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- W2052919005 endingPage "115009" @default.
- W2052919005 startingPage "115009" @default.
- W2052919005 abstract "A micromachining process for a conductive microtip electrode array has been developed using a combination process of reactive ion etching. A localized conical ultra-micro electrode (UME) with submicron width is realized on the tip end for electrochemical measurements. A height of several tens of microns of the silicon microtip is achieved, and the area beyond the UME is covered with dielectric material for electrical insulation. A high-aspect-ratio silicon microtip is fabricated using anisotropic and isotropic etching with varying the gap and diameter of the etch masks. Cyclic voltammetry is conducted to characterize the electrochemical properties of the UMEs. The results indicate that the electrical connection on the UME works successfully, and the measured peak currents were found to be in good agreement with the values estimated from analysis based on conical UME theory." @default.
- W2052919005 created "2016-06-24" @default.
- W2052919005 creator A5018433948 @default.
- W2052919005 creator A5063764815 @default.
- W2052919005 creator A5066486369 @default.
- W2052919005 creator A5083760530 @default.
- W2052919005 creator A5087358018 @default.
- W2052919005 date "2013-10-09" @default.
- W2052919005 modified "2023-09-27" @default.
- W2052919005 title "Conductive microtip electrode array with variable aspect ratio using combination process of reactive ion etching" @default.
- W2052919005 cites W1807577481 @default.
- W2052919005 cites W1980188152 @default.
- W2052919005 cites W1990831804 @default.
- W2052919005 cites W2017388210 @default.
- W2052919005 cites W2028558565 @default.
- W2052919005 cites W2065610457 @default.
- W2052919005 cites W2099759056 @default.
- W2052919005 cites W2104077037 @default.
- W2052919005 cites W2107611005 @default.
- W2052919005 cites W2111937020 @default.
- W2052919005 cites W2116092910 @default.
- W2052919005 cites W2117631851 @default.
- W2052919005 cites W2142255743 @default.
- W2052919005 cites W2317637631 @default.
- W2052919005 doi "https://doi.org/10.1088/0960-1317/23/11/115009" @default.
- W2052919005 hasPublicationYear "2013" @default.
- W2052919005 type Work @default.
- W2052919005 sameAs 2052919005 @default.
- W2052919005 citedByCount "5" @default.
- W2052919005 countsByYear W20529190052015 @default.
- W2052919005 countsByYear W20529190052017 @default.
- W2052919005 countsByYear W20529190052018 @default.
- W2052919005 countsByYear W20529190052019 @default.
- W2052919005 crossrefType "journal-article" @default.
- W2052919005 hasAuthorship W2052919005A5018433948 @default.
- W2052919005 hasAuthorship W2052919005A5063764815 @default.
- W2052919005 hasAuthorship W2052919005A5066486369 @default.
- W2052919005 hasAuthorship W2052919005A5083760530 @default.
- W2052919005 hasAuthorship W2052919005A5087358018 @default.
- W2052919005 hasConcept C100460472 @default.
- W2052919005 hasConcept C130472188 @default.
- W2052919005 hasConcept C147789679 @default.
- W2052919005 hasConcept C159985019 @default.
- W2052919005 hasConcept C171250308 @default.
- W2052919005 hasConcept C17525397 @default.
- W2052919005 hasConcept C185592680 @default.
- W2052919005 hasConcept C192562407 @default.
- W2052919005 hasConcept C202374169 @default.
- W2052919005 hasConcept C2779227376 @default.
- W2052919005 hasConcept C49040817 @default.
- W2052919005 hasConcept C82558694 @default.
- W2052919005 hasConcept C97562148 @default.
- W2052919005 hasConceptScore W2052919005C100460472 @default.
- W2052919005 hasConceptScore W2052919005C130472188 @default.
- W2052919005 hasConceptScore W2052919005C147789679 @default.
- W2052919005 hasConceptScore W2052919005C159985019 @default.
- W2052919005 hasConceptScore W2052919005C171250308 @default.
- W2052919005 hasConceptScore W2052919005C17525397 @default.
- W2052919005 hasConceptScore W2052919005C185592680 @default.
- W2052919005 hasConceptScore W2052919005C192562407 @default.
- W2052919005 hasConceptScore W2052919005C202374169 @default.
- W2052919005 hasConceptScore W2052919005C2779227376 @default.
- W2052919005 hasConceptScore W2052919005C49040817 @default.
- W2052919005 hasConceptScore W2052919005C82558694 @default.
- W2052919005 hasConceptScore W2052919005C97562148 @default.
- W2052919005 hasIssue "11" @default.
- W2052919005 hasLocation W20529190051 @default.
- W2052919005 hasOpenAccess W2052919005 @default.
- W2052919005 hasPrimaryLocation W20529190051 @default.
- W2052919005 hasRelatedWork W1975397998 @default.
- W2052919005 hasRelatedWork W1983676159 @default.
- W2052919005 hasRelatedWork W2080558689 @default.
- W2052919005 hasRelatedWork W2089083175 @default.
- W2052919005 hasRelatedWork W2090145384 @default.
- W2052919005 hasRelatedWork W2159045337 @default.
- W2052919005 hasRelatedWork W2595714457 @default.
- W2052919005 hasRelatedWork W2757490705 @default.
- W2052919005 hasRelatedWork W2923172560 @default.
- W2052919005 hasRelatedWork W3131453532 @default.
- W2052919005 hasVolume "23" @default.
- W2052919005 isParatext "false" @default.
- W2052919005 isRetracted "false" @default.
- W2052919005 magId "2052919005" @default.
- W2052919005 workType "article" @default.