Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053007071> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2053007071 abstract "In this work, large area uniform hydrogen-free DLC films have been deposited at room temperature by KrF pulsed laserablation with the technique-Computer Controlled Substrate Scanning under High Vacuum Condition. Raman analysis of thefilms gave a broad Raman peak centered at 1545cmt. The films exhibited a thickness variation less than within thearea of 66x70mm2. Microhardness test showed that the films had a mechanical hardness up to 27GPa with the variation lessthan within the same film. Film adhesion strength test indicated that the films deposited on silicon substrate had anexcellent adhesion strength up to 2x lO r at the rotary speed of 300 r.p.m. In discussion, scanning speed of the substrate issupposed to be an important factor with the uniformity ofthe film. As to adhesion strength ofDLC films, the energy of theparticles deposited on the substrate is supposed to be the most important factor in addition to routine treatment. Gettingparticles with high energy and small size should be a feasible way to greatly improve the adhesion strength of DLC filmwith different substrates.Keywords: Diamond-like carbon, Pulsed laser deposition, Substrate scanning" @default.
- W2053007071 created "2016-06-24" @default.
- W2053007071 creator A5011500599 @default.
- W2053007071 creator A5043157731 @default.
- W2053007071 creator A5050563694 @default.
- W2053007071 creator A5085642805 @default.
- W2053007071 creator A5088035392 @default.
- W2053007071 date "1999-09-08" @default.
- W2053007071 modified "2023-09-23" @default.
- W2053007071 title "Deposition of hydrogen-free DLC film over large areas by KrF (248 nm) pulsed-laser ablation with substrate scanning" @default.
- W2053007071 doi "https://doi.org/10.1117/12.361203" @default.
- W2053007071 hasPublicationYear "1999" @default.
- W2053007071 type Work @default.
- W2053007071 sameAs 2053007071 @default.
- W2053007071 citedByCount "0" @default.
- W2053007071 crossrefType "proceedings-article" @default.
- W2053007071 hasAuthorship W2053007071A5011500599 @default.
- W2053007071 hasAuthorship W2053007071A5043157731 @default.
- W2053007071 hasAuthorship W2053007071A5050563694 @default.
- W2053007071 hasAuthorship W2053007071A5085642805 @default.
- W2053007071 hasAuthorship W2053007071A5088035392 @default.
- W2053007071 hasConcept C111368507 @default.
- W2053007071 hasConcept C120665830 @default.
- W2053007071 hasConcept C121332964 @default.
- W2053007071 hasConcept C123380192 @default.
- W2053007071 hasConcept C127313418 @default.
- W2053007071 hasConcept C151730666 @default.
- W2053007071 hasConcept C159985019 @default.
- W2053007071 hasConcept C171250308 @default.
- W2053007071 hasConcept C19067145 @default.
- W2053007071 hasConcept C192562407 @default.
- W2053007071 hasConcept C26771246 @default.
- W2053007071 hasConcept C2777289219 @default.
- W2053007071 hasConcept C2779188808 @default.
- W2053007071 hasConcept C2816523 @default.
- W2053007071 hasConcept C37982897 @default.
- W2053007071 hasConcept C40003534 @default.
- W2053007071 hasConcept C49040817 @default.
- W2053007071 hasConcept C520434653 @default.
- W2053007071 hasConcept C544956773 @default.
- W2053007071 hasConcept C64297162 @default.
- W2053007071 hasConcept C84416704 @default.
- W2053007071 hasConcept C86803240 @default.
- W2053007071 hasConceptScore W2053007071C111368507 @default.
- W2053007071 hasConceptScore W2053007071C120665830 @default.
- W2053007071 hasConceptScore W2053007071C121332964 @default.
- W2053007071 hasConceptScore W2053007071C123380192 @default.
- W2053007071 hasConceptScore W2053007071C127313418 @default.
- W2053007071 hasConceptScore W2053007071C151730666 @default.
- W2053007071 hasConceptScore W2053007071C159985019 @default.
- W2053007071 hasConceptScore W2053007071C171250308 @default.
- W2053007071 hasConceptScore W2053007071C19067145 @default.
- W2053007071 hasConceptScore W2053007071C192562407 @default.
- W2053007071 hasConceptScore W2053007071C26771246 @default.
- W2053007071 hasConceptScore W2053007071C2777289219 @default.
- W2053007071 hasConceptScore W2053007071C2779188808 @default.
- W2053007071 hasConceptScore W2053007071C2816523 @default.
- W2053007071 hasConceptScore W2053007071C37982897 @default.
- W2053007071 hasConceptScore W2053007071C40003534 @default.
- W2053007071 hasConceptScore W2053007071C49040817 @default.
- W2053007071 hasConceptScore W2053007071C520434653 @default.
- W2053007071 hasConceptScore W2053007071C544956773 @default.
- W2053007071 hasConceptScore W2053007071C64297162 @default.
- W2053007071 hasConceptScore W2053007071C84416704 @default.
- W2053007071 hasConceptScore W2053007071C86803240 @default.
- W2053007071 hasLocation W20530070711 @default.
- W2053007071 hasOpenAccess W2053007071 @default.
- W2053007071 hasPrimaryLocation W20530070711 @default.
- W2053007071 hasRelatedWork W1985306321 @default.
- W2053007071 hasRelatedWork W1996794184 @default.
- W2053007071 hasRelatedWork W2003810669 @default.
- W2053007071 hasRelatedWork W2005535235 @default.
- W2053007071 hasRelatedWork W2019983156 @default.
- W2053007071 hasRelatedWork W2039923247 @default.
- W2053007071 hasRelatedWork W2042827331 @default.
- W2053007071 hasRelatedWork W2049279148 @default.
- W2053007071 hasRelatedWork W2050923673 @default.
- W2053007071 hasRelatedWork W2070866217 @default.
- W2053007071 hasRelatedWork W2071639074 @default.
- W2053007071 hasRelatedWork W2078458258 @default.
- W2053007071 hasRelatedWork W2088674597 @default.
- W2053007071 hasRelatedWork W2109947041 @default.
- W2053007071 hasRelatedWork W2134225945 @default.
- W2053007071 hasRelatedWork W2143830851 @default.
- W2053007071 hasRelatedWork W2192402837 @default.
- W2053007071 hasRelatedWork W2377198871 @default.
- W2053007071 hasRelatedWork W2380378176 @default.
- W2053007071 hasRelatedWork W2799824950 @default.
- W2053007071 isParatext "false" @default.
- W2053007071 isRetracted "false" @default.
- W2053007071 magId "2053007071" @default.
- W2053007071 workType "article" @default.