Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052585003> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2052585003 abstract "Low K1 photolithography process increases the complexity of RET applications in IC designs. As technology node shrinks, pattern density is much denser along with much smaller geometry dimensions. Model-based OPC (Optical Proximity Correction) and post-OPC verification require more complex models and through process window compensated approaches, which significantly increase computational burden. Both lithographical challenges and computational complexity associated with 45nm process and below create a need for advanced capabilities on commercial OPC tools. To answer those challenges, hardware-accelerated OPC solution made a debut to solve runtime bottleneck issues, but they came in with very expensive price tags. As today, there are no explorations on the linkage between design styles and layout pattern OPC reusability. This paper introduces a new OPC flow with pattern-centric approach to leverage OPC knowledge of repeated design cells and patterns to achieve fast full chip OPC convergence, shorter cycle time, better OPC quality, and eventually lead to high manufacturing yields. In this paper, the main concepts of pattern-based OPC flow are demonstrated in 65nm customer memory designs. Pattern-based OPC is a natural extension of Anchor's pattern-centric approaches in DFM (Design for Manufacturing) domain." @default.
- W2052585003 created "2016-06-24" @default.
- W2052585003 creator A5007011393 @default.
- W2052585003 creator A5028339209 @default.
- W2052585003 creator A5030132688 @default.
- W2052585003 creator A5041070353 @default.
- W2052585003 creator A5052547218 @default.
- W2052585003 creator A5077274385 @default.
- W2052585003 creator A5083902642 @default.
- W2052585003 date "2008-03-14" @default.
- W2052585003 modified "2023-10-16" @default.
- W2052585003 title "Pattern centric OPC flow: a special RET flow with fast turn-around-time" @default.
- W2052585003 doi "https://doi.org/10.1117/12.771617" @default.
- W2052585003 hasPublicationYear "2008" @default.
- W2052585003 type Work @default.
- W2052585003 sameAs 2052585003 @default.
- W2052585003 citedByCount "2" @default.
- W2052585003 countsByYear W20525850032014 @default.
- W2052585003 countsByYear W20525850032023 @default.
- W2052585003 crossrefType "proceedings-article" @default.
- W2052585003 hasAuthorship W2052585003A5007011393 @default.
- W2052585003 hasAuthorship W2052585003A5028339209 @default.
- W2052585003 hasAuthorship W2052585003A5030132688 @default.
- W2052585003 hasAuthorship W2052585003A5041070353 @default.
- W2052585003 hasAuthorship W2052585003A5052547218 @default.
- W2052585003 hasAuthorship W2052585003A5077274385 @default.
- W2052585003 hasAuthorship W2052585003A5083902642 @default.
- W2052585003 hasConcept C105487726 @default.
- W2052585003 hasConcept C111919701 @default.
- W2052585003 hasConcept C120665830 @default.
- W2052585003 hasConcept C121332964 @default.
- W2052585003 hasConcept C127413603 @default.
- W2052585003 hasConcept C149635348 @default.
- W2052585003 hasConcept C153083717 @default.
- W2052585003 hasConcept C154945302 @default.
- W2052585003 hasConcept C2777441419 @default.
- W2052585003 hasConcept C2780513914 @default.
- W2052585003 hasConcept C37135326 @default.
- W2052585003 hasConcept C41008148 @default.
- W2052585003 hasConcept C62064638 @default.
- W2052585003 hasConcept C78371743 @default.
- W2052585003 hasConcept C78519656 @default.
- W2052585003 hasConcept C98045186 @default.
- W2052585003 hasConceptScore W2052585003C105487726 @default.
- W2052585003 hasConceptScore W2052585003C111919701 @default.
- W2052585003 hasConceptScore W2052585003C120665830 @default.
- W2052585003 hasConceptScore W2052585003C121332964 @default.
- W2052585003 hasConceptScore W2052585003C127413603 @default.
- W2052585003 hasConceptScore W2052585003C149635348 @default.
- W2052585003 hasConceptScore W2052585003C153083717 @default.
- W2052585003 hasConceptScore W2052585003C154945302 @default.
- W2052585003 hasConceptScore W2052585003C2777441419 @default.
- W2052585003 hasConceptScore W2052585003C2780513914 @default.
- W2052585003 hasConceptScore W2052585003C37135326 @default.
- W2052585003 hasConceptScore W2052585003C41008148 @default.
- W2052585003 hasConceptScore W2052585003C62064638 @default.
- W2052585003 hasConceptScore W2052585003C78371743 @default.
- W2052585003 hasConceptScore W2052585003C78519656 @default.
- W2052585003 hasConceptScore W2052585003C98045186 @default.
- W2052585003 hasLocation W20525850031 @default.
- W2052585003 hasOpenAccess W2052585003 @default.
- W2052585003 hasPrimaryLocation W20525850031 @default.
- W2052585003 hasRelatedWork W1976886430 @default.
- W2052585003 hasRelatedWork W2010629547 @default.
- W2052585003 hasRelatedWork W2011545406 @default.
- W2052585003 hasRelatedWork W2014356485 @default.
- W2052585003 hasRelatedWork W2030416656 @default.
- W2052585003 hasRelatedWork W2052043070 @default.
- W2052585003 hasRelatedWork W2052585003 @default.
- W2052585003 hasRelatedWork W2068273844 @default.
- W2052585003 hasRelatedWork W2132908453 @default.
- W2052585003 hasRelatedWork W2244185694 @default.
- W2052585003 isParatext "false" @default.
- W2052585003 isRetracted "false" @default.
- W2052585003 magId "2052585003" @default.
- W2052585003 workType "article" @default.