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W2052377710 abstract "A general expression of the steady state composition during sputtering has been derived based on the preferential sputtering model. The resulting formula has been applied to calculate the steady state concentration in a AgAuPd ternary system and the calculated values are in agreement, at least qualitatively, with the experimental data." @default.
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W2052377710 date "1985-10-01" @default.
W2052377710 modified "2023-09-23" @default.
W2052377710 title "A general expression of the steady state composition for multicomponent system during ion sputtering" @default.
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W2052377710 doi "https://doi.org/10.1016/0167-2584(85)90504-3" @default.
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