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- W2052534716 endingPage "179" @default.
- W2052534716 startingPage "173" @default.
- W2052534716 abstract "Two discrete processing techniques have been combined for the doping and silicidation of thin (∼125 nm) amorphous silicon (a-Si) film. One technique uses an implantation barrier consisting of a stack of low temperature cobalt silicide (CoSi) and a-Si. The other technique incorporates nitrogen (N2+) to suppress CoSi2 agglomeration. When combined, the implantation barriers consisting of the CoSi/a-Si stack or a-Si films reduce boron penetration in p-channel metal–oxide–semiconductor devices and the implanted N2+ hinders cobalt silicide agglomeration. The two processing approaches presented here differ only in the implantation sequence. TRIM (transport of ions in matter) simulation has been used to predetermine the approximate doses and energies of implantation species. Sheet resistances are measured to assess the silicide thickness and quality of the resulting films. Depth profiles for boron, nitrogen, fluorine and cobalt have been extracted analytically by secondary ion mass spectroscopy. Transmission electron microscopy micrographs have been included to show the silicide/Si interface and also to manifest that there is no grain boundary grooving in the resulting cobalt silicide film." @default.
- W2052534716 created "2016-06-24" @default.
- W2052534716 creator A5040898441 @default.
- W2052534716 creator A5073096292 @default.
- W2052534716 creator A5087138037 @default.
- W2052534716 date "2002-01-01" @default.
- W2052534716 modified "2023-09-24" @default.
- W2052534716 title "Suppressing boron penetration and cobalt silicide agglomeration in deep submicron <i>p</i>-channel metal–oxide–semiconductor devices" @default.
- W2052534716 cites W1965843124 @default.
- W2052534716 cites W2020934603 @default.
- W2052534716 cites W2032554851 @default.
- W2052534716 cites W2034967595 @default.
- W2052534716 cites W2064227813 @default.
- W2052534716 cites W2097583414 @default.
- W2052534716 cites W2105486815 @default.
- W2052534716 cites W2121937736 @default.
- W2052534716 doi "https://doi.org/10.1116/1.1431960" @default.
- W2052534716 hasPublicationYear "2002" @default.
- W2052534716 type Work @default.
- W2052534716 sameAs 2052534716 @default.
- W2052534716 citedByCount "6" @default.
- W2052534716 crossrefType "journal-article" @default.
- W2052534716 hasAuthorship W2052534716A5040898441 @default.
- W2052534716 hasAuthorship W2052534716A5073096292 @default.
- W2052534716 hasAuthorship W2052534716A5087138037 @default.
- W2052534716 hasConcept C113196181 @default.
- W2052534716 hasConcept C145148216 @default.
- W2052534716 hasConcept C146088050 @default.
- W2052534716 hasConcept C171250308 @default.
- W2052534716 hasConcept C178790620 @default.
- W2052534716 hasConcept C185592680 @default.
- W2052534716 hasConcept C191897082 @default.
- W2052534716 hasConcept C192562407 @default.
- W2052534716 hasConcept C2780901251 @default.
- W2052534716 hasConcept C41823505 @default.
- W2052534716 hasConcept C43617362 @default.
- W2052534716 hasConcept C49040817 @default.
- W2052534716 hasConcept C501308230 @default.
- W2052534716 hasConcept C515602321 @default.
- W2052534716 hasConcept C544956773 @default.
- W2052534716 hasConcept C56052488 @default.
- W2052534716 hasConcept C8010536 @default.
- W2052534716 hasConceptScore W2052534716C113196181 @default.
- W2052534716 hasConceptScore W2052534716C145148216 @default.
- W2052534716 hasConceptScore W2052534716C146088050 @default.
- W2052534716 hasConceptScore W2052534716C171250308 @default.
- W2052534716 hasConceptScore W2052534716C178790620 @default.
- W2052534716 hasConceptScore W2052534716C185592680 @default.
- W2052534716 hasConceptScore W2052534716C191897082 @default.
- W2052534716 hasConceptScore W2052534716C192562407 @default.
- W2052534716 hasConceptScore W2052534716C2780901251 @default.
- W2052534716 hasConceptScore W2052534716C41823505 @default.
- W2052534716 hasConceptScore W2052534716C43617362 @default.
- W2052534716 hasConceptScore W2052534716C49040817 @default.
- W2052534716 hasConceptScore W2052534716C501308230 @default.
- W2052534716 hasConceptScore W2052534716C515602321 @default.
- W2052534716 hasConceptScore W2052534716C544956773 @default.
- W2052534716 hasConceptScore W2052534716C56052488 @default.
- W2052534716 hasConceptScore W2052534716C8010536 @default.
- W2052534716 hasIssue "1" @default.
- W2052534716 hasLocation W20525347161 @default.
- W2052534716 hasOpenAccess W2052534716 @default.
- W2052534716 hasPrimaryLocation W20525347161 @default.
- W2052534716 hasRelatedWork W1969571489 @default.
- W2052534716 hasRelatedWork W1975241318 @default.
- W2052534716 hasRelatedWork W1977974829 @default.
- W2052534716 hasRelatedWork W1996331863 @default.
- W2052534716 hasRelatedWork W1997428111 @default.
- W2052534716 hasRelatedWork W2038218317 @default.
- W2052534716 hasRelatedWork W2055576728 @default.
- W2052534716 hasRelatedWork W2065669148 @default.
- W2052534716 hasRelatedWork W2116551487 @default.
- W2052534716 hasRelatedWork W2275386326 @default.
- W2052534716 hasVolume "20" @default.
- W2052534716 isParatext "false" @default.
- W2052534716 isRetracted "false" @default.
- W2052534716 magId "2052534716" @default.
- W2052534716 workType "article" @default.