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- W2052394161 abstract "One of the major challenges in alternating aperture phase shift mask (AAPSM) production is the variability of the glass etch rate as a function of exposed area (pattern loading) on the mask. The lack of an endpoint system means that the etch is entirely based on time, and the result is increased variability in the mean etch depth as well as decreased yields against ever tightening phase specifications. If a transmissive etch stop layer were placed underneath an appropriate thickness of glass to obtain a 180-degree phase shift, the result is a forced endpoint at exactly 180 degrees every time. Such a film system also leads to many process advantages over conventional AAPSM processes. This paper discusses the film stack deposition and maskmaking at Photronics, Inc. and details the process advantages of using AAPSM blanks with etch stop layers." @default.
- W2052394161 created "2016-06-24" @default.
- W2052394161 creator A5001631511 @default.
- W2052394161 creator A5006551924 @default.
- W2052394161 creator A5041001075 @default.
- W2052394161 date "2003-12-15" @default.
- W2052394161 modified "2023-09-26" @default.
- W2052394161 title "Improved phase uniformity control using a new AAPSM etch stop layer technique" @default.
- W2052394161 doi "https://doi.org/10.1117/12.518130" @default.
- W2052394161 hasPublicationYear "2003" @default.
- W2052394161 type Work @default.
- W2052394161 sameAs 2052394161 @default.
- W2052394161 citedByCount "1" @default.
- W2052394161 crossrefType "proceedings-article" @default.
- W2052394161 hasAuthorship W2052394161A5001631511 @default.
- W2052394161 hasAuthorship W2052394161A5006551924 @default.
- W2052394161 hasAuthorship W2052394161A5041001075 @default.
- W2052394161 hasConcept C100460472 @default.
- W2052394161 hasConcept C111919701 @default.
- W2052394161 hasConcept C120665830 @default.
- W2052394161 hasConcept C121332964 @default.
- W2052394161 hasConcept C127313418 @default.
- W2052394161 hasConcept C127413603 @default.
- W2052394161 hasConcept C151730666 @default.
- W2052394161 hasConcept C159985019 @default.
- W2052394161 hasConcept C178790620 @default.
- W2052394161 hasConcept C185592680 @default.
- W2052394161 hasConcept C192562407 @default.
- W2052394161 hasConcept C199360897 @default.
- W2052394161 hasConcept C2779227376 @default.
- W2052394161 hasConcept C2816523 @default.
- W2052394161 hasConcept C41008148 @default.
- W2052394161 hasConcept C44280652 @default.
- W2052394161 hasConcept C49040817 @default.
- W2052394161 hasConcept C64297162 @default.
- W2052394161 hasConcept C78336883 @default.
- W2052394161 hasConcept C78519656 @default.
- W2052394161 hasConcept C9395851 @default.
- W2052394161 hasConcept C98045186 @default.
- W2052394161 hasConceptScore W2052394161C100460472 @default.
- W2052394161 hasConceptScore W2052394161C111919701 @default.
- W2052394161 hasConceptScore W2052394161C120665830 @default.
- W2052394161 hasConceptScore W2052394161C121332964 @default.
- W2052394161 hasConceptScore W2052394161C127313418 @default.
- W2052394161 hasConceptScore W2052394161C127413603 @default.
- W2052394161 hasConceptScore W2052394161C151730666 @default.
- W2052394161 hasConceptScore W2052394161C159985019 @default.
- W2052394161 hasConceptScore W2052394161C178790620 @default.
- W2052394161 hasConceptScore W2052394161C185592680 @default.
- W2052394161 hasConceptScore W2052394161C192562407 @default.
- W2052394161 hasConceptScore W2052394161C199360897 @default.
- W2052394161 hasConceptScore W2052394161C2779227376 @default.
- W2052394161 hasConceptScore W2052394161C2816523 @default.
- W2052394161 hasConceptScore W2052394161C41008148 @default.
- W2052394161 hasConceptScore W2052394161C44280652 @default.
- W2052394161 hasConceptScore W2052394161C49040817 @default.
- W2052394161 hasConceptScore W2052394161C64297162 @default.
- W2052394161 hasConceptScore W2052394161C78336883 @default.
- W2052394161 hasConceptScore W2052394161C78519656 @default.
- W2052394161 hasConceptScore W2052394161C9395851 @default.
- W2052394161 hasConceptScore W2052394161C98045186 @default.
- W2052394161 hasLocation W20523941611 @default.
- W2052394161 hasOpenAccess W2052394161 @default.
- W2052394161 hasPrimaryLocation W20523941611 @default.
- W2052394161 hasRelatedWork W2092474743 @default.
- W2052394161 hasRelatedWork W2139871202 @default.
- W2052394161 hasRelatedWork W2168627890 @default.
- W2052394161 hasRelatedWork W2999542194 @default.
- W2052394161 hasRelatedWork W3117416324 @default.
- W2052394161 hasRelatedWork W4287417083 @default.
- W2052394161 hasRelatedWork W4287501546 @default.
- W2052394161 hasRelatedWork W4306905295 @default.
- W2052394161 hasRelatedWork W4378219124 @default.
- W2052394161 hasRelatedWork W4287479744 @default.
- W2052394161 isParatext "false" @default.
- W2052394161 isRetracted "false" @default.
- W2052394161 magId "2052394161" @default.
- W2052394161 workType "article" @default.