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• W2052673264 abstract "A micro scratch device for testing very thin optical and electronic coatings is presented. Owing to a down-scaled diamond indenter tip radius (2 μm) and appropriate load range, coating and interface specific strength data can be assessed. Two case studies are presented: the first on the influence of the interface quality of W coatings on silicon wafers as modified by ion-beam techniques (post-implantation and ion-beam assisted deposition); the second on the influence of substrate nature and surface cleaning of flat glass prior to deposition of a magnetron sputtered Ni–Cr PVD coating." @default.
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• W2052673264 date "1997-12-01" @default.
• W2052673264 modified "2023-09-25" @default.
• W2052673264 title "Mechanical strength assessment of very thin films for optical and electronic applications" @default.
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• W2052673264 doi "https://doi.org/10.1016/s0257-8972(97)00136-9" @default.
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