Matches in SemOpenAlex for { <https://semopenalex.org/work/W2052857025> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2052857025 abstract "Inverse Lithography Technology (ILT) is a rigorous approach to determine the mask shapes that produce the desired on-wafer results. In this paper, we briefly describe an image (or pixel))-based implementation of ILT in comparison to OPC technologies, which are usually edge-based. Such implementation is more computationally scalable and avoids laborious segmentation script-writing, which becomes more complex for newer generations because of complicated proximity effects. In this paper, we will give an overview of ILT, present some simulation and wafer examples to demonstrate the benefit of ILT, clarify common myths about ILT, discuss and show examples to illustrate the impact in every step of the mask making process. Specifically, studies done with several leading mask shops around the world on mask manufacturability (including data fracturing, writing strategy and writing time, mask inspection), will be shown." @default.
- W2052857025 created "2016-06-24" @default.
- W2052857025 creator A5004759804 @default.
- W2052857025 creator A5024516963 @default.
- W2052857025 creator A5033080900 @default.
- W2052857025 date "2006-05-04" @default.
- W2052857025 modified "2023-10-17" @default.
- W2052857025 title "Inverse Lithography Technology (ILT): what is the impact to the photomask industry?" @default.
- W2052857025 cites W1969331122 @default.
- W2052857025 cites W1987478948 @default.
- W2052857025 cites W1994750917 @default.
- W2052857025 cites W1998745808 @default.
- W2052857025 cites W2017521492 @default.
- W2052857025 cites W2021247129 @default.
- W2052857025 cites W2040861835 @default.
- W2052857025 cites W2057733951 @default.
- W2052857025 cites W2060407771 @default.
- W2052857025 cites W2064178188 @default.
- W2052857025 cites W2098485818 @default.
- W2052857025 cites W2145008084 @default.
- W2052857025 cites W1983832894 @default.
- W2052857025 doi "https://doi.org/10.1117/12.681857" @default.
- W2052857025 hasPublicationYear "2006" @default.
- W2052857025 type Work @default.
- W2052857025 sameAs 2052857025 @default.
- W2052857025 citedByCount "52" @default.
- W2052857025 countsByYear W20528570252013 @default.
- W2052857025 countsByYear W20528570252014 @default.
- W2052857025 countsByYear W20528570252015 @default.
- W2052857025 countsByYear W20528570252016 @default.
- W2052857025 countsByYear W20528570252017 @default.
- W2052857025 countsByYear W20528570252018 @default.
- W2052857025 countsByYear W20528570252019 @default.
- W2052857025 countsByYear W20528570252021 @default.
- W2052857025 countsByYear W20528570252023 @default.
- W2052857025 crossrefType "proceedings-article" @default.
- W2052857025 hasAuthorship W2052857025A5004759804 @default.
- W2052857025 hasAuthorship W2052857025A5024516963 @default.
- W2052857025 hasAuthorship W2052857025A5033080900 @default.
- W2052857025 hasConcept C111919701 @default.
- W2052857025 hasConcept C127413603 @default.
- W2052857025 hasConcept C146617872 @default.
- W2052857025 hasConcept C14737013 @default.
- W2052857025 hasConcept C160671074 @default.
- W2052857025 hasConcept C171250308 @default.
- W2052857025 hasConcept C192562407 @default.
- W2052857025 hasConcept C204223013 @default.
- W2052857025 hasConcept C2779227376 @default.
- W2052857025 hasConcept C41008148 @default.
- W2052857025 hasConcept C48044578 @default.
- W2052857025 hasConcept C49040817 @default.
- W2052857025 hasConcept C53524968 @default.
- W2052857025 hasConcept C62064638 @default.
- W2052857025 hasConcept C77088390 @default.
- W2052857025 hasConcept C78371743 @default.
- W2052857025 hasConcept C78519656 @default.
- W2052857025 hasConcept C98045186 @default.
- W2052857025 hasConceptScore W2052857025C111919701 @default.
- W2052857025 hasConceptScore W2052857025C127413603 @default.
- W2052857025 hasConceptScore W2052857025C146617872 @default.
- W2052857025 hasConceptScore W2052857025C14737013 @default.
- W2052857025 hasConceptScore W2052857025C160671074 @default.
- W2052857025 hasConceptScore W2052857025C171250308 @default.
- W2052857025 hasConceptScore W2052857025C192562407 @default.
- W2052857025 hasConceptScore W2052857025C204223013 @default.
- W2052857025 hasConceptScore W2052857025C2779227376 @default.
- W2052857025 hasConceptScore W2052857025C41008148 @default.
- W2052857025 hasConceptScore W2052857025C48044578 @default.
- W2052857025 hasConceptScore W2052857025C49040817 @default.
- W2052857025 hasConceptScore W2052857025C53524968 @default.
- W2052857025 hasConceptScore W2052857025C62064638 @default.
- W2052857025 hasConceptScore W2052857025C77088390 @default.
- W2052857025 hasConceptScore W2052857025C78371743 @default.
- W2052857025 hasConceptScore W2052857025C78519656 @default.
- W2052857025 hasConceptScore W2052857025C98045186 @default.
- W2052857025 hasLocation W20528570251 @default.
- W2052857025 hasOpenAccess W2052857025 @default.
- W2052857025 hasPrimaryLocation W20528570251 @default.
- W2052857025 hasRelatedWork W1969331122 @default.
- W2052857025 hasRelatedWork W1989677737 @default.
- W2052857025 hasRelatedWork W1990862069 @default.
- W2052857025 hasRelatedWork W2013594656 @default.
- W2052857025 hasRelatedWork W2015968486 @default.
- W2052857025 hasRelatedWork W2023212528 @default.
- W2052857025 hasRelatedWork W2060589488 @default.
- W2052857025 hasRelatedWork W2068691156 @default.
- W2052857025 hasRelatedWork W2079787243 @default.
- W2052857025 hasRelatedWork W2080647156 @default.
- W2052857025 isParatext "false" @default.
- W2052857025 isRetracted "false" @default.
- W2052857025 magId "2052857025" @default.
- W2052857025 workType "article" @default.