Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053013449> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2053013449 abstract "A surface micromachined polysilicon membrane, compatible with IC technology, was technologically designed and mechanically and thermally simulated by 3D finite element 'COSMOS' program in order to investigate its capability to work as micro hot plates for gas sensing applications. The optimized lay-out of hot plate consists of a polysilicon membrane of area of 110 by 110 micrometers <SUP>2</SUP> supported by four 'poly' suspended bridges and a central 'poly' pillar (MWCP). The air gap between membrane and substrate is equal to 1 micrometers . Within this paper, the simulation results are shown as a function of input power and surface area of the membrane. At room temperature the following results were obtained. The maximum normal stress has a value of 151.12 N/m<SUP>2</SUP> and is situated at a distance of 20 micrometers around the central pillar. Also, the maximum displacement has a value of 3.81 by 10<SUP>-4</SUP> micrometers and it is located at about half distance between the center of the membrane and its lateral edge. At an input power of 100 mW applied to the MWCP structure, the strain-stress spatial distributions have been qualitatively preserved with respect to RT situation but all the values increased by about 1300 times. The value of this normal stress for the MWCP structure is now about 196.45728 by 10<SUP>3</SUP> N/m<SUP>2</SUP>. For an input power of 100 mW, the maximum displacements of the membrane are located in the same place as in the RT case, and their values are lower than 0.1 micrometers ." @default.
- W2053013449 created "2016-06-24" @default.
- W2053013449 creator A5015720116 @default.
- W2053013449 creator A5039534581 @default.
- W2053013449 creator A5042523697 @default.
- W2053013449 creator A5080115306 @default.
- W2053013449 date "1999-03-10" @default.
- W2053013449 modified "2023-10-18" @default.
- W2053013449 title "Mechanical-thermal simulation of surface-micromachined polysilicon hot plates" @default.
- W2053013449 doi "https://doi.org/10.1117/12.341221" @default.
- W2053013449 hasPublicationYear "1999" @default.
- W2053013449 type Work @default.
- W2053013449 sameAs 2053013449 @default.
- W2053013449 citedByCount "2" @default.
- W2053013449 crossrefType "proceedings-article" @default.
- W2053013449 hasAuthorship W2053013449A5015720116 @default.
- W2053013449 hasAuthorship W2053013449A5039534581 @default.
- W2053013449 hasAuthorship W2053013449A5042523697 @default.
- W2053013449 hasAuthorship W2053013449A5080115306 @default.
- W2053013449 hasConcept C105289051 @default.
- W2053013449 hasConcept C111368507 @default.
- W2053013449 hasConcept C121332964 @default.
- W2053013449 hasConcept C127313418 @default.
- W2053013449 hasConcept C127413603 @default.
- W2053013449 hasConcept C136525101 @default.
- W2053013449 hasConcept C138885662 @default.
- W2053013449 hasConcept C142724271 @default.
- W2053013449 hasConcept C145667562 @default.
- W2053013449 hasConcept C153294291 @default.
- W2053013449 hasConcept C159985019 @default.
- W2053013449 hasConcept C162307627 @default.
- W2053013449 hasConcept C185592680 @default.
- W2053013449 hasConcept C192562407 @default.
- W2053013449 hasConcept C204530211 @default.
- W2053013449 hasConcept C204787440 @default.
- W2053013449 hasConcept C21036866 @default.
- W2053013449 hasConcept C2777289219 @default.
- W2053013449 hasConcept C41625074 @default.
- W2053013449 hasConcept C41895202 @default.
- W2053013449 hasConcept C49040817 @default.
- W2053013449 hasConcept C55493867 @default.
- W2053013449 hasConcept C66938386 @default.
- W2053013449 hasConcept C71924100 @default.
- W2053013449 hasConcept C76155785 @default.
- W2053013449 hasConceptScore W2053013449C105289051 @default.
- W2053013449 hasConceptScore W2053013449C111368507 @default.
- W2053013449 hasConceptScore W2053013449C121332964 @default.
- W2053013449 hasConceptScore W2053013449C127313418 @default.
- W2053013449 hasConceptScore W2053013449C127413603 @default.
- W2053013449 hasConceptScore W2053013449C136525101 @default.
- W2053013449 hasConceptScore W2053013449C138885662 @default.
- W2053013449 hasConceptScore W2053013449C142724271 @default.
- W2053013449 hasConceptScore W2053013449C145667562 @default.
- W2053013449 hasConceptScore W2053013449C153294291 @default.
- W2053013449 hasConceptScore W2053013449C159985019 @default.
- W2053013449 hasConceptScore W2053013449C162307627 @default.
- W2053013449 hasConceptScore W2053013449C185592680 @default.
- W2053013449 hasConceptScore W2053013449C192562407 @default.
- W2053013449 hasConceptScore W2053013449C204530211 @default.
- W2053013449 hasConceptScore W2053013449C204787440 @default.
- W2053013449 hasConceptScore W2053013449C21036866 @default.
- W2053013449 hasConceptScore W2053013449C2777289219 @default.
- W2053013449 hasConceptScore W2053013449C41625074 @default.
- W2053013449 hasConceptScore W2053013449C41895202 @default.
- W2053013449 hasConceptScore W2053013449C49040817 @default.
- W2053013449 hasConceptScore W2053013449C55493867 @default.
- W2053013449 hasConceptScore W2053013449C66938386 @default.
- W2053013449 hasConceptScore W2053013449C71924100 @default.
- W2053013449 hasConceptScore W2053013449C76155785 @default.
- W2053013449 hasLocation W20530134491 @default.
- W2053013449 hasOpenAccess W2053013449 @default.
- W2053013449 hasPrimaryLocation W20530134491 @default.
- W2053013449 hasRelatedWork W1994103032 @default.
- W2053013449 hasRelatedWork W2051270029 @default.
- W2053013449 hasRelatedWork W2082293200 @default.
- W2053013449 hasRelatedWork W2137307547 @default.
- W2053013449 hasRelatedWork W2380293314 @default.
- W2053013449 hasRelatedWork W2911724547 @default.
- W2053013449 hasRelatedWork W2943188944 @default.
- W2053013449 hasRelatedWork W3008690834 @default.
- W2053013449 hasRelatedWork W4242480814 @default.
- W2053013449 hasRelatedWork W4285802202 @default.
- W2053013449 isParatext "false" @default.
- W2053013449 isRetracted "false" @default.
- W2053013449 magId "2053013449" @default.
- W2053013449 workType "article" @default.