Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052263199> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2052263199 endingPage "1048" @default.
- W2052263199 startingPage "1045" @default.
- W2052263199 abstract "The benefits of supercritical resist drying (SRD) technique using carbon dioxide (CO2) are investigated with respect to the resolution of dense patterns and the aspect ratio (AR) of nano-structures in rather thick HSQ layers. For double lines separated by a distance of 50 nm the maximum achievable AR is trebled using SRD processes compared to conventional nitrogen blow. The mechanical stability of resist structures is significantly improved by using SRD." @default.
- W2052263199 created "2016-06-24" @default.
- W2052263199 creator A5047287130 @default.
- W2052263199 creator A5047500761 @default.
- W2052263199 creator A5084030710 @default.
- W2052263199 creator A5085683597 @default.
- W2052263199 creator A5087318317 @default.
- W2052263199 creator A5087833312 @default.
- W2052263199 date "2007-05-01" @default.
- W2052263199 modified "2023-09-25" @default.
- W2052263199 title "Supercritical drying for high aspect-ratio HSQ nano-structures" @default.
- W2052263199 cites W1989600325 @default.
- W2052263199 cites W2038614949 @default.
- W2052263199 cites W2051349581 @default.
- W2052263199 cites W2052756405 @default.
- W2052263199 cites W2072372616 @default.
- W2052263199 cites W2099708217 @default.
- W2052263199 cites W2106511064 @default.
- W2052263199 cites W2156896945 @default.
- W2052263199 doi "https://doi.org/10.1016/j.mee.2007.01.142" @default.
- W2052263199 hasPublicationYear "2007" @default.
- W2052263199 type Work @default.
- W2052263199 sameAs 2052263199 @default.
- W2052263199 citedByCount "12" @default.
- W2052263199 countsByYear W20522631992012 @default.
- W2052263199 countsByYear W20522631992013 @default.
- W2052263199 countsByYear W20522631992021 @default.
- W2052263199 crossrefType "journal-article" @default.
- W2052263199 hasAuthorship W2052263199A5047287130 @default.
- W2052263199 hasAuthorship W2052263199A5047500761 @default.
- W2052263199 hasAuthorship W2052263199A5084030710 @default.
- W2052263199 hasAuthorship W2052263199A5085683597 @default.
- W2052263199 hasAuthorship W2052263199A5087318317 @default.
- W2052263199 hasAuthorship W2052263199A5087833312 @default.
- W2052263199 hasConcept C118419359 @default.
- W2052263199 hasConcept C127313418 @default.
- W2052263199 hasConcept C127413603 @default.
- W2052263199 hasConcept C134458231 @default.
- W2052263199 hasConcept C159985019 @default.
- W2052263199 hasConcept C171250308 @default.
- W2052263199 hasConcept C178790620 @default.
- W2052263199 hasConcept C185592680 @default.
- W2052263199 hasConcept C192562407 @default.
- W2052263199 hasConcept C2779227376 @default.
- W2052263199 hasConcept C2780357685 @default.
- W2052263199 hasConcept C3020199158 @default.
- W2052263199 hasConcept C42360764 @default.
- W2052263199 hasConcept C49040817 @default.
- W2052263199 hasConcept C53524968 @default.
- W2052263199 hasConcept C62649853 @default.
- W2052263199 hasConcept C82558694 @default.
- W2052263199 hasConceptScore W2052263199C118419359 @default.
- W2052263199 hasConceptScore W2052263199C127313418 @default.
- W2052263199 hasConceptScore W2052263199C127413603 @default.
- W2052263199 hasConceptScore W2052263199C134458231 @default.
- W2052263199 hasConceptScore W2052263199C159985019 @default.
- W2052263199 hasConceptScore W2052263199C171250308 @default.
- W2052263199 hasConceptScore W2052263199C178790620 @default.
- W2052263199 hasConceptScore W2052263199C185592680 @default.
- W2052263199 hasConceptScore W2052263199C192562407 @default.
- W2052263199 hasConceptScore W2052263199C2779227376 @default.
- W2052263199 hasConceptScore W2052263199C2780357685 @default.
- W2052263199 hasConceptScore W2052263199C3020199158 @default.
- W2052263199 hasConceptScore W2052263199C42360764 @default.
- W2052263199 hasConceptScore W2052263199C49040817 @default.
- W2052263199 hasConceptScore W2052263199C53524968 @default.
- W2052263199 hasConceptScore W2052263199C62649853 @default.
- W2052263199 hasConceptScore W2052263199C82558694 @default.
- W2052263199 hasIssue "5-8" @default.
- W2052263199 hasLocation W20522631991 @default.
- W2052263199 hasOpenAccess W2052263199 @default.
- W2052263199 hasPrimaryLocation W20522631991 @default.
- W2052263199 hasRelatedWork W1974957919 @default.
- W2052263199 hasRelatedWork W2055338865 @default.
- W2052263199 hasRelatedWork W2081861875 @default.
- W2052263199 hasRelatedWork W2087216514 @default.
- W2052263199 hasRelatedWork W2292660899 @default.
- W2052263199 hasRelatedWork W2295510925 @default.
- W2052263199 hasRelatedWork W2317229910 @default.
- W2052263199 hasRelatedWork W2737312439 @default.
- W2052263199 hasRelatedWork W3025574647 @default.
- W2052263199 hasRelatedWork W3148686469 @default.
- W2052263199 hasVolume "84" @default.
- W2052263199 isParatext "false" @default.
- W2052263199 isRetracted "false" @default.
- W2052263199 magId "2052263199" @default.
- W2052263199 workType "article" @default.