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- W2053048111 abstract "Sheet conductance measurements were carried out to determine the diffusion profiles with and without p-n junctions. Diffusion of antimony and arsenic in n-Si of resistivity 5000 Ω cm was evaluated by the four-point resistivity method and the results were compared with those from tracer experiments." @default.
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- W2053048111 date "1982-01-01" @default.
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- W2053048111 title "Sheet conductance and tracer diffusion of antimony and arsenic in silicon" @default.
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- W2053048111 doi "https://doi.org/10.1016/0040-6090(82)90263-2" @default.
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