Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052821803> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2052821803 endingPage "697" @default.
- W2052821803 startingPage "693" @default.
- W2052821803 abstract "Abstract Photoluminescence (PL) properties of 500 nm thick SiO 2 films on Si substrate subjected to combined Ge–Si implantations have been studied: Sequentially 400 keV Ge + and 200 keV Si + ions were implanted into SiO 2 to concentrations of 3% and 1–10%, respectively. As calculated using the SRIM 2000 code, under these conditions depth profiles of implanted species should be contained in the region 100–400 nm below the oxide surface. After the implantation, samples were annealed at temperatures ranging from 700 to 1100 °C, in order to obtain Si and Ge nanoclusters. A weak near UV luminescence peak at a wavelength of about 315 nm, a strong blue band at 400 nm and a near-infrared 780 nm band were observed for thus prepared samples. The optical emission was stable and reproducible. Diffusion of germanium towards the Si/SiO 2 interface during the annealing process is suppressed by silicon ions additionally introduced into SiO 2 ." @default.
- W2052821803 created "2016-06-24" @default.
- W2052821803 creator A5023172531 @default.
- W2052821803 creator A5029304187 @default.
- W2052821803 creator A5030787679 @default.
- W2052821803 creator A5061659102 @default.
- W2052821803 creator A5082085569 @default.
- W2052821803 creator A5089209524 @default.
- W2052821803 date "2005-05-01" @default.
- W2052821803 modified "2023-10-17" @default.
- W2052821803 title "Optical and microstructural properties of doubly Ge–Si implanted SiO2 layers" @default.
- W2052821803 cites W1670149734 @default.
- W2052821803 cites W1967170800 @default.
- W2052821803 cites W1971391795 @default.
- W2052821803 cites W1980007845 @default.
- W2052821803 cites W1987643790 @default.
- W2052821803 cites W1997182640 @default.
- W2052821803 cites W2004189602 @default.
- W2052821803 cites W2030972633 @default.
- W2052821803 cites W2036761992 @default.
- W2052821803 cites W2037302421 @default.
- W2052821803 cites W2069025990 @default.
- W2052821803 cites W2069056878 @default.
- W2052821803 cites W2076953109 @default.
- W2052821803 cites W2116685199 @default.
- W2052821803 cites W2168286050 @default.
- W2052821803 doi "https://doi.org/10.1016/j.vacuum.2005.01.108" @default.
- W2052821803 hasPublicationYear "2005" @default.
- W2052821803 type Work @default.
- W2052821803 sameAs 2052821803 @default.
- W2052821803 citedByCount "5" @default.
- W2052821803 countsByYear W20528218032017 @default.
- W2052821803 countsByYear W20528218032022 @default.
- W2052821803 crossrefType "journal-article" @default.
- W2052821803 hasAuthorship W2052821803A5023172531 @default.
- W2052821803 hasAuthorship W2052821803A5029304187 @default.
- W2052821803 hasAuthorship W2052821803A5030787679 @default.
- W2052821803 hasAuthorship W2052821803A5061659102 @default.
- W2052821803 hasAuthorship W2052821803A5082085569 @default.
- W2052821803 hasAuthorship W2052821803A5089209524 @default.
- W2052821803 hasConcept C185592680 @default.
- W2052821803 hasConcept C192562407 @default.
- W2052821803 hasConcept C49040817 @default.
- W2052821803 hasConcept C544956773 @default.
- W2052821803 hasConcept C550623735 @default.
- W2052821803 hasConcept C8010536 @default.
- W2052821803 hasConceptScore W2052821803C185592680 @default.
- W2052821803 hasConceptScore W2052821803C192562407 @default.
- W2052821803 hasConceptScore W2052821803C49040817 @default.
- W2052821803 hasConceptScore W2052821803C544956773 @default.
- W2052821803 hasConceptScore W2052821803C550623735 @default.
- W2052821803 hasConceptScore W2052821803C8010536 @default.
- W2052821803 hasIssue "2-4" @default.
- W2052821803 hasLocation W20528218031 @default.
- W2052821803 hasOpenAccess W2052821803 @default.
- W2052821803 hasPrimaryLocation W20528218031 @default.
- W2052821803 hasRelatedWork W1965536737 @default.
- W2052821803 hasRelatedWork W1981231057 @default.
- W2052821803 hasRelatedWork W2031925471 @default.
- W2052821803 hasRelatedWork W2061025206 @default.
- W2052821803 hasRelatedWork W2111278212 @default.
- W2052821803 hasRelatedWork W2281450668 @default.
- W2052821803 hasRelatedWork W2764234652 @default.
- W2052821803 hasRelatedWork W3034239317 @default.
- W2052821803 hasRelatedWork W4232127046 @default.
- W2052821803 hasRelatedWork W968834859 @default.
- W2052821803 hasVolume "78" @default.
- W2052821803 isParatext "false" @default.
- W2052821803 isRetracted "false" @default.
- W2052821803 magId "2052821803" @default.
- W2052821803 workType "article" @default.