Matches in SemOpenAlex for { <https://semopenalex.org/work/W2053014209> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W2053014209 abstract "As new resolution enhancement techniques (RETs) are adopted to progress beyond 100 nm, the costs and benefits to the overall system of data handling must be viewed as an overall system. A 'state' approach to viewing flows has been very useful for determining insertion points for several RETs. Data preparation is a necessary part of the transformation from layout to mask. The data manipulations of required for RET also fall in this space between layout and mask. When separate point tools are used to carry out these different manipulations, increasingly large amounts of time are required to simply move data from one point tool to the other. As data file sizes increase as expected over the next decade, this problem will increase by orders of magnitude. None of this time is providing any additional productivity for data preparation. The result has been pressure to provide an integrated solution, in which OPC, phase assignment, and data preparation all share a single database. This delays flattening the data until the last necessary moment, presumably in the mask writer itself." @default.
- W2053014209 created "2016-06-24" @default.
- W2053014209 creator A5089107024 @default.
- W2053014209 date "2002-07-31" @default.
- W2053014209 modified "2023-09-23" @default.
- W2053014209 title "Advanced data preparation and design automation" @default.
- W2053014209 doi "https://doi.org/10.1117/12.476929" @default.
- W2053014209 hasPublicationYear "2002" @default.
- W2053014209 type Work @default.
- W2053014209 sameAs 2053014209 @default.
- W2053014209 citedByCount "1" @default.
- W2053014209 countsByYear W20530142092016 @default.
- W2053014209 crossrefType "proceedings-article" @default.
- W2053014209 hasAuthorship W2053014209A5089107024 @default.
- W2053014209 hasConcept C104317684 @default.
- W2053014209 hasConcept C115901376 @default.
- W2053014209 hasConcept C1232282 @default.
- W2053014209 hasConcept C127413603 @default.
- W2053014209 hasConcept C135572916 @default.
- W2053014209 hasConcept C150670458 @default.
- W2053014209 hasConcept C185592680 @default.
- W2053014209 hasConcept C204241405 @default.
- W2053014209 hasConcept C2524010 @default.
- W2053014209 hasConcept C28719098 @default.
- W2053014209 hasConcept C33923547 @default.
- W2053014209 hasConcept C41008148 @default.
- W2053014209 hasConcept C55493867 @default.
- W2053014209 hasConcept C77088390 @default.
- W2053014209 hasConcept C78519656 @default.
- W2053014209 hasConcept C79403827 @default.
- W2053014209 hasConcept C9390403 @default.
- W2053014209 hasConceptScore W2053014209C104317684 @default.
- W2053014209 hasConceptScore W2053014209C115901376 @default.
- W2053014209 hasConceptScore W2053014209C1232282 @default.
- W2053014209 hasConceptScore W2053014209C127413603 @default.
- W2053014209 hasConceptScore W2053014209C135572916 @default.
- W2053014209 hasConceptScore W2053014209C150670458 @default.
- W2053014209 hasConceptScore W2053014209C185592680 @default.
- W2053014209 hasConceptScore W2053014209C204241405 @default.
- W2053014209 hasConceptScore W2053014209C2524010 @default.
- W2053014209 hasConceptScore W2053014209C28719098 @default.
- W2053014209 hasConceptScore W2053014209C33923547 @default.
- W2053014209 hasConceptScore W2053014209C41008148 @default.
- W2053014209 hasConceptScore W2053014209C55493867 @default.
- W2053014209 hasConceptScore W2053014209C77088390 @default.
- W2053014209 hasConceptScore W2053014209C78519656 @default.
- W2053014209 hasConceptScore W2053014209C79403827 @default.
- W2053014209 hasConceptScore W2053014209C9390403 @default.
- W2053014209 hasLocation W20530142091 @default.
- W2053014209 hasOpenAccess W2053014209 @default.
- W2053014209 hasPrimaryLocation W20530142091 @default.
- W2053014209 hasRelatedWork W2089546184 @default.
- W2053014209 hasRelatedWork W2111829026 @default.
- W2053014209 hasRelatedWork W2356193090 @default.
- W2053014209 hasRelatedWork W2357693880 @default.
- W2053014209 hasRelatedWork W2361722067 @default.
- W2053014209 hasRelatedWork W2365767001 @default.
- W2053014209 hasRelatedWork W2365978930 @default.
- W2053014209 hasRelatedWork W2372065555 @default.
- W2053014209 hasRelatedWork W2379535307 @default.
- W2053014209 hasRelatedWork W2394150894 @default.
- W2053014209 isParatext "false" @default.
- W2053014209 isRetracted "false" @default.
- W2053014209 magId "2053014209" @default.
- W2053014209 workType "article" @default.