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- W2052581494 abstract "The structure of the transient region in various SiSiO2 systems was investigated using secondary ion mass spectrometry and metal microscopy methods. According to the experimental data, high temperature oxidation causes the Si and SiO2 boundary regions to saturate with various specific defects. The results are discussed on the basis of the “three-layer model” of the Si-SiO2 interface." @default.
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- W2052581494 title "Some properties of the structure of the SiSiO2 interface" @default.
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- W2052581494 doi "https://doi.org/10.1016/0040-6090(77)90436-9" @default.
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