Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052602605> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2052602605 abstract "The introduction of lithographic systems with NA=1.35 has enabled the extension of optical lithography to 45 nm and below. At the same time, despite the larger NA, k1-factors have dropped to 0.3 and below. Defining the appropriate strategies for these high-end lithographic processes requires the integration and co-optimization of the design, mask and imaging parameters. This requires an in-depth understanding of the relevant parameters for imaging performance during high volume manufacturing. Besides the Critical Dimension Uniformity (CDU) budget for the baseline lithographic system, it is crucial to realize that system performance may vary over time in volume manufacturing. In this paper the CDU budget will be restated, with all the well-known contributors, and extended with some new terms, such as volume manufacturing effects. Experimental low-k1 results will be shown from NA=1.35 lithographic tools and compared to model-based predictions under realistic volume manufacturing circumstances. The combination of extreme NA and low k1 makes it necessary to introduce computational lithography for scanner optimization. The potential of using LithoCruiser<sup>TM</sup> and Tachyon<sup>TM</sup> for optimising scanner source and OPC will be described. Also, using the fast scanner correction mechanisms to compensate for reticle, track and etch fingerprints and variations will be discussed." @default.
- W2052602605 created "2016-06-24" @default.
- W2052602605 creator A5001991320 @default.
- W2052602605 creator A5018977073 @default.
- W2052602605 creator A5034680928 @default.
- W2052602605 creator A5046116183 @default.
- W2052602605 creator A5054051323 @default.
- W2052602605 creator A5054844644 @default.
- W2052602605 creator A5059163594 @default.
- W2052602605 creator A5073523730 @default.
- W2052602605 date "2008-03-14" @default.
- W2052602605 modified "2023-09-23" @default.
- W2052602605 title "Imaging performance optimization for hyper-NA scanner systems in high volume production" @default.
- W2052602605 cites W2092422363 @default.
- W2052602605 cites W2098330390 @default.
- W2052602605 cites W2082277420 @default.
- W2052602605 doi "https://doi.org/10.1117/12.773260" @default.
- W2052602605 hasPublicationYear "2008" @default.
- W2052602605 type Work @default.
- W2052602605 sameAs 2052602605 @default.
- W2052602605 citedByCount "3" @default.
- W2052602605 countsByYear W20526026052013 @default.
- W2052602605 crossrefType "proceedings-article" @default.
- W2052602605 hasAuthorship W2052602605A5001991320 @default.
- W2052602605 hasAuthorship W2052602605A5018977073 @default.
- W2052602605 hasAuthorship W2052602605A5034680928 @default.
- W2052602605 hasAuthorship W2052602605A5046116183 @default.
- W2052602605 hasAuthorship W2052602605A5054051323 @default.
- W2052602605 hasAuthorship W2052602605A5054844644 @default.
- W2052602605 hasAuthorship W2052602605A5059163594 @default.
- W2052602605 hasAuthorship W2052602605A5073523730 @default.
- W2052602605 hasConcept C105487726 @default.
- W2052602605 hasConcept C120665830 @default.
- W2052602605 hasConcept C121332964 @default.
- W2052602605 hasConcept C146617872 @default.
- W2052602605 hasConcept C154945302 @default.
- W2052602605 hasConcept C160671074 @default.
- W2052602605 hasConcept C162996421 @default.
- W2052602605 hasConcept C192562407 @default.
- W2052602605 hasConcept C204223013 @default.
- W2052602605 hasConcept C20556612 @default.
- W2052602605 hasConcept C207789793 @default.
- W2052602605 hasConcept C2779751349 @default.
- W2052602605 hasConcept C41008148 @default.
- W2052602605 hasConcept C49040817 @default.
- W2052602605 hasConcept C62520636 @default.
- W2052602605 hasConceptScore W2052602605C105487726 @default.
- W2052602605 hasConceptScore W2052602605C120665830 @default.
- W2052602605 hasConceptScore W2052602605C121332964 @default.
- W2052602605 hasConceptScore W2052602605C146617872 @default.
- W2052602605 hasConceptScore W2052602605C154945302 @default.
- W2052602605 hasConceptScore W2052602605C160671074 @default.
- W2052602605 hasConceptScore W2052602605C162996421 @default.
- W2052602605 hasConceptScore W2052602605C192562407 @default.
- W2052602605 hasConceptScore W2052602605C204223013 @default.
- W2052602605 hasConceptScore W2052602605C20556612 @default.
- W2052602605 hasConceptScore W2052602605C207789793 @default.
- W2052602605 hasConceptScore W2052602605C2779751349 @default.
- W2052602605 hasConceptScore W2052602605C41008148 @default.
- W2052602605 hasConceptScore W2052602605C49040817 @default.
- W2052602605 hasConceptScore W2052602605C62520636 @default.
- W2052602605 hasLocation W20526026051 @default.
- W2052602605 hasOpenAccess W2052602605 @default.
- W2052602605 hasPrimaryLocation W20526026051 @default.
- W2052602605 hasRelatedWork W1226996237 @default.
- W2052602605 hasRelatedWork W1982885514 @default.
- W2052602605 hasRelatedWork W2000766035 @default.
- W2052602605 hasRelatedWork W2050243074 @default.
- W2052602605 hasRelatedWork W2063782820 @default.
- W2052602605 hasRelatedWork W2065128404 @default.
- W2052602605 hasRelatedWork W2081221563 @default.
- W2052602605 hasRelatedWork W2103495656 @default.
- W2052602605 hasRelatedWork W2921363324 @default.
- W2052602605 hasRelatedWork W4299592249 @default.
- W2052602605 isParatext "false" @default.
- W2052602605 isRetracted "false" @default.
- W2052602605 magId "2052602605" @default.
- W2052602605 workType "article" @default.