-2 ion is mainly lost through recombination while at higher pressure the charge transfer to form O2 is the dominating loss process." @default.
• W2052116847 created "2016-06-24" @default.
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• W2052116847 date "2001-03-20" @default.
• W2052116847 modified "2023-10-06" @default.
• W2052116847 title "Electronegativity of low-pressure high-density oxygen discharges" @default.
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• W2052116847 doi "https://doi.org/10.1088/0022-3727/34/7/312" @default.
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