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• W2052179937 abstract "The diffusion of gallium into silicon through an oxide layer was studied by a p-n junction technique. Using the two-boundary diffusion model, the diffusivity of gallium within the oxide layer was estimated to be 5.3 × 10−11cm2sec (√D = 4·4 μ√hr) at 1100°C and 1.7 × 10−9cm2sec(√D) = 25.5 μ√hr) at 1250°C. The segregation coefficient of gallium at the silicon-silicon dioxide interface was estimated by two methods, both based on the two-boundary model, to be approximately m ≊ 20 where m  CsiCox. These methods were also applied to published data on boron and yielded a segregation coefficient of about 10−2." @default.
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• W2052179937 date "1964-09-01" @default.
• W2052179937 modified "2023-10-03" @default.
• W2052179937 title "Diffusion of gallium through a silicon dioxide layer" @default.
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• W2052179937 doi "https://doi.org/10.1016/0022-3697(64)90036-8" @default.
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