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- W2052595391 abstract "Arsenic ions were implanted into Si and SiO 2 over a wide energy range (10 keV–2.56 MeV). Implantation profiles were precisely measured by the normal and glancing angle Rutherford backscattering method. They are closely approximated by joined half-Gaussian distributions. For Si, the experimental R p and Δ R p values are systematically ∼15% and ∼30% larger than the LSS calculation values over the present full implantation energy range of 10 keV–2.56 MeV. For SiO 2 the experimental R p and Δ R p values are systematically 20–30% and 40–50% larger over the same implantation energy range. The experimental third-moment, µ p , is positive below ∼500 keV, and is negative above ∼500 keV implantation energy, for both Si and SiO 2 ." @default.
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- W2052595391 date "1982-09-01" @default.
- W2052595391 modified "2023-09-24" @default.
- W2052595391 title "Precise Profiles for Arsenic Implanted in Si and SiO<sub>2</sub> over a Wide Implantation Energy Range (10 keV–2.56 MeV)" @default.
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- W2052595391 doi "https://doi.org/10.1143/jjap.21.1363" @default.
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