Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052219533> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2052219533 endingPage "4166" @default.
- W2052219533 startingPage "4159" @default.
- W2052219533 abstract "Camera-based thermoreflectance microscopy is a unique tool for high spatial resolution thermal imaging of working integrated circuits. However, a calibration is necessary to obtain quantitative temperatures on the complex surface of integrated circuits. The spatial and temperature resolutions reached by thermoreflectance are excellent (360?nm and 2.5 ? 10?2?K in 1?min here), but the precision is more difficult to assess, notably due to the lack of comparable thermal techniques at submicron scales. We propose here a Peltier element control of the whole package temperature in order to obtain calibration coefficients simultaneously on several materials visible on the surface of the circuit. Under high magnifications, movements associated with thermal expansion are corrected using a piezo electric displacement and a software image shift. This calibration method has been validated by comparison with temperatures measured using integrated thermistors and diodes and by a finite volume simulation. We show that thermoreflectance measurements agree within a precision of ?2.3% with the on-chip sensors measurements. The diode temperature is found to underestimate the actual temperature of the active area by almost 70% due to the thermal contact of the diode with the substrate, acting as a heat sink." @default.
- W2052219533 created "2016-06-24" @default.
- W2052219533 creator A5014984815 @default.
- W2052219533 creator A5018642299 @default.
- W2052219533 creator A5026495252 @default.
- W2052219533 creator A5029398783 @default.
- W2052219533 creator A5047995533 @default.
- W2052219533 creator A5060873655 @default.
- W2052219533 creator A5084051739 @default.
- W2052219533 date "2006-09-18" @default.
- W2052219533 modified "2023-09-27" @default.
- W2052219533 title "Thermoreflectance temperature imaging of integrated circuits: calibration technique and quantitative comparison with integrated sensors and simulations" @default.
- W2052219533 cites W1976984172 @default.
- W2052219533 cites W1989207795 @default.
- W2052219533 cites W2006003332 @default.
- W2052219533 cites W2006166757 @default.
- W2052219533 cites W2011837532 @default.
- W2052219533 cites W2015635420 @default.
- W2052219533 cites W2018589471 @default.
- W2052219533 cites W2027134164 @default.
- W2052219533 cites W2033585654 @default.
- W2052219533 cites W2036838520 @default.
- W2052219533 cites W2040661631 @default.
- W2052219533 cites W2041219316 @default.
- W2052219533 cites W2053484286 @default.
- W2052219533 cites W2055494785 @default.
- W2052219533 cites W2057036132 @default.
- W2052219533 cites W2057524013 @default.
- W2052219533 cites W2063941141 @default.
- W2052219533 cites W2065435469 @default.
- W2052219533 cites W2070944549 @default.
- W2052219533 cites W2102657689 @default.
- W2052219533 cites W2105146117 @default.
- W2052219533 cites W2119089023 @default.
- W2052219533 cites W2129442089 @default.
- W2052219533 doi "https://doi.org/10.1088/0022-3727/39/19/007" @default.
- W2052219533 hasPublicationYear "2006" @default.
- W2052219533 type Work @default.
- W2052219533 sameAs 2052219533 @default.
- W2052219533 citedByCount "38" @default.
- W2052219533 countsByYear W20522195332012 @default.
- W2052219533 countsByYear W20522195332013 @default.
- W2052219533 countsByYear W20522195332014 @default.
- W2052219533 countsByYear W20522195332015 @default.
- W2052219533 countsByYear W20522195332016 @default.
- W2052219533 countsByYear W20522195332017 @default.
- W2052219533 countsByYear W20522195332018 @default.
- W2052219533 countsByYear W20522195332020 @default.
- W2052219533 countsByYear W20522195332021 @default.
- W2052219533 countsByYear W20522195332022 @default.
- W2052219533 crossrefType "journal-article" @default.
- W2052219533 hasAuthorship W2052219533A5014984815 @default.
- W2052219533 hasAuthorship W2052219533A5018642299 @default.
- W2052219533 hasAuthorship W2052219533A5026495252 @default.
- W2052219533 hasAuthorship W2052219533A5029398783 @default.
- W2052219533 hasAuthorship W2052219533A5047995533 @default.
- W2052219533 hasAuthorship W2052219533A5060873655 @default.
- W2052219533 hasAuthorship W2052219533A5084051739 @default.
- W2052219533 hasConcept C119599485 @default.
- W2052219533 hasConcept C121332964 @default.
- W2052219533 hasConcept C127413603 @default.
- W2052219533 hasConcept C134146338 @default.
- W2052219533 hasConcept C165838908 @default.
- W2052219533 hasConcept C192562407 @default.
- W2052219533 hasConcept C49040817 @default.
- W2052219533 hasConcept C530198007 @default.
- W2052219533 hasConcept C62520636 @default.
- W2052219533 hasConcept C72293138 @default.
- W2052219533 hasConceptScore W2052219533C119599485 @default.
- W2052219533 hasConceptScore W2052219533C121332964 @default.
- W2052219533 hasConceptScore W2052219533C127413603 @default.
- W2052219533 hasConceptScore W2052219533C134146338 @default.
- W2052219533 hasConceptScore W2052219533C165838908 @default.
- W2052219533 hasConceptScore W2052219533C192562407 @default.
- W2052219533 hasConceptScore W2052219533C49040817 @default.
- W2052219533 hasConceptScore W2052219533C530198007 @default.
- W2052219533 hasConceptScore W2052219533C62520636 @default.
- W2052219533 hasConceptScore W2052219533C72293138 @default.
- W2052219533 hasIssue "19" @default.
- W2052219533 hasLocation W20522195331 @default.
- W2052219533 hasOpenAccess W2052219533 @default.
- W2052219533 hasPrimaryLocation W20522195331 @default.
- W2052219533 hasRelatedWork W1596360643 @default.
- W2052219533 hasRelatedWork W173548140 @default.
- W2052219533 hasRelatedWork W1861191893 @default.
- W2052219533 hasRelatedWork W2095543164 @default.
- W2052219533 hasRelatedWork W2125378667 @default.
- W2052219533 hasRelatedWork W2126680276 @default.
- W2052219533 hasRelatedWork W2317695996 @default.
- W2052219533 hasRelatedWork W2324978855 @default.
- W2052219533 hasRelatedWork W2383748630 @default.
- W2052219533 hasRelatedWork W2542134002 @default.
- W2052219533 hasVolume "39" @default.
- W2052219533 isParatext "false" @default.
- W2052219533 isRetracted "false" @default.
- W2052219533 magId "2052219533" @default.
- W2052219533 workType "article" @default.