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• W2052649239 startingPage "9240" @default.
• W2052649239 abstract "The Y₂O₃ films grown with a new and heteroleptic liquid Y precursor, (iPrCp)₂Y(iPr-amd), have been investigated with chemical properties of precursor, atomic layer deposition process, and material characterization of the deposited film and its non-volatile resistive switching behaviour." @default.
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• W2052649239 date "2014-01-01" @default.
• W2052649239 modified "2023-10-03" @default.
• W2052649239 title "Atomic layer deposition of Y₂O₃ films using heteroleptic liquid (iPrCp)₂Y(iPr-amd) precursor" @default.
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• W2052649239 doi "https://doi.org/10.1039/c4tc01405g" @default.
• W2052649239 hasPublicationYear "2014" @default.
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