Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052398606> ?p ?o ?g. }
- W2052398606 endingPage "222" @default.
- W2052398606 startingPage "218" @default.
- W2052398606 abstract "In this paper, electrical properties and reliability of high capacitance density Metal–Insulator–Metal (MIM) capacitor with sandwiched hafnium-based dielectric is analyzed using three kinds of voltage stress; constant voltage stress (CVS), unipolar voltage and bipolar voltage stresses. The fabricated MIM capacitor shows not only high capacitance density but also low leakage current density of about ∼10 nA/cm2 at room temperature and 1 V. The relative variation of capacitance (ΔC/C0) increases and the variation of voltage linearity (α/α0) gradually decreases with stress-time due to the charge trapping effect in the high-k dielectric. The relative variations of capacitance and voltage linearity show the greater change by the bipolar voltage stress than CVS and unipolar voltage stresses." @default.
- W2052398606 created "2016-06-24" @default.
- W2052398606 creator A5007622779 @default.
- W2052398606 creator A5008205702 @default.
- W2052398606 creator A5017084934 @default.
- W2052398606 creator A5048727396 @default.
- W2052398606 creator A5062509934 @default.
- W2052398606 creator A5064265202 @default.
- W2052398606 creator A5064365103 @default.
- W2052398606 creator A5067511036 @default.
- W2052398606 creator A5087787543 @default.
- W2052398606 creator A5091905190 @default.
- W2052398606 date "2013-01-01" @default.
- W2052398606 modified "2023-10-18" @default.
- W2052398606 title "Characterization of Al2O3–HfO2–Al2O3 sandwiched MIM capacitor under DC and AC stresses" @default.
- W2052398606 cites W1980958641 @default.
- W2052398606 cites W1984850493 @default.
- W2052398606 cites W1999343861 @default.
- W2052398606 cites W2049555652 @default.
- W2052398606 cites W2114702319 @default.
- W2052398606 cites W2167585671 @default.
- W2052398606 cites W1966094925 @default.
- W2052398606 doi "https://doi.org/10.1016/j.sse.2012.09.007" @default.
- W2052398606 hasPublicationYear "2013" @default.
- W2052398606 type Work @default.
- W2052398606 sameAs 2052398606 @default.
- W2052398606 citedByCount "19" @default.
- W2052398606 countsByYear W20523986062013 @default.
- W2052398606 countsByYear W20523986062014 @default.
- W2052398606 countsByYear W20523986062015 @default.
- W2052398606 countsByYear W20523986062017 @default.
- W2052398606 countsByYear W20523986062018 @default.
- W2052398606 countsByYear W20523986062019 @default.
- W2052398606 countsByYear W20523986062020 @default.
- W2052398606 countsByYear W20523986062021 @default.
- W2052398606 countsByYear W20523986062022 @default.
- W2052398606 countsByYear W20523986062023 @default.
- W2052398606 crossrefType "journal-article" @default.
- W2052398606 hasAuthorship W2052398606A5007622779 @default.
- W2052398606 hasAuthorship W2052398606A5008205702 @default.
- W2052398606 hasAuthorship W2052398606A5017084934 @default.
- W2052398606 hasAuthorship W2052398606A5048727396 @default.
- W2052398606 hasAuthorship W2052398606A5062509934 @default.
- W2052398606 hasAuthorship W2052398606A5064265202 @default.
- W2052398606 hasAuthorship W2052398606A5064365103 @default.
- W2052398606 hasAuthorship W2052398606A5067511036 @default.
- W2052398606 hasAuthorship W2052398606A5087787543 @default.
- W2052398606 hasAuthorship W2052398606A5091905190 @default.
- W2052398606 hasConcept C119599485 @default.
- W2052398606 hasConcept C121332964 @default.
- W2052398606 hasConcept C127413603 @default.
- W2052398606 hasConcept C133386390 @default.
- W2052398606 hasConcept C138885662 @default.
- W2052398606 hasConcept C147789679 @default.
- W2052398606 hasConcept C159985019 @default.
- W2052398606 hasConcept C165801399 @default.
- W2052398606 hasConcept C17525397 @default.
- W2052398606 hasConcept C185592680 @default.
- W2052398606 hasConcept C192562407 @default.
- W2052398606 hasConcept C207740977 @default.
- W2052398606 hasConcept C21036866 @default.
- W2052398606 hasConcept C30066665 @default.
- W2052398606 hasConcept C41895202 @default.
- W2052398606 hasConcept C49040817 @default.
- W2052398606 hasConcept C52192207 @default.
- W2052398606 hasConcept C62520636 @default.
- W2052398606 hasConceptScore W2052398606C119599485 @default.
- W2052398606 hasConceptScore W2052398606C121332964 @default.
- W2052398606 hasConceptScore W2052398606C127413603 @default.
- W2052398606 hasConceptScore W2052398606C133386390 @default.
- W2052398606 hasConceptScore W2052398606C138885662 @default.
- W2052398606 hasConceptScore W2052398606C147789679 @default.
- W2052398606 hasConceptScore W2052398606C159985019 @default.
- W2052398606 hasConceptScore W2052398606C165801399 @default.
- W2052398606 hasConceptScore W2052398606C17525397 @default.
- W2052398606 hasConceptScore W2052398606C185592680 @default.
- W2052398606 hasConceptScore W2052398606C192562407 @default.
- W2052398606 hasConceptScore W2052398606C207740977 @default.
- W2052398606 hasConceptScore W2052398606C21036866 @default.
- W2052398606 hasConceptScore W2052398606C30066665 @default.
- W2052398606 hasConceptScore W2052398606C41895202 @default.
- W2052398606 hasConceptScore W2052398606C49040817 @default.
- W2052398606 hasConceptScore W2052398606C52192207 @default.
- W2052398606 hasConceptScore W2052398606C62520636 @default.
- W2052398606 hasFunder F4320321640 @default.
- W2052398606 hasFunder F4320322064 @default.
- W2052398606 hasFunder F4320334879 @default.
- W2052398606 hasLocation W20523986061 @default.
- W2052398606 hasOpenAccess W2052398606 @default.
- W2052398606 hasPrimaryLocation W20523986061 @default.
- W2052398606 hasRelatedWork W1994753809 @default.
- W2052398606 hasRelatedWork W2018820683 @default.
- W2052398606 hasRelatedWork W2043673973 @default.
- W2052398606 hasRelatedWork W2056911830 @default.
- W2052398606 hasRelatedWork W2143128254 @default.
- W2052398606 hasRelatedWork W2164607314 @default.
- W2052398606 hasRelatedWork W2499271310 @default.
- W2052398606 hasRelatedWork W2888296733 @default.