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- W2052204421 endingPage "2129" @default.
- W2052204421 startingPage "2127" @default.
- W2052204421 abstract "A novel p-type implantation using a co-implant of phosphorus and beryllium to produce a shallow p+ surface layer is reported. The results from electrical measurement show an excellent control of the carrier profile. There is no Be in-diffusion observed and an improvement of the electrical activation also resulted." @default.
- W2052204421 created "2016-06-24" @default.
- W2052204421 creator A5022808941 @default.
- W2052204421 date "1987-12-21" @default.
- W2052204421 modified "2023-09-26" @default.
- W2052204421 title "Formation of a shallow<i>p</i><sup>+</sup>layer on InP using a P/Be co‐implant" @default.
- W2052204421 cites W1970205551 @default.
- W2052204421 cites W1978784701 @default.
- W2052204421 cites W2000377118 @default.
- W2052204421 cites W2007778511 @default.
- W2052204421 cites W2019676541 @default.
- W2052204421 cites W2048060461 @default.
- W2052204421 cites W2050976100 @default.
- W2052204421 cites W2068380429 @default.
- W2052204421 cites W2074177549 @default.
- W2052204421 cites W2076383350 @default.
- W2052204421 cites W2081168099 @default.
- W2052204421 doi "https://doi.org/10.1063/1.98968" @default.
- W2052204421 hasPublicationYear "1987" @default.
- W2052204421 type Work @default.
- W2052204421 sameAs 2052204421 @default.
- W2052204421 citedByCount "51" @default.
- W2052204421 crossrefType "journal-article" @default.
- W2052204421 hasAuthorship W2052204421A5022808941 @default.
- W2052204421 hasConcept C107872376 @default.
- W2052204421 hasConcept C113196181 @default.
- W2052204421 hasConcept C121332964 @default.
- W2052204421 hasConcept C141071460 @default.
- W2052204421 hasConcept C145148216 @default.
- W2052204421 hasConcept C171250308 @default.
- W2052204421 hasConcept C178790620 @default.
- W2052204421 hasConcept C185592680 @default.
- W2052204421 hasConcept C192562407 @default.
- W2052204421 hasConcept C197751951 @default.
- W2052204421 hasConcept C2779227376 @default.
- W2052204421 hasConcept C2781411149 @default.
- W2052204421 hasConcept C41823505 @default.
- W2052204421 hasConcept C49040817 @default.
- W2052204421 hasConcept C506630978 @default.
- W2052204421 hasConcept C69357855 @default.
- W2052204421 hasConcept C71924100 @default.
- W2052204421 hasConcept C97355855 @default.
- W2052204421 hasConceptScore W2052204421C107872376 @default.
- W2052204421 hasConceptScore W2052204421C113196181 @default.
- W2052204421 hasConceptScore W2052204421C121332964 @default.
- W2052204421 hasConceptScore W2052204421C141071460 @default.
- W2052204421 hasConceptScore W2052204421C145148216 @default.
- W2052204421 hasConceptScore W2052204421C171250308 @default.
- W2052204421 hasConceptScore W2052204421C178790620 @default.
- W2052204421 hasConceptScore W2052204421C185592680 @default.
- W2052204421 hasConceptScore W2052204421C192562407 @default.
- W2052204421 hasConceptScore W2052204421C197751951 @default.
- W2052204421 hasConceptScore W2052204421C2779227376 @default.
- W2052204421 hasConceptScore W2052204421C2781411149 @default.
- W2052204421 hasConceptScore W2052204421C41823505 @default.
- W2052204421 hasConceptScore W2052204421C49040817 @default.
- W2052204421 hasConceptScore W2052204421C506630978 @default.
- W2052204421 hasConceptScore W2052204421C69357855 @default.
- W2052204421 hasConceptScore W2052204421C71924100 @default.
- W2052204421 hasConceptScore W2052204421C97355855 @default.
- W2052204421 hasIssue "25" @default.
- W2052204421 hasLocation W20522044211 @default.
- W2052204421 hasOpenAccess W2052204421 @default.
- W2052204421 hasPrimaryLocation W20522044211 @default.
- W2052204421 hasRelatedWork W1997294178 @default.
- W2052204421 hasRelatedWork W2033950145 @default.
- W2052204421 hasRelatedWork W2042157722 @default.
- W2052204421 hasRelatedWork W2059314597 @default.
- W2052204421 hasRelatedWork W2086339616 @default.
- W2052204421 hasRelatedWork W2139871202 @default.
- W2052204421 hasRelatedWork W2460496355 @default.
- W2052204421 hasRelatedWork W2617238589 @default.
- W2052204421 hasRelatedWork W2888832963 @default.
- W2052204421 hasRelatedWork W4306971710 @default.
- W2052204421 hasVolume "51" @default.
- W2052204421 isParatext "false" @default.
- W2052204421 isRetracted "false" @default.
- W2052204421 magId "2052204421" @default.
- W2052204421 workType "article" @default.