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- W2053126935 abstract "Abstract Recent progress in thin film deposition techniques has motivated a renewed interest in artifically prepared layered microstructures. These multilayers can be used as Bragg reflectors for X-ray-UV optics in the range 100–1000 eV. Ideal multilayers require optimized thicknesses of low and high absorbing materials with perfect interfaces. The main problems are the control of the layer thicknesses to a high accuracy and the attainment of good quality interfaces between the layers. We have used a low energy (300–500 V) d.c. triode sputtering system which gives very sharp interfaces. We describe a new method of thickness monitoring which is based on the dependence of the deposition rate on the target current. The sequence and timing of the deposition of each layer is controlled using a microprocessor which also regulates the sputtering parameters (pressures, target voltage etc.). Thicknesses can be controlled with an accuracy to better than 0.1 A and a reproducibility of better than 0.1%." @default.
- W2053126935 created "2016-06-24" @default.
- W2053126935 creator A5043612651 @default.
- W2053126935 creator A5087299395 @default.
- W2053126935 date "1985-03-01" @default.
- W2053126935 modified "2023-09-23" @default.
- W2053126935 title "Multilayers deposited by triode sputtering using a new accurate method of film thicknesses monitoring" @default.
- W2053126935 cites W1555692347 @default.
- W2053126935 cites W1641583379 @default.
- W2053126935 cites W1968788203 @default.
- W2053126935 cites W2086529087 @default.
- W2053126935 cites W2155966253 @default.
- W2053126935 cites W2587732333 @default.
- W2053126935 cites W27165198 @default.
- W2053126935 doi "https://doi.org/10.1016/0040-6090(85)90246-9" @default.
- W2053126935 hasPublicationYear "1985" @default.
- W2053126935 type Work @default.
- W2053126935 sameAs 2053126935 @default.
- W2053126935 citedByCount "2" @default.
- W2053126935 crossrefType "journal-article" @default.
- W2053126935 hasAuthorship W2053126935A5043612651 @default.
- W2053126935 hasAuthorship W2053126935A5087299395 @default.
- W2053126935 hasConcept C119599485 @default.
- W2053126935 hasConcept C120665830 @default.
- W2053126935 hasConcept C121332964 @default.
- W2053126935 hasConcept C123544296 @default.
- W2053126935 hasConcept C127413603 @default.
- W2053126935 hasConcept C151730666 @default.
- W2053126935 hasConcept C165801399 @default.
- W2053126935 hasConcept C171250308 @default.
- W2053126935 hasConcept C185592680 @default.
- W2053126935 hasConcept C19067145 @default.
- W2053126935 hasConcept C192562407 @default.
- W2053126935 hasConcept C22423302 @default.
- W2053126935 hasConcept C2779227376 @default.
- W2053126935 hasConcept C2816523 @default.
- W2053126935 hasConcept C43617362 @default.
- W2053126935 hasConcept C49040817 @default.
- W2053126935 hasConcept C52192207 @default.
- W2053126935 hasConcept C61427134 @default.
- W2053126935 hasConcept C64297162 @default.
- W2053126935 hasConcept C86803240 @default.
- W2053126935 hasConcept C9893847 @default.
- W2053126935 hasConceptScore W2053126935C119599485 @default.
- W2053126935 hasConceptScore W2053126935C120665830 @default.
- W2053126935 hasConceptScore W2053126935C121332964 @default.
- W2053126935 hasConceptScore W2053126935C123544296 @default.
- W2053126935 hasConceptScore W2053126935C127413603 @default.
- W2053126935 hasConceptScore W2053126935C151730666 @default.
- W2053126935 hasConceptScore W2053126935C165801399 @default.
- W2053126935 hasConceptScore W2053126935C171250308 @default.
- W2053126935 hasConceptScore W2053126935C185592680 @default.
- W2053126935 hasConceptScore W2053126935C19067145 @default.
- W2053126935 hasConceptScore W2053126935C192562407 @default.
- W2053126935 hasConceptScore W2053126935C22423302 @default.
- W2053126935 hasConceptScore W2053126935C2779227376 @default.
- W2053126935 hasConceptScore W2053126935C2816523 @default.
- W2053126935 hasConceptScore W2053126935C43617362 @default.
- W2053126935 hasConceptScore W2053126935C49040817 @default.
- W2053126935 hasConceptScore W2053126935C52192207 @default.
- W2053126935 hasConceptScore W2053126935C61427134 @default.
- W2053126935 hasConceptScore W2053126935C64297162 @default.
- W2053126935 hasConceptScore W2053126935C86803240 @default.
- W2053126935 hasConceptScore W2053126935C9893847 @default.
- W2053126935 hasLocation W20531269351 @default.
- W2053126935 hasOpenAccess W2053126935 @default.
- W2053126935 hasPrimaryLocation W20531269351 @default.
- W2053126935 hasRelatedWork W1632320884 @default.
- W2053126935 hasRelatedWork W1974689438 @default.
- W2053126935 hasRelatedWork W1979332190 @default.
- W2053126935 hasRelatedWork W2006334283 @default.
- W2053126935 hasRelatedWork W2029338575 @default.
- W2053126935 hasRelatedWork W2036023842 @default.
- W2053126935 hasRelatedWork W2049099418 @default.
- W2053126935 hasRelatedWork W2051608166 @default.
- W2053126935 hasRelatedWork W2061856096 @default.
- W2053126935 hasRelatedWork W2063162114 @default.
- W2053126935 hasRelatedWork W2078458116 @default.
- W2053126935 hasRelatedWork W2131449935 @default.
- W2053126935 hasRelatedWork W2179006858 @default.
- W2053126935 hasRelatedWork W2358134938 @default.
- W2053126935 hasRelatedWork W2802071841 @default.
- W2053126935 hasRelatedWork W2895855516 @default.
- W2053126935 hasRelatedWork W304675898 @default.
- W2053126935 hasRelatedWork W3111527068 @default.
- W2053126935 hasRelatedWork W2088633166 @default.
- W2053126935 hasRelatedWork W2927879539 @default.
- W2053126935 isParatext "false" @default.
- W2053126935 isRetracted "false" @default.
- W2053126935 magId "2053126935" @default.
- W2053126935 workType "article" @default.