FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052439749> ?p ?o ?g. }

• W2052439749 endingPage "5836" @default.
• W2052439749 startingPage "5836" @default.
• W2052439749 abstract "In chemically amplified resists for ionizing radiation such as an electron beam and EUV, protons of acids are mainly generated by the deprotonation of base polymers. Therefore, the acid generation efficiency depends highly on polymer structure. In recent resist formulas, partially protected poly(4-hydroxystyrene) has often been used as a base polymer. In this work, the effects of protecting groups on acid generation were investigated. We found differences in acid generation efficiency caused by protecting groups. These differences are likely to affect acid distribution." @default.
• W2052439749 created "2016-06-24" @default.
• W2052439749 creator A5027416023 @default.
• W2052439749 creator A5029201563 @default.
• W2052439749 creator A5037346718 @default.
• W2052439749 creator A5052988906 @default.
• W2052439749 creator A5055649505 @default.
• W2052439749 creator A5067585272 @default.
• W2052439749 creator A5074819917 @default.
• W2052439749 creator A5090399440 @default.
• W2052439749 date "2005-07-01" @default.
• W2052439749 modified "2023-09-26" @default.
• W2052439749 title "Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography" @default.
• W2052439749 cites W1972480914 @default.
• W2052439749 cites W1988017516 @default.
• W2052439749 cites W1998510743 @default.
• W2052439749 cites W2000443839 @default.
• W2052439749 cites W2005412192 @default.
• W2052439749 cites W2007980058 @default.
• W2052439749 cites W2008364194 @default.
• W2052439749 cites W2020324991 @default.
• W2052439749 cites W2031303251 @default.
• W2052439749 cites W2046928760 @default.
• W2052439749 cites W2052371209 @default.
• W2052439749 cites W2053736315 @default.
• W2052439749 cites W2054891739 @default.
• W2052439749 cites W2066740892 @default.
• W2052439749 cites W2070702409 @default.
• W2052439749 cites W2082596330 @default.
• W2052439749 cites W2085444881 @default.
• W2052439749 cites W2089264609 @default.
• W2052439749 cites W2172253633 @default.
• W2052439749 cites W2492066228 @default.
• W2052439749 doi "https://doi.org/10.1143/jjap.44.5836" @default.
• W2052439749 hasPublicationYear "2005" @default.
• W2052439749 type Work @default.
• W2052439749 sameAs 2052439749 @default.
• W2052439749 citedByCount "124" @default.
• W2052439749 countsByYear W20524397492012 @default.
• W2052439749 countsByYear W20524397492013 @default.
• W2052439749 countsByYear W20524397492014 @default.
• W2052439749 countsByYear W20524397492015 @default.
• W2052439749 countsByYear W20524397492016 @default.
• W2052439749 countsByYear W20524397492017 @default.
• W2052439749 countsByYear W20524397492018 @default.
• W2052439749 countsByYear W20524397492019 @default.
• W2052439749 countsByYear W20524397492020 @default.
• W2052439749 countsByYear W20524397492021 @default.
• W2052439749 countsByYear W20524397492022 @default.
• W2052439749 countsByYear W20524397492023 @default.
• W2052439749 crossrefType "journal-article" @default.
• W2052439749 hasAuthorship W2052439749A5027416023 @default.
• W2052439749 hasAuthorship W2052439749A5029201563 @default.
• W2052439749 hasAuthorship W2052439749A5037346718 @default.
• W2052439749 hasAuthorship W2052439749A5052988906 @default.
• W2052439749 hasAuthorship W2052439749A5055649505 @default.
• W2052439749 hasAuthorship W2052439749A5067585272 @default.
• W2052439749 hasAuthorship W2052439749A5074819917 @default.
• W2052439749 hasAuthorship W2052439749A5090399440 @default.
• W2052439749 hasConcept C105487726 @default.
• W2052439749 hasConcept C111337013 @default.
• W2052439749 hasConcept C118629725 @default.
• W2052439749 hasConcept C120665830 @default.
• W2052439749 hasConcept C121332964 @default.
• W2052439749 hasConcept C134306372 @default.
• W2052439749 hasConcept C134406635 @default.
• W2052439749 hasConcept C145148216 @default.
• W2052439749 hasConcept C147120987 @default.
• W2052439749 hasConcept C162996421 @default.
• W2052439749 hasConcept C171250308 @default.
• W2052439749 hasConcept C178790620 @default.
• W2052439749 hasConcept C18231593 @default.
• W2052439749 hasConcept C185544564 @default.
• W2052439749 hasConcept C185592680 @default.
• W2052439749 hasConcept C192562407 @default.
• W2052439749 hasConcept C200274948 @default.
• W2052439749 hasConcept C204223013 @default.
• W2052439749 hasConcept C2779227376 @default.
• W2052439749 hasConcept C33923547 @default.
• W2052439749 hasConcept C42058472 @default.
• W2052439749 hasConcept C49040817 @default.
• W2052439749 hasConcept C521977710 @default.
• W2052439749 hasConcept C53524968 @default.
• W2052439749 hasConcept C62520636 @default.
• W2052439749 hasConcept C75473681 @default.
• W2052439749 hasConcept C95312477 @default.
• W2052439749 hasConceptScore W2052439749C105487726 @default.
• W2052439749 hasConceptScore W2052439749C111337013 @default.
• W2052439749 hasConceptScore W2052439749C118629725 @default.
• W2052439749 hasConceptScore W2052439749C120665830 @default.
• W2052439749 hasConceptScore W2052439749C121332964 @default.
• W2052439749 hasConceptScore W2052439749C134306372 @default.
• W2052439749 hasConceptScore W2052439749C134406635 @default.
• W2052439749 hasConceptScore W2052439749C145148216 @default.
• W2052439749 hasConceptScore W2052439749C147120987 @default.
• W2052439749 hasConceptScore W2052439749C162996421 @default.
• W2052439749 hasConceptScore W2052439749C171250308 @default.
• W2052439749 hasConceptScore W2052439749C178790620 @default.

• next